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    • 7. 发明申请
    • CONDUCTIVE POLISHING PAD WITH ANODE AND CATHODE
    • 导电抛光垫与阳极和阴极
    • WO2004094107A1
    • 2004-11-04
    • PCT/US2004/009243
    • 2004-03-24
    • ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
    • SO, Joseph, K.
    • B24B37/04
    • B24B37/24B23H5/08B24B37/046B24B37/20C25F7/00Y10S451/908
    • A conductive polishing pad (10) that includes one or more anodes (24) and one or more cathodes (26) formed at or near the polishing surface of a polishing pad. The anodes and cathodes are connected to a wiring network (52) that is part of an electrical connector system that allows for a current source to be connected to the polishing pad and provide a current to the anodes and cathodes even if the polishing pad is moving relative to the current source. An electrolytic polishing fluid (20) introduced between the polishing surface and the metal layer of a wafer forms an electrical circuit between the anode, cathode and the metal layer. The conductive polishing pad allows for electrochemical mechanical polishing (ECMP) to be performed on a conventional chemical mechanical polishing (CMP) tool.
    • 一种导电抛光垫(10),其包括在抛光垫的抛光表面处或附近形成的一个或多个阳极(24)和一个或多个阴极(26)。 阳极和阴极连接到作为电连接器系统的一部分的布线网络(52),其允许电流源连接到抛光垫并且即使抛光垫移动也向阳极和阴极提供电流 相对于当前来源。 引入在抛光表面和晶片的金属层之间的电解抛光液(20)在阳极,阴极和金属层之间形成电路。 导电抛光垫允许在常规化学机械抛光(CMP)工具上进行电化学机械抛光(ECMP)。
    • 8. 发明申请
    • 電子ビームアシストEEM法
    • 电子束辅助EEM方法
    • WO2007018117A1
    • 2007-02-15
    • PCT/JP2006/315388
    • 2006-08-03
    • 森 勇蔵
    • 森 勇蔵
    • B24B1/00B24B19/22B24B31/06B24B37/00
    • G21K1/06B23H5/04B23H7/38B23K15/00B24B31/10B24C1/08G21K2201/064G21K2201/067Y10S451/908
    • [PROBLEMS] To provide an electron beam assisted EEM method that can realize ultraprecision machining of workpieces, including glass ceramic materials, in which at least two component materials different from each other in machining speed in a machining process are present in a refined mixed state and the surface state is not even, to a surface roughness of 0.2 to 0.05 nm RMS. [MEANS FOR SOLVING PROBLEMS] The EEM method comprises a working process in which a workpiece and chemically reactive fine particles are allowed to flow along the working face to remove atoms on the working face chemically bonded to the fine particles together with the fine particles through chemical interaction between the fine particles and the working face interface. The workpiece comprises at least two component materials present in a refined mixed state and different from each other in machining speed in the machining process. After the exposure of the workpiece in its working face to an electron beam to conduct modification so that the machining speed of the surface layer part in the working face is substantially even, ultraprecision smoothening is carried out by working process.
    • 提供一种电子束辅助EEM方法,其能够实现包括玻璃陶瓷材料在内的工件的超精密加工,其中在加工过程中加工速度彼此不同的至少两种组分材料以精炼混合状态存在, 表面状态不均匀,表面粗糙度为0.2〜0.05nm RMS。 [解决问题的方法] EEM方法包括一个工作过程,其中允许工件和化学反应性微粒沿着工作面流动,以通过化学处理将微粒与微粒一起化学键合到工作面上的原子 微粒与工作面界面之间的相互作用。 工件包括以精加工的混合状态存在并且在加工过程中以加工速度彼此不同的至少两种组分材料。 在将工件的工作面暴露于电子束进行变形,使得工作面中的表层部的加工速度基本均匀的情况下,通过加工工序进行超精密平滑化。
    • 10. 发明申请
    • Electro-chemical machining apparatus
    • 电化学加工设备
    • US20040188244A1
    • 2004-09-30
    • US10818818
    • 2004-04-06
    • Shuzo SatoZenya YasudaMasao IshiharaHiizu OotoriiTakeshi NogamiNaoki Komai
    • B23H003/00
    • B24B37/04B24B7/228B24B21/04B24B57/02Y10S451/908
    • The electro-chemical machining apparatus of this invention is designed to smoothing a metal film by efficiently reducing initial rough surface and removing excessive metal film with reduced damages to the metal film. For this end, the electro-chemical machining apparatus performs electro-chemical machining of an object to be machined having a metal film on the surface to be machined. Such apparatus has a means for holding the object to be machined, a wiper for wiping the surface of the object to be machined, a means for supplying electrolytic solution onto the surface of the object to be machined, a first electrode disposed at a position opposed to the surface of the object to be machined, a second electrode disposed at a peripheral portion on the surface of the object to be machined, and a power supply for causing electrical current to flow between the second electrode on the surface of the object to be machined and the first electrode.
    • 本发明的电化学加工装置被设计成通过有效地降低初始粗糙表面并且减少对金属膜的损伤去除过量的金属膜来平滑金属膜。 为此,电化学加工装置对待加工表面上具有金属膜的被加工物进行电化学加工。 这种装置具有用于保持待加工物体的装置,用于擦拭待加工物体的表面的擦拭器,用于将电解液供给到待加工物体的表面上的装置,设置在相对的位置的第一电极 到被加工物的表面,设置在被加工物的表面的周边部分的第二电极,以及用于使电流在物体表面上的第二电极之间流动的电源为 加工和第一个电极。