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    • 5. 发明专利
    • Nozzle
    • 喷嘴
    • JP2012153932A
    • 2012-08-16
    • JP2011013295
    • 2011-01-25
    • Aisin Seiki Co Ltdアイシン精機株式会社
    • SUMI RYOHEISHIMANO KAORU
    • C23C16/455H01L21/31
    • PROBLEM TO BE SOLVED: To provide a nozzle capable of suppressing the dispersion of a film thickness of an object to be processed even while reducing a time and labor of maintenance work and improving the operating rate of a plasma CVD apparatus.SOLUTION: The nozzle is attached to the plasma CVD apparatus which executes deposition processing to the surface of the object 1 to be processed, and supplies a discharge gas and a deposition gas to a discharge space where the object 1 is arranged. A discharge gas flow path 14 for supplying the discharge gas and a deposition gas flow path 16 for supplying the deposition gas are separately provided. At an end on the downstream side of the discharge gas flow path 14, a discharge gas discharge port 15 for discharging the discharge gas is formed. Furthermore, at an end on the downstream side of the deposition gas flow path 16, a deposition gas discharge port 17 for discharging the deposition gas to a region for holding or surrounding the discharge gas discharged from the discharge gas discharge port 15 is formed.
    • 解决问题:即使在减少维护工作的时间和劳动力并提高等离子体CVD装置的运转速度的同时,也能够提供能够抑制待加工物体的膜厚分散的喷嘴。 解决方案:将喷嘴安装在等离子体CVD装置上,该等离子体CVD装置对待处理对象物1的表面执行沉积处理,并将放电气体和沉积气体提供给放置物体1的放电空间。 分别提供用于供给放电气体的放电气体流路14和用于供给沉积气体的沉积气体流路16。 在放电气体流路14的下游侧的端部形成有用于排出放电气体的放电气体排出口15。 此外,在沉积气体流路16的下游侧的端部,形成有用于将沉积气体排出到用于保持或围绕从排出气体排出口15排出的排出气体的区域的沉积气体排出口17。 版权所有(C)2012,JPO&INPIT
    • 7. 发明专利
    • Film forming method for thermoelectric element
    • 电热元件薄膜成型方法
    • JP2010199131A
    • 2010-09-09
    • JP2009039221
    • 2009-02-23
    • Aisin Seiki Co Ltdアイシン精機株式会社
    • SHIMANO KAORUSUZUKI HODOIO KENJI
    • H01L35/34C22C19/03H01L21/285H01L35/08
    • PROBLEM TO BE SOLVED: To provide a film forming method for a thermoelectric element which is lower in cost, shorter in film formation time, and higher in adhesion between the thermoelectric element and a barrier film than a conventional PVD method. SOLUTION: The film forming method for the thermoelectric element includes an etching process S1 of performing etching treatment on the thermoelectric element 1 with an etching gas, a PVD film forming process S2 of forming a PVD film 2 on the thermoelectric element 1 by a PVD method, and a plating film forming process S3 of forming the barrier film 3 by a plating method on the thermoelectric element 1 formed with the PVD film 2. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:为了提供成本较低,成膜时间更短的热电元件的膜形成方法以及热电元件和阻挡膜之间的粘合性比常规PVD法更高。 解决方案:热电元件的成膜方法包括用蚀刻气体对热电元件​​1进行蚀刻处理的蚀刻工艺S1,在热电元件1上形成PVD膜2的PVD膜形成工艺S2由 PVD法,以及通过电镀法在形成有PVD膜2的热电元件1上形成阻挡膜3的镀膜形成工序S3。(C)2010,JPO&INPIT
    • 10. 发明专利
    • Sputtering target
    • 飞溅目标
    • JP2009197279A
    • 2009-09-03
    • JP2008040848
    • 2008-02-22
    • Aisin Seiki Co Ltdアイシン精機株式会社
    • SHIMANO KAORU
    • C23C14/34
    • PROBLEM TO BE SOLVED: To provide a target material wherein plating is unnecessary for a doping material in order to suppress the grain particle size of a thin film, and the cost is reduced compared with that of a conventional one.
      SOLUTION: A sputtering target 10 is formed by the sintering after mixing chromium 11 (raw material powder) serving as a basic portion of a thin film 1 and chromium nitride 12 (a doping material) capable of preventing coarsening of the grain size of the raw material powder. The chromium nitride 12 of the doping material has the metal element of the same chromium 11 as the raw material and the nitrogen element which is the same component as the atmospheric gas of the sputtering.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供一种目标材料,其中为了抑制薄膜的颗粒尺寸,掺杂材料不需要镀覆,并且与常规的相比,成本降低。 解决方案:在混合用作薄膜1的基本部分的铬11(原料粉末)和能够防止晶粒粗化的氮化铬12(掺杂材料)之后,通过烧结来形成溅射靶10 的原料粉末。 掺杂材料的氮化铬12具有与原料相同的铬11的金属元素和与溅射的气氛气体相同的成分的氮元素。 版权所有(C)2009,JPO&INPIT