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    • 91. 发明授权
    • Semiconductor device having vertical-type channel
    • 具有垂直型通道的半导体器件
    • US08455942B2
    • 2013-06-04
    • US13085283
    • 2011-04-12
    • Jung-Woo Park
    • Jung-Woo Park
    • H01L29/772
    • H01L29/7827H01L27/10873
    • A semiconductor device includes an active region including a surface region and a first recess formed below the surface region, the active region extending along a first direction; a device isolation structure provided on an edge of the active region; a gate line traversing over the surface region of the active region along a second direction orthogonal to the first direction; a second recess formed in the device isolation structure to receive a given portion of the gate line into the second recess; a first junction region formed in the active region beneath the first recess and on a first side of the gate line; and a second junction region formed on a second side of the gate line and above the first junction region. The first and second junction regions define a vertical-type channel that extends along lateral and vertical directions.
    • 半导体器件包括有源区,该有源区包括表面区域和形成在该表面区域下方的第一凹部,该有源区域沿第一方向延伸; 设置在所述有源区域的边缘上的器件隔离结构; 栅极线沿着与第一方向正交的第二方向横越有源区域的表面区域; 形成在所述器件隔离结构中以将栅极线的给定部分接收到第二凹部中的第二凹部; 形成在第一凹部下方的有源区域和栅极线的第一侧上的第一接合区域; 以及第二结区,形成在栅极线的第二侧并且在第一接合区的上方。 第一和第二接合区限定沿着横向和垂直方向延伸的垂直型通道。
    • 93. 发明授权
    • Phase change RAM device and method for manufacturing the same
    • 相变RAM装置及其制造方法
    • US08450772B2
    • 2013-05-28
    • US12362605
    • 2009-01-30
    • Heon Yong ChangSuk Kyoung HongHae Chan Park
    • Heon Yong ChangSuk Kyoung HongHae Chan Park
    • H01L29/02
    • H01L45/144H01L27/2436H01L45/06H01L45/1233H01L45/1675
    • A phase change RAM device includes a semiconductor substrate having a phase change cell area and a voltage application area; a first oxide layer, a nitride layer and a second oxide layer sequentially formed on the semiconductor substrate; a first plug formed in the first oxide layer, the nitride layer and the second oxide layer of the phase change cell area; a second plug formed in the first oxide layer and the nitride layer of the voltage application area; a conductive line formed in the second oxide layer; a third oxide layer formed on the second oxide layer; a lower electrode shaped like a plug, the lower electrode being formed so as to directly make contact with the first plug; and a phase change layer and an upper electrode sequentially formed on the lower electrode in a pattern form.
    • 相变RAM装置包括具有相变单元区域和电压施加区域的半导体基板; 依次形成在所述半导体衬底上的第一氧化物层,氮化物层和第二氧化物层; 形成在第一氧化物层中的第一插塞,相变单元区域的氮化物层和第二氧化物层; 形成在第一氧化物层和电压施加区域的氮化物层中的第二插塞; 形成在所述第二氧化物层中的导电线; 形成在所述第二氧化物层上的第三氧化物层; 形成为塞子的下部电极,所述下部电极形成为直接与所述第一插塞接触; 以及以图案形式依次形成在下电极上的相变层和上电极。
    • 94. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08445989B2
    • 2013-05-21
    • US12956948
    • 2010-11-30
    • Ba Wool KimWon Ho Shin
    • Ba Wool KimWon Ho Shin
    • H01L27/10H01L29/00H01L23/58H01L23/62
    • H01L23/5256H01L2924/0002H01L2924/00
    • A semiconductor device includes a first metal wiring which is formed over substructure; a first contact plug which is coupled to the first metal wiring and passes through a first interlayer insulating film provided over the substructure; a second metal wiring which is provided over the first interlayer insulating film and is coupled to the first contact plug; a second contact plug which is coupled to the second metal wiring and passes through a second interlayer insulating film which is provided over the first interlayer insulating film; and a fuse pattern and a data read fuse pattern which are coupled to the second contact plug and provided over the second interlayer insulating film.
    • 半导体器件包括形成在子结构上的第一金属布线; 第一接触插塞,其耦合到所述第一金属布线并且穿过设置在所述子结构上的第一层间绝缘膜; 第二金属布线,设置在所述第一层间绝缘膜上并耦合到所述第一接触插塞; 第二接触插塞,其耦合到所述第二金属布线并且穿过设置在所述第一层间绝缘膜上的第二层间绝缘膜; 以及熔丝图案和数据读取熔丝图案,其耦合到第二接触插塞并且设置在第二层间绝缘膜上。
    • 97. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
    • 半导体器件及其形成方法
    • US20130119545A1
    • 2013-05-16
    • US13347570
    • 2012-01-10
    • Un Hee LEE
    • Un Hee LEE
    • H01L23/532H01L21/768
    • H01L27/10885H01L27/10888
    • A semiconductor device and a method for forming the same are disclosed, which can protect a polysilicon layer of a bit line contact plug even when a critical dimension (CD) of the bit line is reduced by a fabrication change, thereby preventing defective resistivity caused by a damaged bit line contact plug from being generated. The semiconductor device includes one or more interlayer insulation film patterns formed over a semiconductor substrate, a bit line contact plug formed over the semiconductor substrate between the interlayer insulation films, and located below a top part of the interlayer insulation film pattern, and a bit line formed over the bit line contact plug.
    • 公开了一种半导体器件及其形成方法,即使当通过制造变化减小位线的临界尺寸(CD)时,也可以保护位线接触插塞的多晶硅层,从而防止由 产生损坏的位线接触插头。 半导体器件包括在半导体衬底上形成的一个或多个层间绝缘膜图案,形成在半导体衬底之间的层间绝缘膜之间并且位于层间绝缘膜图案的顶部下方的位线接触插塞和位线 形成在位线接触插头上。