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1. 发明授权

EP1920883B1 ELECTRON BEAM ASSISTED EEM METHOD 有权
标题翻译：电子助EEM程序
公开(公告)号：EP1920883B1
公开(公告)日：2013-05-22
申请号：EP06782248.6
申请日：2006-08-03
申请人： Mori, Yuzo , JTEC Corporation
发明人： Mori, Yuzo
IPC分类号： B24B1/00 , B24B19/22 , B24B31/06 , B24B37/00 , B24B31/116 , B24C1/08 , G02B5/08 , G21K1/06
CPC分类号： G21K1/06 , B23H5/04 , B23H7/38 , B23K15/00 , B24B31/10 , B24C1/08 , G21K2201/064 , G21K2201/067 , Y10S451/908

2. 发明授权

EP0300224B1 Strainless precision after-treatment process by radical reaction 失效
标题翻译：通过自由基反应准确无应力后处理工艺。
公开(公告)号：EP0300224B1
公开(公告)日：1993-12-08
申请号：EP88110108.3
申请日：1988-06-24
申请人： Mori, Yuzo , UHA MIKAKUTO PRECISION ENGINEERING RESEARCH INSTITUTE Co., Ltd.
发明人： Mori, Yuzo , Yamauchi, Kazuto
IPC分类号： C30B33/00 , B23K26/12
CPC分类号： B28D5/00 , C30B33/00

3. 发明授权

EP1079003B1 Electrolytic machining method and apparatus 有权
标题翻译：用于电解处理的方法和装置
公开(公告)号：EP1079003B1
公开(公告)日：2007-05-16
申请号：EP00118511.5
申请日：2000-08-25
申请人： Mori, Yuzo , EBARA CORPORATION
发明人： Mori, Yuzo , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi , Fukunaga, Akira , Kobata, Itsuki
IPC分类号： C23F3/00 , B23H3/08
CPC分类号： C25F3/00 , B23H3/08

4. 发明公开

EP1170083A2 Electrochemical machining method and apparatus 有权
标题翻译：用于电化学治疗的方法和装置
公开(公告)号：EP1170083A2
公开(公告)日：2002-01-09
申请号：EP01116344.1
申请日：2001-07-05
申请人： EBARA CORPORATION , Mori, Yuzo
发明人： Mori, Yuzo , Kobata, Itsuki , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi
IPC分类号： B23H3/08 , C25F3/00
CPC分类号： B23H3/08
摘要： An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece holding portion for holding a workpiece at a predetermined distance from the cathode/anode so that a surface, to be machined, of the workpiece is brought into contact with the ultrapure water. The electrochemical machining apparatus further comprises an anode/cathode contact brought into contact with the workpiece held by the workpiece holding portion so that the workpiece serves as an anode/cathode, a catalyst having a strongly basic anion exchange function or a strongly acidic cation exchange function, a power source for applying a voltage between the cathode/anode and the workpiece, and a moving mechanism for relatively moving the workpiece and the catalyst. The catalyst is disposed between the cathode/anode and the workpiece held by the workpiece holding portion.

5. 发明公开

EP0415122A3 Method and apparatus for film formation by high pressure microwave plasma chemical vapour deposition 失效
标题翻译：通过高压微波等离子体化学气相沉积形成膜的方法和装置
公开(公告)号：EP0415122A3
公开(公告)日：1991-05-29
申请号：EP90114951.8
申请日：1990-08-03
申请人： Mori, Yuzo , UHA MIKAKUTO PRECISION ENGINEERING RESEARCH INSTITUTE Co., Ltd.
发明人： Mori, Yuzo
IPC分类号： C23C16/50 , H01J37/32
CPC分类号： H01J37/32275 , C23C16/511 , H01J37/32192 , H01J2237/3321
摘要： A film forming method and an apparatus therefor, in which reactant gas and carrier gas set in 10 torr through several atms very higher than the conventional plasma CVD gas pressure are put in a plasma condition of high density by utilizing standing waves or progressive waves of the microwave in a predetermined space, and then neutral radicals and ions of reactant species based on the reactant gas are guided to a substrate, thereby high-speed forming a thin film thereon.

6. 发明公开

EP0415122A2 Method and apparatus for film formation by high pressure microwave plasma chemical vapour deposition 失效
标题翻译：用于通过高压微波等离子体化学气相沉积成膜方法和装置。
公开(公告)号：EP0415122A2
公开(公告)日：1991-03-06
申请号：EP90114951.8
申请日：1990-08-03
申请人： Mori, Yuzo , UHA MIKAKUTO PRECISION ENGINEERING RESEARCH INSTITUTE Co., Ltd.
发明人： Mori, Yuzo
IPC分类号： C23C16/50 , H01J37/32
CPC分类号： H01J37/32275 , C23C16/511 , H01J37/32192 , H01J2237/3321
摘要： A film forming method and an apparatus therefor, in which reactant gas and carrier gas set in 10 torr through several atms very higher than the conventional plasma CVD gas pressure are put in a plasma condition of high density by utilizing standing waves or progressive waves of the microwave in a predetermined space, and then neutral radicals and ions of reactant species based on the reactant gas are guided to a substrate, thereby high-speed forming a thin film thereon.
摘要翻译：的成膜方法和装置为此，在该反应气体和载气通过利用驻波或的行波设定在10乇通过几个大气压比传统的等离子CVD的气体压力非常高被置于高密度的等离子体状态微波在预定的空间，然后中性自由基以及基于所述反应物气体反应物种类的离子被引导到一个底物，从而在其上形成高速薄膜。

7. 发明公开

EP1920883A1 ELECTRON BEAM ASSISTED EEM METHOD 有权
标题翻译： ELEKTRONENSTRAHLUNTERSTÜTZTESEEM-VERFAHREN
公开(公告)号：EP1920883A1
公开(公告)日：2008-05-14
申请号：EP06782248.6
申请日：2006-08-03
申请人： Mori, Yuzo
发明人： Mori, Yuzo
IPC分类号： B24B1/00 , B24B19/22 , B24B31/06 , B24B37/00
CPC分类号： G21K1/06 , B23H5/04 , B23H7/38 , B23K15/00 , B24B31/10 , B24C1/08 , G21K2201/064 , G21K2201/067 , Y10S451/908
摘要： To provide an electron beam assisted EEM method that can realize ultraprecision machining of workpieces, including glass ceramic materials, in which at least two component materials different from each other in machining speed in a machining process are present in a refined mixed state and the surface state is not even, to a surface roughness of 0.2 to 0.05 nm RMS. The EEM method comprises a working process in which a workpiece and chemically reactive fine particles are allowed to flow along the working face to remove atoms on the working face chemically bonded to the fine particles together with the fine particles through chemical interaction between the fine particles and the working face interface. The workpiece comprises at least two component materials present in a refined mixed state and different from each other in machining speed in the machining process. After the exposure of the workpiece in its working face to an electron beam to conduct modification so that the machining speed of the surface layer part in the working face is substantially even, ultraprecision smoothening is carried out by working process.
摘要翻译：提供一种能够实现包括玻璃陶瓷材料的工件的超精密加工的电子束辅助EEM方法，其中在加工过程中以加工速度彼此不同的至少两种组分材料以精细混合状态存在，并且表面状态不均匀，表面粗糙度为0.2〜0.05nm RMS。 EEM方法包括一个工作过程，其中允许工件和化学反应性微粒沿着工作面流动，以通过细颗粒与细颗粒之间的化学相互作用将微粒与化学键合的工作面上的原子除去工作面界面。工件包括以精加工的混合状态存在并且在加工过程中加工速度彼此不同的至少两种组分材料。在将工件的工作面暴露于电子束进行变形，使得工作面中的表面层部的加工速度基本均匀的情况下，通过工作过程进行超精密平滑化。

8. 发明公开

EP1079003A3 Electrolytic machining method and apparatus 有权
标题翻译：维尔法赫恩（Vfrichtung zur elektrolytischen）熊贝通
公开(公告)号：EP1079003A3
公开(公告)日：2004-01-21
申请号：EP00118511.5
申请日：2000-08-25
申请人： Mori, Yuzo , EBARA CORPORATION
发明人： Mori, Yuzo , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi , Fukunaga, Akira , Kobata, Itsuki
IPC分类号： C23F3/00 , B23H3/08
CPC分类号： C25F3/00 , B23H3/08
摘要： An anode (2) as a workpiece, and a cathode (1) opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material (3) promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultrapure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultrapure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultrapure water, with no impurities left behind on the processed surface of the workpiece.
摘要翻译：将作为工件的阳极（2）和与阳极相对的具有预定间隔的阴极（1）放置在超纯水中。在工件和阴极之间设置促进超纯水的离解并具有透水性的催化材料（3）。在催化材料内部形成有超纯水的流动，在工件和阴极之间施加电压，将超纯水中的水分子分解为氢离子和氢氧根离子，并将得到的氢氧根离子供给到从而通过化学溶解反应或由氢氧根离子介导的氧化反应进行工件的去除处理或氧化膜形成。因此，可以通过在超纯水中使用氢氧根离子进行清洁处理，在工件的加工表面上不会留下杂质。

9. 发明公开

EP1079003A2 Electrolytic machining method and apparatus 有权
标题翻译：用于电解处理的方法和装置
公开(公告)号：EP1079003A2
公开(公告)日：2001-02-28
申请号：EP00118511.5
申请日：2000-08-25
申请人： Mori, Yuzo , EBARA CORPORATION
发明人： Mori, Yuzo , Shirakashi, Mitsuhiko , Saito, Takayuki , Toma, Yasushi , Fukunaga, Akira , Kobata, Itsuki
IPC分类号： C23F3/00 , B23H3/08
CPC分类号： C25F3/00 , B23H3/08
摘要： An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultrapure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultrapure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultrapure water, with no impurities left behind on the processed surface of the workpiece.

10. 发明授权

EP0300224B2 Strainless precision after-treatment process by radical reaction 失效
标题翻译：通过自由基反应准确无应力后处理工艺
公开(公告)号：EP0300224B2
公开(公告)日：1998-09-30
申请号：EP88110108.3
申请日：1988-06-24
申请人： Mori, Yuzo , UHA MIKAKUTO PRECISION ENGINEERING RESEARCH INSTITUTE Co., Ltd.
发明人： Mori, Yuzo , Yamauchi, Kazuto
IPC分类号： C30B33/00 , B23K26/12
CPC分类号： B28D5/00 , C30B33/00

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