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1. 发明授权

EP0717835B1 RESONANT GAUGE WITH MICROBEAM DRIVEN IN CONSTANT ELECTRIC FIELD 失效
标题翻译：均与微机械BAR恒定电场供电振动转换器
公开(公告)号：EP0717835B1
公开(公告)日：2000-04-26
申请号：EP93921396.3
申请日：1993-09-07
申请人： HONEYWELL INC.
发明人： ZOOK, James, D. , BURNS, David, W.
IPC分类号： G01L9/00 , G01L1/18
CPC分类号： G01P15/097 , G01B7/16 , G01L1/183 , G01L9/0019 , Y10S73/01
摘要： A resonant strain gauge includes a silicon substrate, a polysilicon flexure beam attached at both ends to the substrate, and a polysilicon rigid cover cooperating with the substrate to enclose the flexure beam within a sealed vacuum chamber. An upper bias electrode is formed on the cover, and a lower bias electrode is formed on the substrate directly beneath and spaced apart from the flexure beam. A drive electrode is formed in or on the beam, centrered between the upper and lower bias electrodes transversely with respect to the direction of beam elongation. The upper and lower electrodes are biased at constant voltage levels, of equal magnitude and opposite polarity. The drive electrode, ordinarily biased at ground, is selectively charged by applying an oscillating drive voltage, to cause mechanical oscillation of the beam. A piezoresistor element, formed on the beam, senses beam oscillation and provides a position indicating input to the oscillator circuit that drives the beam. The beam tends to oscillate at its natural resonant frequency. The piezoresistor thus provides the natural resonant frequency to the oscillating circuit, adjusting the frequency of the beam drive signal toward coincidence with the natural resonant frequency. A shield electrode can be formed on the flexure beam between the piezoresistor and the drive electrode, to insure against parasitic capacitance. In alternative embodiments, the drive signal is applied to one of the bias electrodes to oscillate the beam, and beam oscillation is sensed capacitively.

2. 发明授权

EP0775323B1 TACTILE-ACOUSTIC INFORMATION DETECTING AND MEASURING APPARATUS AND METHOD 失效
标题翻译：方法和设备的声学探测和测量扪及信息的
公开(公告)号：EP0775323B1
公开(公告)日：1999-06-16
申请号：EP95925977.1
申请日：1995-08-04
申请人： APOLLON'S ALGEBRA (GIBRALTAR) LIMITED , Gerome, Jean-Paul
发明人： GEROME, Jean-Paul
IPC分类号： G01V1/00 , G01V9/00
CPC分类号： G01V9/00 , G01V1/001 , Y10S47/09 , Y10S73/01
摘要： A tactile-acoustic transducer (1) comprises a vibrator plate (2), microphone means (3) and first (4) and second (5) electrode members which are connected to a source of information (8) through a tuneable network (6). The microphone means (3) are coupled to a computer (10) having display devices (11, 12) and a control output delivering control signals to the tuneable network (6). Rubbing the vibrator plate (2) with the fingertip of his middle finger allows an operator to assess two different states of the transducer, perceived as "stick" and "non-stick" rubbing conditions, the "stick" condition being accompanied by emission of a characteristic sound an occurring when the network (6) is tuned exactly in accordance with the phenomenon or condition of the source to be detected or measured.

3. 发明授权

EP0605300B1 Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant 失效
标题翻译：一种用于生产使用“绝缘体上硅”技术加速度计过程
公开(公告)号：EP0605300B1
公开(公告)日：1998-06-03
申请号：EP93403154.3
申请日：1993-12-23
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人： Diem, Bernard , Delaye, Marie-Thérèse
IPC分类号： G01P15/08
CPC分类号： B81C1/0015 , B81B3/0051 , B81B2201/0235 , B81B2203/0109 , B81B2203/053 , B81C2201/0166 , B81C2201/0177 , G01P15/0802 , G01P2015/0814 , G01P2015/0828 , Y10S73/01 , Y10S73/04

4. 发明授权

EP0570521B1 MICROMACHINED RATE AND ACCELERATION SENSOR 失效
标题翻译：微结构化速度和加速度传感器
公开(公告)号：EP0570521B1
公开(公告)日：1997-12-17
申请号：EP92906950.8
申请日：1992-02-04
申请人： AlliedSignal Inc.
发明人： HULSING, Rand, H, II
IPC分类号： G01P15/08 , G01P15/10 , G01C19/56 , G01P15/00
CPC分类号： G01P15/18 , F02G1/044 , F02G1/0445 , F02G2250/18 , F02G2253/03 , F16F2230/0052 , F16F2230/34 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/0802 , G01P15/097 , G01P2015/0828 , Y10S73/01
摘要： A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion.

5. 发明公开

EP0683921A4 MICROSTRUCTURES AND SINGLE MASK, SINGLE-CRYSTAL PROCESS FOR FABRICATION THEREOF. 失效
标题翻译：微构造和方法单晶的生产使用单个掩模。
公开(公告)号：EP0683921A4
公开(公告)日：1997-01-02
申请号：EP94903348
申请日：1993-12-03
申请人： CORNELL RES FOUNDATION INC
发明人： SHAW KEVIN A , ZHANG Z LISA , MACDONALD NOEL C
IPC分类号： C23F4/00 , B81B3/00 , G01P15/08 , G01P15/125 , H01L21/302 , H01L21/3065 , H01L29/82 , H01L29/84 , H01L21/44 , H01L21/449 , H01L23/48 , H01L29/06 , H01L29/86 , H01L29/96
CPC分类号： B81C1/00619 , B81C1/00142 , B81C1/0015 , B81C1/00626 , B81C2201/0112 , B81C2201/0132 , B81C2201/053 , G01P15/0802 , G01P15/125 , G01P2015/0814 , G01P2015/0817 , G01P2015/0828 , Y10S73/01 , Y10S148/05
摘要： The invention provides a single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independent of crystal orientation. A dielectric mask (12) on a single-crystal substrate (154) is patterned to define isolating trenches. A protective conformal layer (28) is applied to the resultant structure. The conformal layer (28) on the floor of the trenches is removed and a second etch deepens the trench to expose the mesa walls which are removed during the release step by isotropic etching. A metal layer (44) is formed on the resultant structure providing opposed plates (156) and (158) of a capacitor. The cantilever beam (52) with the supporting end wall (152) extends the grid-like structure (150) into the protection of the deepened isolation trenches (54). A membrane can be added to the released structures to increase their weight for use in accelerometers, and polished for use as movable mirrors.

6. 发明公开

EP0749570A1 METHOD AND DEVICE FOR MEASURING THE CHARACTERISTICS OF AN OSCILLATING SYSTEM 失效
标题翻译：方法和设备测量振荡系统的特性
公开(公告)号：EP0749570A1
公开(公告)日：1996-12-27
申请号：EP95910543.0
申请日：1995-03-02
申请人： Goodbread, Joseph , Sayir, Mahir, Prof.Dr. , Häusler, Klaus , Dual, Jürg
发明人： Goodbread, Joseph , Sayir, Mahir, Prof.Dr. , Häusler, Klaus , Dual, Jürg
IPC分类号： G01F1 , G01D5 , G01H13 , G01L9 , G01N9 , G01N11 , G01N29 , G01P15 , G10K11
CPC分类号： B82Y15/00 , G01N11/162 , Y10S73/01
摘要： A resonator (1) is vibrating close to its resonance frequency. The vibration is excited by one or a first transducer (2) connected to an oscillator (11). The vibration is measured by the transducer (2) or a second transducer (3) and stabilised by a phase-locked feedback loop comprising a phase sensitive detector (33), a feedback controller (36), a phase shifter (17) and means (15) to evaluate the measured frequencies. In order to measure the damping of the resonator (1), the phase in the phase shifter (17) is alternately set to two different values. The difference between the frequencies corresponding to these two phase values is a measure for the damping of the system. One or more switches (19, 28, 27) and a gate generator (16) make sure that excitation and measurement do not occur at the same time. Thereby, any cross-talk between driving and sensing transducers is completely eliminated. Also, a single transducer can be used to both excite and measure the vibration. Thereby, a very compact transducer set-up can be implemented and the precision and range of the measurement is improved.

7. 发明公开

EP0653052A1 SELF-EXCITING OPTICAL STRAIN GAGE 失效
标题翻译：光学应变自激变换器。
公开(公告)号：EP0653052A1
公开(公告)日：1995-05-17
申请号：EP93918555.0
申请日：1993-07-26
申请人： UNITED TECHNOLOGIES CORPORATION
发明人： HOCKADAY, Bruce
IPC分类号： G01L1 , G01B11 , G01L9
CPC分类号： G01L9/002 , G01L1/186 , Y10S73/01
摘要： A self-exciting optical strain sensor (20) includes dual parallel bridges (22, 24) having parallel facing surfaces (32, 34). Light energy (38) entering a Fabry-Perot cavity (36) formed by this surfaces (32, 34) induces a periodic buildup and release of energy in the cavity (36) which is directly related to the natural resonant frequency of the bridges (22, 24). Analysis of the intensity of light emitted (50) from the cavity (36) determines the bridge natural frequency.

8. 发明公开

EP0570521A4 MICROMACHINED RATE AND ACCELERATION SENSOR. 失效
标题翻译：传感器，用于测量加速和微处理速度。
公开(公告)号：EP0570521A4
公开(公告)日：1995-01-11
申请号：EP92906950
申请日：1992-02-04
申请人： SUNDSTRAND CORP
发明人： HULSING RAND H II
IPC分类号： F02G1/044 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/08 , G01P15/097 , G01P15/10 , G01P15/18 , G01P9/04
CPC分类号： G01P15/18 , F02G1/044 , F02G1/0445 , F02G2250/18 , F02G2253/03 , F16F2230/0052 , F16F2230/34 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/0802 , G01P15/097 , G01P2015/0828 , Y10S73/01
摘要： A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion.

9. 发明授权

EP0361473B1 Vibration type force detector 失效
标题翻译：振动式力传感器
公开(公告)号：EP0361473B1
公开(公告)日：1993-06-02
申请号：EP89117951.7
申请日：1989-09-28
申请人： SHIMADZU CORPORATION
发明人： Komoto, Akira
IPC分类号： G01L1/10
CPC分类号： G01L1/10 , Y10S73/01

10. 发明公开

EP0490419A1 Accelerometer 失效
标题翻译： Beschleunigungsmesser。
公开(公告)号：EP0490419A1
公开(公告)日：1992-06-17
申请号：EP91203028.5
申请日：1991-11-20
申请人： DELCO ELECTRONICS CORPORATION
发明人： Staller, Steven Edward , De Roo, David William
IPC分类号： G01P15/08
CPC分类号： G01P15/0802 , G01P2015/084 , Y10S73/01
摘要： An accelerometer is provided which has a silicon substrate (14) bonded to a silicon capping plate (30) and a silicon back plate (32), wherein the bonds (26,28) between the three silicon wafers are characterized by a relatively low residual stress level over a wide temperature range. The bonds (26,28) are formed by means of an appropriate adhesive at a relatively low temperature without degradation to the accelerometer. The bonds (26,28) between the silicon wafers also provide stress relief during use and packaging of the accelerometer. The damping distance for the proof mass of the microaccelerometer can be accurately controlled and stop means (42,44) are provided for preventing excessive deflection of the proof mass (12) in a direction perpendicular to the plane of the accelerometer.
摘要翻译：提供了一种加速度计，其具有结合到硅封盖板（30）和硅背板（32）的硅衬底（14），其中三个硅晶片之间的结合（26,28）的特征在于相对较低的残余应力水平在较宽的温度范围内。键（26,28）通过适当的粘合剂在相对较低的温度下形成，而不会降解加速度计。硅片之间的结合（26,28）在加速度计的使用和封装过程中也提供了应力消除。可以精确地控制微加速度计的检测质量的阻尼距离，并设置停止装置（42,44），以防止在与加速度计的平面垂直的方向上过度偏转检验质量块（12）。

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