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91. 发明申请

US20100013572A1 APPARATUS FOR MULTIPLE FREQUENCY POWER APPLICATION 有权
标题翻译：多种频率功率应用的设备
公开(公告)号：US20100013572A1
公开(公告)日：2010-01-21
申请号：US12506658
申请日：2009-07-21
申请人： STEVEN C. SHANNON , JANG GYOO YANG , MATTHEW L. MILLER , KARTIK RAMASWAMY , JAMES P. CRUSE
发明人： STEVEN C. SHANNON , JANG GYOO YANG , MATTHEW L. MILLER , KARTIK RAMASWAMY , JAMES P. CRUSE
IPC分类号： H03H7/38
CPC分类号： H03H7/38
摘要： Apparatus and methods are provided for a power matching apparatus for use with a processing chamber. In one aspect of the invention, a power matching apparatus is provided including a first RF power input coupled to a first adjustable capacitor, a second RF power input coupled to a second adjustable capacitor, a power junction coupled to the first adjustable capacitor and the second adjustable capacitor, a receiver circuit coupled to the power junction, a high voltage filter coupled to the power junction and the high voltage filter has a high voltage output, a voltage/current detector coupled to the power junction and a RF power output connected to the voltage/current detector.
摘要翻译：提供了用于与处理室一起使用的功率匹配装置的装置和方法。在本发明的一个方面，提供了一种功率匹配装置，其包括耦合到第一可调电容器的第一RF功率输入端，耦合到第二可调电容器的第二RF功率输入端，耦合到第一可调电容器的功率端，耦合到功率结的接收器电路，耦合到功率结的高电压滤波器和高压滤波器具有高电压输出，耦合到功率结的电压/电流检测器和连接到功率结的RF功率输出电压/电流检测器。

92. 发明申请

US20090298287A1 METHOD OF PLASMA LOAD IMPEDANCE TUNING FOR ENGINEERED TRANSIENTS BY SYNCHRONIZED MODULATION OF AN UNMATCHED LOW POWER RF GENERATOR 有权
标题翻译：通过同步低功率射频发生器的同步调制的等离子体负载阻抗调制方法
公开(公告)号：US20090298287A1
公开(公告)日：2009-12-03
申请号：US12129024
申请日：2008-05-29
申请人： Steven C. Shannon , Kartik Ramaswamy , Daniel J. Hoffman , Matthew L. Miller , Kenneth S. Collins
发明人： Steven C. Shannon , Kartik Ramaswamy , Daniel J. Hoffman , Matthew L. Miller , Kenneth S. Collins
IPC分类号： H01L21/3065 , H01L21/3205 , C23C16/505 , H01L21/31
CPC分类号： H01J37/32146 , H01J37/32091 , H01J37/321 , H01J37/32183 , H01J37/32935
摘要： A method is provided in plasma processing of a workpiece for stabilizing the plasma against engineered transients in applied RF power, by modulating an unmatched low power RF generator in synchronism with the transient.
摘要翻译：提供了一种用于通过与瞬态同步调制不匹配的低功率RF发生器的工件的等离子体处理中的方法来稳定等离子体以应用RF功率中的设计瞬变的方法。

93. 发明申请

US20090297007A1 Automated Method and System for Nuclear Analysis of Biopsy Images 有权
标题翻译：活检图像核分析的自动化方法和系统
公开(公告)号：US20090297007A1
公开(公告)日：2009-12-03
申请号：US12131346
申请日：2008-06-02
申请人： Eric Cosatto , Hans-Peter Graf , Matthew L. Miller
发明人： Eric Cosatto , Hans-Peter Graf , Matthew L. Miller
IPC分类号： A61B5/00
CPC分类号： G06T7/0012 , G06K9/00147 , G06T2207/10056 , G06T2207/20081 , G06T2207/20116 , G06T2207/30024
摘要： An automated method and system for analyzing a digital image of a biopsy to determine whether the biopsy is normal or abnormal, i.e., exhibits some type of disease such as, but not limited to, cancer. In the method and system, a classifier is trained to recognize well formed nuclei outlines from imperfect nuclei outlines in digital biopsy images. The trained classifier may then be used to filter nuclei outlines from one or more digital biopsy images to be analyzed, to obtain the well formed nuclei outlines. The well formed nuclei outlines may then be used to obtain statistics on the size or area of the nuclei for use in determining whether the biopsy is normal or abnormal.
摘要翻译：一种用于分析活组织检查的数字图像以确定活组织检查是正常还是异常的自动化方法和系统，即呈现某种类型的疾病，例如但不限于癌症。在该方法和系统中，训练分类器以识别数字活检图像中不完美核子轮廓的良好形成的细胞核轮廓。然后训练的分类器可用于从要分析的一个或多个数字活检图像中过滤细胞核轮廓，以获得良好形成的细胞核轮廓。然后可以使用良好形成的核轮廓来获得关于核的大小或面积的统计数据，以用于确定活检是否正常或异常。

94. 发明申请

US20090294061A1 PLASMA REACTOR WITH PLASMA LOAD IMPEDANCE TUNING FOR ENGINEERED TRANSIENTS BY SYNCHRONIZED MODULATION OF AN UNMATCHED LOW POWER RF GENERATOR 有权
标题翻译：具有等离子体负载阻抗调节的等离子体反应器通过同步低功率射频发生器的同步调制实现工程过渡
公开(公告)号：US20090294061A1
公开(公告)日：2009-12-03
申请号：US12128926
申请日：2008-05-29
申请人： Steven C. Shannon , Kartik Ramaswamy , Daniel J. Hoffman , Matthew L. Miller , Kenneth S. Collins
发明人： Steven C. Shannon , Kartik Ramaswamy , Daniel J. Hoffman , Matthew L. Miller , Kenneth S. Collins
IPC分类号： C23C16/44 , C23F1/00
CPC分类号： H01J37/32935 , H01J37/32091 , H01J37/32183
摘要： A plasma reactor for processing a workpiece such as a semiconductor wafer using predetermined transients of plasma bias power or plasma source power has unmatched low power RF generators synchronized to the transients to minimize transient-induced changes in plasma characteristics.
摘要翻译：使用等离子体偏置功率或等离子体源功率的预定瞬变来处理诸如半导体晶片的工件的等离子体反应器具有与瞬变同步的无与伦比的低功率RF发生器，以使等离子体特性的瞬变诱发变化最小化。

95. 发明授权

US07609904B2 Transform coding system and method 有权
标题翻译：变换编码系统和方法
公开(公告)号：US07609904B2
公开(公告)日：2009-10-27
申请号：US11093568
申请日：2005-03-30
申请人： Matthew L. Miller
发明人： Matthew L. Miller
IPC分类号： G06K9/00 , G06K9/36 , G06K9/46 , G06F15/00 , G10L11/00
CPC分类号： G10L19/02 , G10L19/0017
摘要： A transform coding system and method are disclosed which utilize a modified quantization technique which advantageously foregoes the need for inverse quantization at the decoder. New techniques for optimizing an entropy code for the modified quantizer and for constructing the entropy codes are also disclosed.
摘要翻译：公开了一种利用经过改进的量化技术的变换编码系统和方法，其有利地放弃了在解码器处对逆量化的需要。还公开了用于优化修改的量化器的熵代码和用于构建熵代码的新技术。

96. 发明申请

US20080182416A1 PLASMA PROCESS UNIFORMITY ACROSS A WAFER BY APPORTIONING POWER AMONG PLURAL VHF SOURCES 失效
标题翻译：通过在多个VHF源上分配功率，在等离子体处理过程中的均匀性
公开(公告)号：US20080182416A1
公开(公告)日：2008-07-31
申请号：US11733764
申请日：2007-04-11
申请人： Kenneth S. Collins , Hiroji Hanawa , Kartik Ramaswamy , Douglas A. Buchberger , Shahid Rauf , Kallol Bera , Lawrence Wong , Walter R. Merry , Matthew L. Miller , Steven C. Shannon , Andrew Nguyen , James P. Cruse , James Carducci , Troy S. Detrick , Subhash Deshmukh , Jennifer Y. Sun
发明人： Kenneth S. Collins , Hiroji Hanawa , Kartik Ramaswamy , Douglas A. Buchberger , Shahid Rauf , Kallol Bera , Lawrence Wong , Walter R. Merry , Matthew L. Miller , Steven C. Shannon , Andrew Nguyen , James P. Cruse , James Carducci , Troy S. Detrick , Subhash Deshmukh , Jennifer Y. Sun
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： H01J37/32174 , H01J37/32091 , H01J37/32165
摘要： A method is provided for processing a workpiece in a plasma reactor chamber having electrodes including at least a ceiling electrode and a workpiece support electrode. The method includes coupling respective RF power sources of respective VHF frequencies f1 and f2 to either (a) respective ones of the electrodes or (b) a common one of the electrodes, where f1 is sufficiently high to produce a center-high non-uniform plasma ion distribution and f2 is sufficiently low to produce a center-low non-uniform plasma ion distribution. The method further includes adjusting a ratio of an RF parameter at the f1 frequency to the RF parameter at the f2 frequency so as to control plasma ion density distribution, the RF parameter being any one of RF power, RF voltage or RF current.
摘要翻译：提供了一种用于处理具有至少包括天花板电极和工件支撑电极的电极的等离子体反应器室中的工件的方法。该方法包括将各个VHF频率f 1和f 2的相应RF功率源耦合到（a）电极中的相应电极或（b）电极中的公共电极，其中f 1足够高以产生中心高不均匀的等离子体离子分布和f 2足够低以产生中心 - 低不均匀等离子体离子分布。该方法还包括调整f 1频率处的RF参数与f 2频率处的RF参数的比率，以便控制等离子体离子密度分布，RF参数是RF功率，RF电压或RF电流中的任何一个。

97. 发明申请

US20080178803A1 PLASMA REACTOR WITH ION DISTRIBUTION UNIFORMITY CONTROLLER EMPLOYING PLURAL VHF SOURCES 审中-公开
标题翻译：具有离子分布均质控制器的等离子体反应器使用多个甚高频源
公开(公告)号：US20080178803A1
公开(公告)日：2008-07-31
申请号：US11733913
申请日：2007-04-11
申请人： KENNETH S. COLLINS , Hiroji Hanawa , Kartik Ramaswamy , Douglas A. Buchberger , Shahid Rauf , Kallol Bera , Lawrence Wong , Walter R. Merry , Matthew L. Miller , Steven C. Shannon , Andrew Nguyen , James P. Cruse , James Carducci , Troy S. Detrick , Subhash Deshmukh , Jennifer Y. Sun
发明人： KENNETH S. COLLINS , Hiroji Hanawa , Kartik Ramaswamy , Douglas A. Buchberger , Shahid Rauf , Kallol Bera , Lawrence Wong , Walter R. Merry , Matthew L. Miller , Steven C. Shannon , Andrew Nguyen , James P. Cruse , James Carducci , Troy S. Detrick , Subhash Deshmukh , Jennifer Y. Sun
IPC分类号： B05C11/00
CPC分类号： H01J37/32174 , H01J37/32091 , H01J37/32165 , H01J37/32935
摘要： A plasma reactor includes a ceiling electrode facing a workpiece support pedestal and a pedestal electrode in the pedestal and first and second VHF power sources of different frequencies coupled to the same or to different ones of the ceiling electrode and the pedestal electrode. The first and second VHF power sources are of sufficiently high and sufficiently low frequencies, respectively, to produce center-high and center-low plasma distribution non-uniformities, respectively, in the chamber. The reactor further includes a controller programmed to change the relative output power levels of the first and second VHF power sources to: (a) increase the relative output power level of the first VHF power source whenever plasma ion distribution has a predominantly edge-high non-uniformity, and (b) increase the relative output power level of the second VHF power source whenever plasma ion distribution has a predominantly center-high non-uniformity.
摘要翻译：等离子体反应器包括面对工件支撑基座的顶板电极和基座中的基座电极以及耦合到天花板电极和基座电极中相同或不同的不同频率的第一和第二VHF电源。第一和第二VHF电源分别具有足够高和足够低的频率，以分别在腔室中产生中心高和中心低等离子体分布不均匀性。电抗器还包括被编程为将第一和第二VHF电源的相对输出功率电平改变为：（a）只要等离子体离子分布具有主要为边缘高的非高电平的第一VHF电源的相对输出功率电平，（b）当等离子体离子分布主要是中心高的不均匀性时，增加第二VHF电源的相对输出功率电平。

98. 发明授权

US07216232B1 Method and device for inserting and authenticating a digital signature in digital data 失效
标题翻译：用于在数字数据中插入和认证数字签名的方法和装置
公开(公告)号：US07216232B1
公开(公告)日：2007-05-08
申请号：US09294956
申请日：1999-04-20
申请人： Ingemar J. Cox , Matthew L. Miller , Douglas F. Rayner
发明人： Ingemar J. Cox , Matthew L. Miller , Douglas F. Rayner
IPC分类号： H04L9/00
CPC分类号： H04N1/32208 , G06T1/0021 , H04L9/3236 , H04L9/3247 , H04L2209/30 , H04L2209/608 , H04L2209/80 , H04N1/32128 , H04N1/32144 , H04N1/32229 , H04N1/32283 , H04N2101/00 , H04N2201/3233 , H04N2201/3269
摘要： A method for inserting a digital signature into digital data is provided. The digital data has bits and the method includes the steps of: assigning predetermined bits of the digital data for receiving the digital signature; signing the digital data excluding the predetermined bits resulting in the digital signature; and inserting the digital signature into the predetermined bits of the digital data for subsequent authentication of the digital data. Also provided is a method for authenticating digital data having the embedded digital signature in the predetermined bits of the digital data including the steps of: extracting the digital signature from the predetermined bits; decrypting the digital signature from the digital data resulting in a first hash; applying a known one-way hashing function used by an encoder of the digital data to the digital data excluding the predetermined bits resulting in a second hash; and comparing the first hash to the second hash wherein if the first hash matches the second hash the digital data is authentic. In a preferred version of the methods of the present invention, the method further includes the step of inserting associated data into the digital data prior to the signing step such that the digital signature authenticates both the associated data as well as the digital data. Preferably, the associated data is inserted into the bits of the digital data excluding the predetermined bits.
摘要翻译：提供了一种将数字签名插入数字数据的方法。数字数据具有比特，并且该方法包括以下步骤：分配用于接收数字签名的数字数据的预定比特; 签署不包括导致数字签名的预定位的数字数据; 并将数字签名插入到数字数据的预定位中，以便后续的数字数据认证。还提供了一种用于在数字数据的预定位中验证具有嵌入数字签名的数字数据的方法，包括以下步骤：从预定位提取数字签名; 从数字数据解密数字签名，得到第一个散列; 将由数字数据的编码器使用的已知单向散列函数应用于除了预定位之外的数字数据，导致第二散列; 以及将所述第一散列与所述第二散列进行比较，其中如果所述第一散列与所述第二散列匹配，则所述数字数据是可信的。在本发明的方法的优选版本中，该方法还包括在签名步骤之前将相关联的数据插入到数字数据中的步骤，使得数字签名认证相关数据以及数字数据。优选地，相关联的数据被插入除了预定比特之外的数字数据的比特中。

99. 发明授权

US07186943B2 MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression 失效
标题翻译： MERIE等离子体反应器，其顶置RF电极通过电弧抑制调谐到等离子体
公开(公告)号：US07186943B2
公开(公告)日：2007-03-06
申请号：US11105307
申请日：2005-04-12
申请人： Daniel J. Hoffman , Yan Ye , Dan Katz , Douglas A. Buchberger, Jr. , Xiaoye Zhao , Kang-Lie Chiang , Robert B. Hagen , Matthew L. Miller
发明人： Daniel J. Hoffman , Yan Ye , Dan Katz , Douglas A. Buchberger, Jr. , Xiaoye Zhao , Kang-Lie Chiang , Robert B. Hagen , Matthew L. Miller
IPC分类号： B23K10/06
CPC分类号： H01J37/3244 , H01J37/32082 , H01J37/32183 , H01J37/3266
摘要： A plasma reactor for processing a semiconductor workpiece, includes a reactor chamber having a chamber wall and containing a workpiece support for holding the semiconductor support, the electrode comprising a portion of the chamber wall, an RF power generator for supplying power at a frequency of the generator to the overhead electrode and capable of maintaining a plasma within the chamber at a desired plasma ion density level. The overhead electrode has a capacitance such that the overhead electrode and the plasma formed in the chamber at the desired plasma ion density resonate together at an electrode-plasma resonant frequency, the frequency of the generator being at least near the electrode-plasma resonant frequency. The reactor further includes a set of MERIE magnets surrounding the plasma process area overlying the wafer surface that produce a slowly circulating magnetic field which stirs the plasma to improve plasma ion density distribution uniformity.
摘要翻译：一种用于处理半导体工件的等离子体反应器，包括具有室壁并具有用于保持半导体支撑件的工件支撑件的反应室，所述电极包括室壁的一部分，RF发电机，用于以发电机到顶置电极并且能够将室内的等离子体保持在期望的等离子体离子密度水平。顶置电极具有这样的电容，使得在期望的等离子体离子密度下在室中形成的顶置电极和等离子体以电极 - 等离子体共振频率共振，发电机的频率至少接近电极 - 等离子体共振频率。反应器还包括围绕晶片表面的等离子体处理区域的一组MERIE磁体，其产生缓慢循环的磁场，其搅动等离子体以改善等离子体离子密度分布均匀性。

100. 发明授权

US06438252B1 Method for encoding bits in a signal 有权
公开(公告)号：US06438252B1
公开(公告)日：2002-08-20
申请号：US09817422
申请日：2001-03-26
申请人： Matthew L. Miller
发明人： Matthew L. Miller
IPC分类号： G06K900
摘要： A message in the form of a sequence of bits is encoded into relatively short, non-binary signals. The message (or vector) is divided into two halves. The encoder first determines an encoding of the message into a vector half the length of the eventual encoded vector. The half-length vector forms the first half of the encoded, and is negated to form the second half of the encoded vector. An identical synchronization signal is added to both halves of the encoded vector. The synchronization signal is used to compensate for the possibility that the received vector (or message) is cyclically rotated from the original vector. During decoding, the decoder first obtains the synchronization signal by adding the two halves of the vector together, canceling the encoded message. The synchronization signal is used to find the original cyclical shift of the vector. The decoder obtains the half-length encoded message vector by taking the difference between the two halves of the aligned full-length encoded vector. After decoding the vector into a bit sequence, the encoder re-encodes that bit sequence and compares the resulting vector with the original vector to determine whether the original vector truly encoded a message or was simply a noise signal.

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