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    • 7. 发明公开
    • Imprint method and mold
    • Druckverfahren
    • EP2101216A2
    • 2009-09-16
    • EP09250665.8
    • 2009-03-10
    • Ricoh Company, Ltd.
    • Deguchi, Hiroshi
    • G03F7/00
    • G03F7/0002B82Y10/00B82Y40/00
    • An imprint method of, in a state in which an indented surface of a mold comes in contact with a to-be-transferred surface of a to-be-transferred object, irradiating the to-be-transferred surface with electromagnetic waves to soften the to-be-transferred surface, and transferring an indented shape of the indented surface to the to-be-transferred surface, includes a heating layer forming step of forming, on the indented surface, a heating layer which absorbs the electromagnetic waves and generates heat; and a softening step of irradiating the heating layer with the electromagnetic waves, through the mold or the to-be-transferred object, at least one of the mold and the to-be-transferred object being made of a material which transmits the electromagnetic waves, causing the heating layer to generate heat, and softening the to-be-transferred surface.
    • 在模具的凹入面与被转印体的被转印面接触的状态下,利用电磁波照射被转印面,软化 被转印表面,并且将凹入表面的凹入形状转印到待转印表面,包括加热层形成步骤,在凹陷表面上形成吸收电磁波并产生热量的加热层 ; 以及软化步骤,通过所述模具或所述待传送物体,用所述电磁波照射所述加热层,所述模具和所述待传送物体中的至少一个由传递所述电磁波的材料制成 ,使加热层产生热量,并软化被转移的表面。