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    • 11. 发明授权
    • Inorganic films using a cascaded source for battery devices
    • 使用电池装置的级联源的无机膜
    • US09017777B2
    • 2015-04-28
    • US13777602
    • 2013-02-26
    • QuantumScape Corporation
    • Isaiah O. Oladeji
    • B06B1/20C23C18/12H01M4/04H01M4/139H01M10/052H01M10/0562
    • C23C18/125C23C18/1204C23C18/1216C23C18/1258C23C18/1291C23C18/1295H01M4/0428H01M4/139H01M10/052H01M10/0562
    • A method for manufacturing thin films for a battery device. The method includes vaporizing a precursor material from a liquid source to form droplets ranging from, for example, about 10 microns to about 20 microns. Thereafter, the method includes subjecting the droplets from about 10 to about 20 microns to a megasonic energy source to cause formation of a plurality of smaller droplets ranging from, for example, about 0.25 micron to about 5 microns which are then directed to a heated substrate, where through a heterogeneous reaction a film of material overlying the surface region is formed. The method includes irradiating (e.g., ultra-violet, infra-red, or plasma) the film of material using electromagnetic radiation to process the film to cause a recrystallization of the film to form larger sized crystalline materials. Optionally, the method includes sequentially performing the vaporizing, reacting/releasing, and irradiating to build up a thickness of the film of material.
    • 一种用于制造电池装置用薄膜的方法。 该方法包括从液体源蒸发前体材料以形成范围为例如约10微米至约20微米的液滴。 此后,该方法包括将来自约10至约20微米的液滴经受兆声波能量源,以形成范围为例如约0.25微米至约5微米的多个更小的液滴,然后将其引导至加热的底物 其中通过非均相反应形成覆盖表面区域的材料膜。 该方法包括使用电磁辐射照射(例如,紫外线,红外线或等离子体)材料膜以处理膜以引起膜的再结晶以形成更大尺寸的结晶材料。 任选地,该方法包括依次进行蒸发,反应/释放和照射以形成材料膜的厚度。