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51. 发明专利

JP2010164532A Surface property measuring device, its contactor model forming method, and program 有权
标题翻译：表面物理测量装置，其接触器模型形成方法和程序
公开(公告)号：JP2010164532A
公开(公告)日：2010-07-29
申请号：JP2009009152
申请日：2009-01-19
申请人： Mitsutoyo Corp , 株式会社ミツトヨ
发明人： KOJIMA TSUKASA , KANO TAKAFUMI , KADOWAKI SOICHI
IPC分类号： G01B5/20
CPC分类号： G01B5/20 , G01B5/28 , G01B21/20 , G01B21/30
摘要： PROBLEM TO BE SOLVED: To provide a surface property measuring device forming a three-dimensional contactor model with high accuracy, and to provide its contactor model generation method, and a program.
SOLUTION: The surface property measuring device includes: the contactor 24 whose tip can be brought into contact with a measuring object; and a control part 41 for moving the contactor 24 along the X-axis, the Y-axis and the Z-axis. The control part 41 drives the contactor 24 to trace the surface of the measuring object, and acquires a tip position of the contactor 24 as a pseudo measuring point Pi. The control part 41 calculates the three-dimensional contactor model M2 by performing copy measurement of a reference work 4 by the contactor 24. The control part 41 drives rotationally the contactor 24 around the Z-axis. The control part 41 moves the contactor 24 along the X-axis direction and the Z-axis direction at each of a plurality of rotating positions of the contactor 24 driven rotationally, performs copy measurement of the reference work 4 to acquire the pseudo measuring point Pi, and calculates the three-dimensional contactor model M2 based on the acquired pseudo measuring point Pi.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种以高精度形成三维接触器模型的表面性质测量装置，并提供其接触器模型生成方法和程序。表面性质测量装置包括：其顶端可与测量对象接触的接触器24; 以及用于使接触器24沿X轴，Y轴和Z轴移动的控制部41。控制部分41驱动接触器24跟踪测量对象的表面，并且获取接触器24的尖端位置作为伪测量点Pi。控制部41通过由接触器24进行基准作业4的复印测定来计算三维接触器型M2。控制部41围绕Z轴旋转地驱动接触器24。控制部41在旋转驱动的接触器24的多个旋转位置的每一个的X轴方向和Z轴方向上移动接触器24，进行基准作业4的复制测定，以取得伪测量点Pi ，并且基于获取的伪测量点Pi计算三维接触器模型M2。版权所有（C）2010，JPO＆INPIT

52. 发明专利

JP2010032323A Elevation inclination adjuster 有权
标题翻译：高程缩放调节器
公开(公告)号：JP2010032323A
公开(公告)日：2010-02-12
申请号：JP2008193885
申请日：2008-07-28
申请人： Mitsutoyo Corp , 株式会社ミツトヨ
发明人： HAMA NOBUYUKI
IPC分类号： G01B5/00
CPC分类号： G01B5/20 , G01B5/0004 , G01B5/28
摘要： PROBLEM TO BE SOLVED: To provide an elevation inclination adjuster capable of materializing a function for adjusting the relative position between a detector and a measuring object in a surface property measuring apparatus, and a function for adjusting the angle of inclination of the detector or the measuring object with a compact structure.
SOLUTION: The elevation inclination adjuster includes: a base 51; a table 52 having points of action 522 at two positions along a direction parallel to a placement surface 521, and being provided such that a distance between the table 52 and the base 51 is changeable; a pair of moving means 53 for supporting each action point 522 and moving each action point 522 respectively in a direction in which a distance between each action point 522 and the base 51 increases or decreases; and a driving source for driving the moving means 53. When the moving means 53 move the individual action points 522 by the same movement amount in the same direction, the placement surface 521 moves parallel. When the moving means 53 move one of the individual action points 522, the placement surface 521 swings around a fulcrum 523 provided between the individual action points 522.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够实现用于调节表面特性测量装置中的检测器和测量对象之间的相对位置的功能的仰角倾斜调节器，以及用于调节检测器的倾斜角度的功能或具有紧凑结构的测量对象。解决方案：仰角倾斜调节器包括：基座51; 在平行于放置面521的方向的两个位置具有作用点522的工作台52，并且被设置为使得工作台52与基座51之间的距离是可变的; 一对移动装置53，用于支撑每个动作点522并且分别在每个动作点522和基部51之间的距离增加或减小的方向上移动各动作点522; 以及用于驱动移动装置53的驱动源。当移动装置53在相同方向上使各个动作点522移动相同的移动量时，放置表面521平行移动。当移动装置53移动单个动作点522中的一个时，放置表面521围绕设置在各个动作点522之间的支点523摆动。版权所有：（C）2010，JPO＆INPIT

53. 发明专利

JP2010032322A Surface property measuring machine and measuring method 有权
标题翻译：表面性能测量机和测量方法
公开(公告)号：JP2010032322A
公开(公告)日：2010-02-12
申请号：JP2008193884
申请日：2008-07-28
申请人： Mitsutoyo Corp , 株式会社ミツトヨ
发明人： KANEMATSU TOSHIHIRO , MISHIMA HIDEKI , HAMA NOBUYUKI
IPC分类号： G01B5/00
CPC分类号： G01B5/0004 , G01B5/20 , G01B5/28
摘要： PROBLEM TO BE SOLVED: To provide a surface property measuring machine capable of positioning a measuring object with a compact constitution, and improving positioning operability.
SOLUTION: The machine includes a measuring device 4 that includes a detector 42 for detecting surface property of the measuring object W and an X-axis movement mechanism 41 for moving the detector 42 in a measurement direction, an elevation inclination adjuster 5 capable of adjusting an elevation position and an inclination angle of a table 52 on which the measuring device 4 is mounted, a stage 3 on which the measuring object W is mounted, and a controller 6 that controls the measuring device 4 and the elevation inclination adjuster 5. The controller 6 includes a measurement controller 62 that controls the X-axis movement mechanism 41 to conduct a preliminary measurement and main measurement of the measuring object W, a computing unit 65 that acquires a result of the preliminary measurement from the detector 42 and calculates an inclination angle of the measuring object W to the measurement direction, and a positioning controller 64 for adjusting the inclination angle of the table 52 based on the calculated inclination angle.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够以紧凑的结构定位测量对象并提高定位可操作性的表面性质测量机。解决方案：该机器包括测量装置4，其包括用于检测测量对象W的表面特性的检测器42和用于在测量方向上移动检测器42的X轴移动机构41，能够调节安装有测量装置4的工作台52的高度位置和倾斜角度，安装有测量对象W的平台3和控制测量装置4和仰角倾斜调节器5的控制器6 控制器6包括测量控制器62，其控制X轴移动机构41进行测量对象W的初步测量和主测量;计算单元65，其从检测器42获取初步测量的结果，并计算测量对象W与测量方向的倾斜角度，以及用于调整工作台5的倾斜角度的定位控制器64 2基于计算的倾斜角度。版权所有（C）2010，JPO＆INPIT

55. 发明专利

JP2007536535A Measuring device with an optical probe tip 有权
公开(公告)号：JP2007536535A
公开(公告)日：2007-12-13
申请号：JP2007511919
申请日：2005-04-20
申请人：カールマールホールディングゲーエムベーハー
发明人：ペーターレーマン
IPC分类号： G01B11/30 , G01B5/28 , G01B11/02 , G01B11/24 , G02B21/00
CPC分类号： G01B11/306 , G01B5/28 , G01B11/026 , G01B2210/50
摘要：加工物の形状、輪郭および／または粗さを測定するための測定装置（１）は、大きな開口数を有する非接触光プローブに基づいている。プローブは、少なくとも２つの光受容体が関連付けられる少なくとも２つの異なる焦点を有する。２つの光受容体は、加工物表面がプローブの測定範囲内に維持されるように、光プローブを追跡するための位置決め装置（１３）を制御するための差分信号を生成する。差分信号は、センサ器具（３）の位置の高速かつ正確な追跡をもたらすことが分かっている。

56. 发明专利

JP2007303838A Correction method, and measurement device 有权
标题翻译：校正方法和测量装置
公开(公告)号：JP2007303838A
公开(公告)日：2007-11-22
申请号：JP2006129439
申请日：2006-05-08
申请人： Mitsutoyo Corp , 株式会社ミツトヨ
发明人： GOTO TOMONORI , KADOWAKI SOICHI
IPC分类号： G01B5/20
CPC分类号： G01B21/045 , G01B5/28
摘要： PROBLEM TO BE SOLVED: To more precisely correct the data measured by a stylus. SOLUTION: A measurement device 10 provided with a stylus 12 following to the work 18 comprises, the correction mechanism 26 for correcting the shift to the moving axis direction corresponding to the height detection axis value of the measurement piece 16 in the correction objective surface regulated by the height detection axis and moving axis. The correction mechanism 26 comprises: a calibration measurement means 14 for obtaining calibration measurement data including deviation information of the moving axis direction value corresponding to the height detection axis direction value of the stylus 12; a correction parameter setting means 28 for moving the stylus 12 and for obtaining the optimum vertical error correction parameter value for correcting error based on the deviation information of the stylus 12 for correcting the vertically lowering error; and a measurement data correction means 30 for correcting measurement data with the correction parameter. Thus, the correction method and the measurement device 10 are constituted. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：更精确地校正由触笔测量的数据。＆lt; P＆gt;解决方案：在工件18之后设置有触笔12的测量装置10包括校正机构26，用于校正与修正目标中的测量片16的高度检测轴值相对应的与移动轴方向的偏移表面由高度检测轴和移动轴调节。校正机构26包括：校准测量装置14，用于获得包括与触笔12的高度检测轴方向值对应的移动轴方向值的偏差信息的校准测量数据; 校正参数设定装置28，用于移动触控笔12并根据用于校正垂直降低误差的触控笔12的偏差信息获得用于校正误差的最佳垂直误差校正参数值; 以及用于利用校正参数校正测量数据的测量数据校正装置30。因此，构成了校正方法和测量装置10。版权所有（C）2008，JPO＆INPIT

57. 发明专利

JP4009152B2 Surface shape measuring device and the surface shape measuring method 有权
公开(公告)号：JP4009152B2
公开(公告)日：2007-11-14
申请号：JP2002200150
申请日：2002-07-09
申请人：株式会社ミツトヨ
发明人：和彦日高 , 薫松木
IPC分类号： G01B21/20 , G01B5/28 , G01B7/012 , G01B7/28 , G01B21/30
CPC分类号： G01B5/28 , G01B7/28 , G01B21/30

58. 发明专利

JP2006118911A Surface roughness/contour measuring instrument 有权
标题翻译：表面粗糙度/表面测量仪器
公开(公告)号：JP2006118911A
公开(公告)日：2006-05-11
申请号：JP2004305253
申请日：2004-10-20
申请人： Tokyo Seimitsu Co Ltd , 株式会社東京精密
发明人： YANAI NOBUYUKI , KUBOTA KAZUHIRO
IPC分类号： G01B21/20 , G01B21/30
CPC分类号： G01B5/28
摘要： PROBLEM TO BE SOLVED: To provide a surface roughness/contour measuring instrument moving relatively a probe and a workpiece within an orthogonal XY-plane, by a relatively inexpensive constitution.
SOLUTION: The probes 6, 7 of the surface roughness/contour measuring instrument 1 are connected to a driving part 4 for driving the probes 6, 7 along a prescribed one direction, by a connection member 8 moving the probes 6, 7 along the prescribed one direction with respect to the driving part 4.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种通过相对便宜的构造在正交XY平面内相对移动探针和工件的表面粗糙度/轮廓测量仪器。
解决方案：表面粗糙度/轮廓测量仪1的探针6,7连接到驱动部分4，用于沿着规定的一个方向驱动探针6,7，通过移动探针6,7的连接构件8 相对于驾驶部分4沿着规定的一个方向。（C）2006年，JPO＆NCIPI

59. 发明专利

JP2006017693A Surface shape measuring stylus and its manufacturing method 审中-公开
标题翻译：表面形状测量方法及其制造方法
公开(公告)号：JP2006017693A
公开(公告)日：2006-01-19
申请号：JP2005014657
申请日：2005-01-21
申请人： Hon Hai Precision Industry Co Ltd , 鴻海精密工業股▲ふん▼有限公司
发明人： NAKAGAWA TAKEO , LIU QING , CHIN TOKUSHIGE
IPC分类号： G01B21/00
CPC分类号： G01B5/28
摘要： PROBLEM TO BE SOLVED: To provide a surface shape measuring stylus in a field area of a surface precise measurement technique.
SOLUTION: This stylus concerned in the present invention includes a pipe having an opening end and a chamber, a pin having the first end and the second end, and a spherical contact head having a groove. The first end of the pin is inserted into the groove of the contact head to be fixed, and the second is inserted from an opening of the pipe into the chamber to be fixed. The pin and the spherical contact head are fixed via an adhesive or solder. The pin and the pipe are fixed via the adhesive, the older or a rivet. The spherical contact head is a true sphere. The stylus concerned in the present invention has advantages of high measuring precision and a long service life. The present invention provides also a manufacturing method for the stylus.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：在表面精确测量技术的领域中提供测量触针的表面形状。解决方案：本发明涉及的触针包括具有开口端和室的管，具有第一端和第二端的销以及具有凹槽的球形接触头。销的第一端插入接触头的槽中以固定，第二端从管的开口插入到腔中以固定。销和球形接触头通过粘合剂或焊料固定。销和管通过粘合剂，较旧的或铆钉固定。球形接触头是真正的球体。本发明涉及的触针具有测量精度高，使用寿命长的优点。本发明还提供了一种用于触针的制造方法。版权所有（C）2006，JPO＆NCIPI

60. 发明专利

JP2004045088A Device and method for measuring surface profile 有权
公开(公告)号：JP2004045088A
公开(公告)日：2004-02-12
申请号：JP2002200150
申请日：2002-07-09
申请人： Mitsutoyo Corp , 株式会社ミツトヨ
发明人： MATSUKI KAORU , HIDAKA KAZUHIKO
IPC分类号： G01B21/20 , G01B5/28 , G01B7/28 , G01B21/30
CPC分类号： G01B5/28 , G01B7/28 , G01B21/30
摘要： PROBLEM TO BE SOLVED: To provide a surface profile measuring device and its method for measuring accurately the surface profile of an object to be measured. SOLUTION: The surface profile measuring device measures the surface profile of the object to be measured, by using a stylus having at its tip a touching part which touches the surface of the object to be measured, and a detecting means for outputting a detection signal which responds and changes depending on the touching state between the surface of the object to be measured and the touching part. The measuring device is provided with a copy moving means which moves the touching part relatively along the surface of the object to be measured, a memory 46 for storing information on the position of the touching part which is when the detection signal reaches a reference signal value set beforehand, a vibrational inclination calculating parts 51 for calculating a response changing parameter (vibrational inclination θ) which applies a response change to the detection signal from the surface of the object to be measured, when the detection signal reaches the reference signal value, and a profile operation part 53 for performing compensation operation of the positional information to the actual profile of the surface of the substance to be measured by using the response changing parameter. COPYRIGHT: (C)2004,JPO

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