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1. 发明公开

EP1643003A1 Vaporizer for CVD apparatus 审中-公开
标题翻译：化学气相沉积法。
公开(公告)号：EP1643003A1
公开(公告)日：2006-04-05
申请号：EP05292037.8
申请日：2005-09-30
申请人： Youtec Co., Ltd. , Yamoto, Hisayoshi
发明人： Yamoto, Hisayoshi, Youtec Co., Ltd. , Koshimae, Shinichi, Youtec Co., Ltd.
IPC分类号： C23C16/448 , C23C16/44 , C23C16/52
CPC分类号： C23C16/4401 , C23C16/4412 , C23C16/4486 , C23C16/52
摘要： The vaporizer of the solution-vaporization type CVD apparatus comprises: the orifice tube, inside the nozzle (32), dispersing at least one kind of a raw-material solution in a carrier gas in a fine particulate or misty form; at least one path for at least one kind of the raw-material solution, the at least one path supplying at least one kind of the raw-material solution to the orifice tube separately from one another; the path for the carrier gas supplying the carrier gas to the orifice tube separately from the raw-material solution; the vaporizing tube vaporizing at least one kind of the raw-material solution dispersed by the orifice tube; and the orifice connected to the vaporizing tube (31) and the orifice tube, the orifice introducing at least one kind of the raw-material solution dispersed by the orifice tube into the vaporizing member.
摘要翻译：溶液蒸发型CVD装置的蒸发器包括：喷嘴（32）内的孔管，以至少一种原料溶液以细颗粒或雾状形式分散在载气中; 用于至少一种原料溶液的至少一个路径，所述至少一个路径将至少一种原料溶液彼此分离地供应到孔管; 用于将载气与原料溶液分开供给到孔管的载气的路径; 蒸发管将由孔管分散的至少一种原料溶液蒸发; 并且连接到蒸发管（31）和孔口管的孔口，孔口将由孔管分散的至少一种原料溶液引入蒸发构件。

2. 发明公开

EP1602912A1 METHOD OF MEASURING GAS BARRIER PROPERTY OF PLASTIC MOLDING 审中-公开
标题翻译： VFA PLASTIKFORMEN VRFAHREN ZUR MESSUNG DER GASBARRIERENEIGENS
公开(公告)号：EP1602912A1
公开(公告)日：2005-12-07
申请号：EP04714465.4
申请日：2004-02-25
申请人： Kage, Tsuyoshi , Youtec Co. Ltd. , Nippon API Co. Ltd.,
发明人： KAGE, Tsuyoshi; , KOBAYASHI, Takumi; Sun-life-family 2a, , MIZOKAMI, Kazuaki; C/o Nippon Api Co., ltd. , KOBAYASHI, Akiyoshi; C/o Nippon Api Co., Ltd.
IPC分类号： G01M13/00 , G01N15/08
CPC分类号： G01M3/226 , G01N15/0826
摘要： Object of present invention to overcome a problem of a dispersion of an evaluation of gas barrier property depending on absorbed moisture of plastic, and carry out measurements in which a measurement value response is good and accuracy is good, wherein from the beginning of a container the gas barrier property of a plastic molded body does not depend on the amount of moisture absorbed thereof. A method of measuring the gas barrier property of the plastic molded body such as a plastic container, a plastic sheet or a plastic film or the like which uses a gas analyzer to measure the amount of permeation of a measurement object gas permeating through the plastic molded body, comprising: a heat drying process which heats and dries said plastic molded body in a temperature range which does not cause deformation or heat deterioration.
摘要翻译：本发明的目的是为了克服根据吸收的塑料水分的气体阻隔性评价的分散性的问题，并且进行测量值响应良好并且精度良好的测量，其中从容器的开始处塑料成型体的阻气性不依赖于吸收的水分量。测量塑料成型体（塑料容器，塑料片或塑料薄膜等）的气体阻隔性的方法，该方法使用气体分析仪来测量渗透塑料模制品的测量对象气体的渗透量包括：在不引起变形或热劣化的温度范围内对所述塑料成型体进行加热和干燥的加热干燥方法。

3. 发明授权

EP1516941B1 ROTARY TYPE MASS-PRODUCING CVD FILM FORMING DEVICE AND METOD OF FORMING CVD FILM ON SURFACE IN PLASTIC CONTEINER 有权
标题翻译：用于生产CVD膜的表面IN A的塑料容器转动式进行批量生产与过程的CVD膜的制造装置
公开(公告)号：EP1516941B1
公开(公告)日：2012-02-22
申请号：EP03760909.6
申请日：2003-06-19
申请人： MITSUBISHI SHOJI PLASTICS CORPORATION , Youtec Co., Ltd.
发明人： HAMA, Kenichi, c/o Mitsubishi Shoji Plastics Corporation , KAGE, Tsuyoshi, c/o Mitsubishi Shoji Plastics Corporation , KOBAYASHI, Takumi, C/O YOUTEC CO., LTD , KAWABE, Takeharu, C/O YOUTEC CO., LTD
IPC分类号： C23C16/26 , B65D23/02
CPC分类号： C23C16/505 , C23C16/045 , C23C16/26 , C23C16/54
摘要： A rotary type, mass-producing CVD film forming device having high-frequency power supplies and matching boxes fewer than film-forming chambers. The device is characterized by comprising a plurality of column-shaped film-forming chambers each storing a plastic container and provided circularly on a rotary support at equal intervals, a material gas introducing means for introducing a material gal into a container stored in each film-forming chamber via a material gas supply pipe doubling as an internal electrode, and a high-frequency wave supply means for supplying high-frequency wave to an external electrode doubling as part of each film-forming chamber.

4. 发明公开

EP1357042A4 PRODUCTION DEVICE FOR DLC FILM-COATED PLASTIC CONTAINER AND PRODUCTION METHOD THEREFOR 审中-公开
标题翻译：根据上述制造DLC膜镀覆塑料容器和工艺制造装置
公开(公告)号：EP1357042A4
公开(公告)日：2008-06-25
申请号：EP00987732
申请日：2000-12-25
申请人： MITSUBISHI SHOJI PLASTICS CORP , YOUTEC CO LTD
发明人： HAMA KENICHI , KAGE TSUYOSHI , KOBAYASHI TAKUMI , ARAKI TOMOYUKI
IPC分类号： C23C16/04 , C23C16/26 , H01J37/32 , B65D1/00 , C08J7/06 , C23C16/27
CPC分类号： H01J37/32082 , C23C16/045 , C23C16/26 , H01J37/32532 , Y10S427/106
摘要： A production device for a DLC film-coated plastic container and a production method therefor, capable of forming DLC (diamond-like carbon) films simultaneously on the inner surfaces of a plurality of plastic containers, and reducing variations in film thickness. A production device for DLC film-coated plastic containers, for forming a plurality DLC films simultaneously, characterized by comprising a columnar external electrode (3) having housing spaces in which a plurality of plastic containers (7a-7d) can be disposed in parallel and independently, internal electrodes (9a-9d) respectively disposed in the housed containers (7a-7d), a matching box (14) connected to the external electrode (3) and impedance-matching a high-frequency load, and a high-frequency power supply (15) connected to the matching box.

5. 发明公开

EP1398274A1 MOISTURE AND GAS BARRIER PLASTIC CONTAINER WITH PARTITION PLATES, AND DEVICE AND METHOD FOR MANUFACTURING THE PLASTIC CONTAINER 审中-公开
标题翻译：湿度和气体阻隔HAVING SANTANDER塑料容器的砧板以及设备和方法塑料容器的生产
公开(公告)号：EP1398274A1
公开(公告)日：2004-03-17
申请号：EP01941126.3
申请日：2001-06-20
申请人： MITSUBISHI SHOJI PLASTICS CORPORATION , Youtec Co. Ltd.
发明人： HAMA, Kenichi, MITSUBISHI SHOJI PLASTICS CORP. , KAGE, Tsuyoshi, MITSUBISHI SHOJI PLASTICS CORP. , KOBAYASHI, Takumi, YOUTEC CO., LTD.
IPC分类号： B65D1/00 , B65D1/24 , B65D25/34 , C08J7/06 , C23C16/27
CPC分类号： C23C16/26 , C23C16/045 , C23C16/509 , Y10T428/13
摘要： The present invention provides a moisture and gas barrier plastic container with partition plates. In addition, this invention provides a manufacturing apparatus and a method of manufacturing for the container too. The manufacturing apparatus (100) of the present invention is an apparatus which forms a DLC film on inner wall surfaces (3) having an inside/outside relationship with respect to outer wall surfaces (2) of the plastic container equipped with partition plates (1), and partition plate wall surfaces (5) formed by the partition plates by a plasma CVD method. And this apparatus is characterized by having a vacuum chamber (6) which surrounds the plastic container (1) and also serves as an external electrode, a grounded internal electrode (8) which passes through the vacuum chamber (6) and is inserted into the inside of each compartment (7) inside the plastic container (1) formed by the inner wall surfaces (3) and the partition plate wall surfaces (5), a microwave supply means (20) which generates a source gas plasma inside the plastic container (1) by introducing microwaves inside the plastic container (1), a high-frequency output supply means (30) which is connected to the vacuum chamber (6) to generate a self-bias voltage at the inner wall surfaces (3) in order to control the ionic incident energy of the source gas plasma for the inner wall surfaces (3) or the partition plate wall surfaces (5), and a source gas supply means (40) which introduces a source gas into each compartment (7) inside the plastic container (1).
摘要翻译：一种塑料容器，其具有用于每个隔室，以及它们的一种装置和一种用于制造该容器的方法的水分和气体阻挡特性的隔板。一种塑料容器，其具有用于每个隔室，以及它们的一种装置和一种用于制造该容器的方法的水分和气体阻挡特性的隔板。所以（6）中使用的塑料容器的制造装置（100）为内部壁面上的膜形成DLC（3）和隔板壁表面（5）包括真空室为特征的塑料容器（1）的作为外部电极，对于地电位的内部电极（8）插入到塑料容器内每个隔室（7）（1），连接到所述真空室（6）的高频输出电源装置（30），和一个原料气体供应装置（40）将材料气体到各隔室（7）的塑料容器（1）内。

6. 发明公开

EP1652961A1 METHOD OF MANUFACTURING GAS BARRIER FILM COATED PLASTIC CONTAINER 审中-公开
标题翻译： VERFAHREN ZUR HERSTELLUNG EINES MIT EINEM GASBARRIEREFILM BESCHICHTETENKUNSTSTOFFBEHÄLTERS
公开(公告)号：EP1652961A1
公开(公告)日：2006-05-03
申请号：EP04747572.8
申请日：2004-07-15
申请人： MITSUBISHI SHOJI PLASTICS CORPORATION , Youtec Co. Ltd. , Kirin Brewery Company, Ltd.
发明人： TAKEMOTO, Keishu , KAGE, Tsuyoshi , KOBAYASHI, Takumi , SHIRAKURA, Akira
IPC分类号： C23C16/02 , C23C16/509 , B65D23/02
CPC分类号： C23C16/045
摘要： A method of manufacturing a gas barrier film coated plastic container with high gas-barrier properties by solving a problem in a conventional method wherein the formation of a gas barrier film is obstructed by water molecules adsorbed in the plastic container and the container with reduced gas-barrier properties is manufactured. The method is characterized by comprising the steps of decreasing a pressure inside the plastic container or decreasing a pressure to the entire part of the plastic container, flowing dry gas as leak gas when vacuum is released to fill the inside of the container with the dry gas for drying the plastic container, replacing the gas inside the plastic container with a material gas or a material gas-containing gas, and plasmatizing the material gas to form the gas barrier film on the inner surface of the plastic container by a CVD method.
摘要翻译：通过解决常规方法中的阻气膜的形成被吸附在塑料容器中的水分子和具有降低气体阻挡层的容器阻碍的常规方法的问题，制造具有高阻气性的阻气膜涂覆塑料容器的方法，制造阻隔性能。该方法的特征在于包括以下步骤：减小塑料容器内部的压力或降低塑料容器的整个部分的压力，当释放真空时将干燥气体作为泄漏气体流动，以用干燥气体填充容器的内部用于干燥塑料容器，用原料气体或含原料气体的气体代替塑料容器内部的气体，并通过CVD方法在材料气体的等离子体化处理以在塑料容器的内表面上形成阻气膜。

7. 发明公开

EP1493839A1 PLASMA CVD FILM FORMING APPARATUS AND METHOD FOR MANUFACTURING CVD FILM COATING PLASTIC CONTAINER 审中-公开
标题翻译：等离子体CVD膜生产装置和一种用于生产塑料容器CVD薄膜包衣
公开(公告)号：EP1493839A1
公开(公告)日：2005-01-05
申请号：EP03745987.2
申请日：2003-04-09
申请人： MITSUBISHI SHOJI PLASTICS CORPORATION , Youtec Co. Ltd.
发明人： HAMA, Kenichi, C/O MITSUBISHI SHOJI PLASTICS CORP. , KAGE, Tsuyoshi, C/O MITSUBISHI SHOJI PLASTICS CORP , TAKEMOTO, Keishu, C/O MITSUBISHI SHOJI PLAST. CORP , KOBAYASHI, Takumi, C/O YOUTEC CO., LTD
IPC分类号： C23C16/505 , C08J7/00 , B65D23/02 , B65D23/08
CPC分类号： C23C16/26 , C23C16/045 , C23C16/50 , C23C16/505
摘要： The restriction that the outer electrode of a conventional CVD film forming apparatus has to have a hollow structure including a hollow which is for accommodating a container and has a shape generally similar to the outer shape of the container is eliminated. A plasma CVD film forming apparatus is characterized in that a container outside gas is supplied into the space defined between the inner wall of an outer electrode and the outer surface of a container spaced from the inner wall, the plasma thereby produced from the container outside gas in forming a film by CVD serves as a conductor and transmits high-frequency to the outer wall of the container, a state is brought about in which the inner wall of the outer electrode is equivalently in contact with the outer surface of the plastic container, and a uniform self-bias voltage is applied to the inner wall of the container.

8. 发明公开

EP1400456A1 MANUFACTURING DEVICE FOR DLC FILM COATED PLASTIC CONTAINER; DLC FILM COATED PLASTIC CONTAINER, AND METHOD OF MANUFACTURING THE DLC FILM COATED PLASTIC CONTAINER 审中-公开
标题翻译：设备技术与DLC膜镀覆塑料容器和方法的研究DLC膜镀覆塑料容器制作DLC膜镀覆塑料容器PRODUCING
公开(公告)号：EP1400456A1
公开(公告)日：2004-03-24
申请号：EP01941260.0
申请日：2001-06-26
申请人： MITSUBISHI SHOJI PLASTICS CORPORATION , Youtec Co. Ltd.
发明人： HAMA, Kenichi , KAGE, Tsuyoshi , KOBAYASHI, Takumi
IPC分类号： B65D1/00 , B65D1/24 , B65D25/04 , B65D25/34 , C08J7/06 , C23C16/27 , C23C16/511
CPC分类号： C23C16/26 , C23C16/045 , C23C16/517 , Y10T428/13 , Y10T428/30
摘要： The present invention provides a manufacturing apparatus, a method of manufacturing a DLC film coated container and a DLC film coated container which make it possible to form a high-quality DLC film with good productivity on the outer wall surface or the inner wall surface of a container by a film forming mechanism obtained by effectively combining a high-frequency capacitive coupling type discharge system and a microwave discharge system which is different from the film forming mechanism of each method.
The manufacturing apparatus (100) of the present invention is an apparatus which forms a DLC film on the outer wall surface of a plastic container (1), and is equipped with a grounded vacuum chamber (2) for housing the plastic container (1), a high-frequency bias electrode (4) which is provided inside the vacuum chamber (2) via an insulating body (3) at a position in contact with the inner wall surface of the plastic container (1) or near the inner wall surface, a microwave supply means (10) which generates a source gas plasma inside the vacuum chamber (2) by introducing microwaves inside the vacuum chamber (2), a high-frequency output supply means (13) connected to the high-frequency bias electrode (4) to generate a self-bias voltage at the outer wall surface of the plastic container (1), and a source gas supply means (18) which introduces a source gas inside the vacuum chamber (2).
摘要翻译：本发明提供的制造装置，制造DLC薄膜包衣容器和DLC薄膜包衣容器的方法，其使得能够形成高品质的DLC电影与外壁表面上良好的生产率或的内壁面由通过有效地综合高频电容耦合型放电系统和一个微波放电系统中的所有这是从每个方法的成膜机理不同而获得的成膜机理容器。本发明的制造装置（100）是形成DLC薄膜上的塑料容器（1）的外壁表面上，并配有一接地的真空室（2），用于容纳所述塑料的装置容器（1），其通过在绝缘本体中提供的真空腔室（2）内部的高频偏压电极（4）全部（3）在接触与塑料容器的内壁表面的位置（1）或近的内壁面，微波供给装置（10），其通过在真空室内部导入微波生成真空腔室（2）内的源气体的等离子体（2），连接到高的高频输出供给装置（13） - 频率偏置电极（4），以产生在所述塑料容器（1）的外壁表面的自偏置电压，以及一个源气体供应装置（18），其引入所述真空腔室内部的气体源（2）。

9. 发明公开

EP1357042A1 PRODUCTION DEVICE FOR DLC FILM-COATED PLASTIC CONTAINER AND PRODUCTION METHOD THEREFOR 审中-公开
标题翻译： HERSTELLUNGSVORRICHTUNGFÜRMIT DLC-FILM BESCHICHTETENKUNSTSTOFFBEHÄLTERUND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP1357042A1
公开(公告)日：2003-10-29
申请号：EP00987732.5
申请日：2000-12-25
申请人： MITSUBISHI SHOJI PLASTICS CORPORATION , Youtec Co. Ltd.
发明人： HAMA, Kenichi, c/o Mitsubishi Shoji Plastics Corp. , KAGE, Tsuyoshi, c/o Mitsubishi Shoji Plastics Corp , KOBAYASHI,Takumi, c/o Youtec Co., Ltd. , ARAKI, Tomoyuki, c/o Youtec Co., Ltd.
IPC分类号： B65D1/00 , C08J7/06 , C23C16/27
CPC分类号： H01J37/32082 , C23C16/045 , C23C16/26 , H01J37/32532 , Y10S427/106
摘要： A production device for a DLC film-coated plastic container and a production method therefor, capable of forming DLC (diamond-like carbon) films simultaneously on the inner surfaces of a plurality of plastic containers, and reducing variations in film thickness. A production device for DLC film-coated plastic containers, for forming a plurality of DLC films simultaneously, characterized by comprising a columnar external electrode (3) having housing spaces in which a plurality of plastic containers (7a-7d) can be disposed in parallel and independently, internal electrodes (9a-9d) respectively disposed in the housed containers (7a-7d), a matching box (14) connected to the external electrode (3) and impedance-matching a high-frequency load, and a high-frequency power supply (15) connected to the matching box.
摘要翻译：一种用于DLC薄膜包衣的塑料容器的制造装置及其制造方法，能够在多个塑料容器的内表面上同时形成DLC（类金刚石碳）膜，并减少膜厚度的变化。一种用于DLC膜涂塑料容器的制造装置，用于同时形成多个DLC膜，其特征在于包括具有容纳空间的柱状外部电极（3），多个塑料容器（7a-7d）可以平行设置在该容纳空间中分别设置在容纳容器（7a-7d）中的内部电极（9a-9d），与外部电极（3）连接并匹配高频负载的匹配盒（14）频率电源（15）连接到匹配盒。

10. 发明公开

EP2565910A4 SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING THIN FILM 审中-公开
标题翻译：基板处理装置及其制造薄膜
公开(公告)号：EP2565910A4
公开(公告)日：2014-01-15
申请号：EP10850746
申请日：2010-04-28
申请人： YOUTEC CO LTD
发明人： SUZUKI MITSUHIRO , KIJIMA TAKESHI , HONDA YUUJI
IPC分类号： H01L21/31 , B05C11/08 , B05C15/00 , B05D1/40 , B05D3/00 , H01L21/02 , H01L21/67
CPC分类号： H01L21/67017 , B05C11/023 , B05C11/08 , B05D1/005 , B05D3/0486 , H01L21/02197 , H01L21/02282 , H01L21/6715 , H01L21/67196 , H01L21/67207
摘要： To provide a substrate treatment apparatus capable of suppressing adherence of dust to a film coated on a substrate. As an aspect of the present invention is a substrate treatment apparatus provided with a spin-coating treatment chamber 4a for coating a film on the substrate by spin-coating, a first air-conditioning mechanism that regulates an amount of dust in the air in the spin-coating treatment chamber, an annealing treatment chamber 7a for performing lamp annealing treatment on the film coated on the substrate, a conveying chamber 2a that is connected to each of the spin-coating treatment chamber and the annealing treatment chamber and is for conveying the substrate between the spin-coating treatment chamber and the annealing treatment chamber each other, and a second air-conditioning mechanism that regulate an amount of dust in the air in the conveying chamber.

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