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    • 17. 发明申请
    • Semiconductor interconnect having semiconductor spring contacts
    • 具有半导体弹簧触点的半导体互连
    • US20050127928A1
    • 2005-06-16
    • US11044941
    • 2005-01-27
    • Kyle Kirby
    • Kyle Kirby
    • G01R1/04G01R1/073G01R31/02
    • G01R1/06711G01R1/0483G01R1/07314Y10T29/49117Y10T29/49147Y10T29/49149Y10T29/49151
    • An interconnect for testing a semiconductor component includes a substrate, and interconnect contacts on the substrate configured to electrically engage component contacts on the component. The interconnect contacts include flexible spring segments defined by grooves in the substrate, shaped openings in the substrate, or shaped portions of the substrate. The spring segments are configured to flex to exert spring forces on the component contacts, and to compensate for variations in the size or planarity of the component contacts. The interconnect can be configured to test wafer sized components, or to test die sized components. A test method includes the steps of providing the interconnect with the interconnect contacts, and electrically engaging the component contacts under a biasing force from the spring segments. A wafer level test system includes the interconnect mounted to a testing apparatus such as a wafer probe handler. A die level test system includes the interconnect mounted to a test carrier for discrete components.
    • 用于测试半导体部件的互连件包括衬底,以及被配置为电接合部件上的部件触点的衬底上的互连触点。 互连触点包括由衬底中的凹槽限定的柔性弹簧段,衬底中的成形开口或衬底的成形部分。 弹簧段构造成弯曲以在部件触点上施加弹簧力,并且补偿部件触头的尺寸或平面度的变化。 互连可以配置为测试晶片尺寸的组件,或者测试模具尺寸的组件。 一种测试方法包括以下步骤:在互连触点之间提供互连,并且在来自弹簧段的偏压力下使部件触点电接合。 晶片级测试系统包括安装到诸如晶片探测处理器的测试装置的互连。 模具级测试系统包括安装到用于分立组件的测试载体的互连。
    • 20. 发明授权
    • Method of forming temporary carrier structure and associated release techniques
    • 形成临时载体结构和相关释放技术的方法
    • US08366852B2
    • 2013-02-05
    • US13093672
    • 2011-04-25
    • Kyle Kirby
    • Kyle Kirby
    • B32B37/00
    • H01L21/6835H01L2221/68318Y10T156/1064Y10T156/1082Y10T156/1111
    • A method of forming a temporary carrier structure is disclosed which includes forming a plurality of recesses in a carrier structure, the recesses extending to a depth that is less than a thickness of the carrier structure, forming a dissolvable material in the recesses and above a first surface of the carrier structure, securing a thin substrate above the first surface of the carrier structure using the dissolvable material to secure the thin substrate in place, performing at least one process operation on a second surface of the carrier structure to expose the dissolvable material in the recesses and contacting the exposed dissolvable material with a release agent so as to dissolve at least a portion of the dissolvable material.
    • 公开了一种形成临时载体结构的方法,其包括在载体结构中形成多个凹部,所述凹部延伸到小于载体结构的厚度的深度,在凹部中形成可溶解材料,并且在第一 载体结构的表面,使用可溶解材料将薄衬底固定在载体结构的第一表面上,以将薄衬底固定就位,在载体结构的第二表面上进行至少一个工艺操作以将可溶解材料暴露在 所述凹部和暴露的可溶解材料与脱模剂接触以溶解至少一部分可溶解材料。