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    • 24. 发明申请
    • ENHANCED FLEXIBLE PROCESS OPTIMIZER
    • 增强柔性工艺优化器
    • US20070203671A1
    • 2007-08-30
    • US11744915
    • 2007-05-07
    • Chander BhatejaRajiv BhatejaAnjali Bhateja
    • Chander BhatejaRajiv BhatejaAnjali Bhateja
    • G06F11/30
    • B24B51/00G05B13/024G05B23/0235G07C3/005G07C3/146
    • A flexible process optimizer for recording and analyzing various parameters to improve the efficiency of a production process. The flexible process optimizer acquires and conditions signals from a variety of transducers mounted on a production machine. Through qualitative and quantitative data analysis, specific aspects are of the production process which need improvement are identified. The qualitative evaluation looks at the presence, absence, or duration of certain features of the production cycle as revealed by the sensor data. The quantitative evaluation of data involves the computation of certain data attributes. By providing useful data acquisition and data analysis tools, necessary adjustments are made to the required parameters of the production process to provide improved efficiency. The results of the changes are immediately verifiable using the flexible process optimizer.
    • 灵活的过程优化器,用于记录和分析各种参数,以提高生产过程的效率。 灵活的过程优化器从安装在生产机器上的各种换能器获取和调节信号。 通过定性和定量的数据分析,确定需要改进的生产过程的具体方面。 定性评估考察了传感器数据所揭示的生产周期某些特征的存在,不存在或持续时间。 数据的定量评估涉及某些数据属性的计算。 通过提供有用的数据采集和数据分析工具,必须对生产过程所需的参数进行调整,以提高效率。 可以使用灵活的过程优化器立即验证更改的结果。
    • 25. 发明申请
    • Flexible process optimizer
    • 灵活的流程优化器
    • US20050165585A1
    • 2005-07-28
    • US10764615
    • 2004-01-26
    • Rajiv BhatejaChander Bhateja
    • Rajiv BhatejaChander Bhateja
    • B24B51/00G01D18/00G05B15/02G05B23/02G06F19/00
    • B24B51/00G05B13/024G05B23/0235G07C3/005G07C3/146
    • A flexible process optimizer for recording and analyzing various parameters to improve the efficiency of a production process. The flexible process optimizer acquires and conditions signals from a variety of transducers mounted on a production machine. Through qualitative and quantitative data analysis, specific aspects are of the production process which need improvement are identified. The qualitative evaluation looks at the presence, absence, or duration of certain features of the production cycle as revealed by the sensor data. The quantitative evaluation of data involves the computation of certain data attributes. By providing useful data acquisition and data analysis tools, necessary adjustments are made to the required parameters of the production process to provide improved efficiency. The results of the changes are immediately verifiable using the flexible process optimizer.
    • 灵活的过程优化器,用于记录和分析各种参数,以提高生产过程的效率。 灵活的过程优化器从安装在生产机器上的各种换能器获取和调节信号。 通过定性和定量的数据分析,确定需要改进的生产过程的具体方面。 定性评估考察了传感器数据所揭示的生产周期某些特征的存在,不存在或持续时间。 数据的定量评估涉及某些数据属性的计算。 通过提供有用的数据采集和数据分析工具,必须对生产过程所需的参数进行调整,以提高效率。 可以使用灵活的过程优化器立即验证更改的结果。
    • 27. 发明授权
    • Laser lithography quality alarm system
    • 激光光刻质量报警系统
    • US06408260B1
    • 2002-06-18
    • US09505233
    • 2000-02-16
    • Michael P. C. WattsTom A. Watson
    • Michael P. C. WattsTom A. Watson
    • G06F1500
    • G03F7/70025G03F7/70525G03F7/70591G05B19/00G05B2219/31205G05B2219/31485G07C3/005Y02P90/86
    • An electric discharge laser with an associated programmable controller which (1) will permit an operator to specify beam quality parameters based on historical data (2) will monitor those parameters and (3) will provide a notification signal to the operator informing him when the beam quality is adequate for integrated circuit fabrication. The controller is programmed to indicate an out-of-control condition when one or more quality parameters exhibit certain specified non-random behavior such as two out of three quality measurements deviating by more than 4 standard deviations and/or three out of four quality measurements deviating by more three standard deviations. In a preferred embodiment the program is designed to detect poor quality by looking for these “runs” of bad quantity data and to produce false indication of system out of control, on the average, no more than once each two months.
    • 具有相关可编程控制器的放电激光器(1)将允许操作者基于历史数据(2)指定光束质量参数将监视这些参数,并且(3)将向操作者提供通知信号,以便当光束 质量足以用于集成电路制造。 控制器被编程为当一个或多个质量参数表现出特定的非随机行为时指示失控状态,例如偏离超过4个标准偏差的三个质量测量中的两个和/或四个质量测量中的三分之一 偏离更多的三个标准偏差。 在优选实施例中,该程序旨在通过查找这些“数量”数据的错误来检测质量差,并且每两个月平均不超过一次产生系统失控的虚假指示。
    • 29. 发明授权
    • Malfunction detector
    • 功能检测器
    • US3656139A
    • 1972-04-11
    • US3656139D
    • 1970-04-28
    • IND CONTROLS INC
    • WINTRISS GEORGE VICTOR
    • B30B11/00B30B15/32G07C3/00H02H7/00G08B21/00
    • B30B15/32B30B11/005G07C3/005H02H7/00Y10T307/74
    • A malfunction detector for automatically monitoring and controlling operation of a cyclically operating machine performing one or more operations on work pieces at one or more stations. The detector is of modular construction and includes a circuit for providing a monitoring check cycle and indications that the monitoring cycle has been completed without detecting any malfunctions or that the cycle has not been initiated. Circuitry is also provided for indicating at which individual station any malfunction occurs during the monitoring cycle and for indicating if such malfunction circuitry at any station has become inoperative. Circuitry is also provided for initiating either immediate stoppage of the machine or stoppage at the end of the machine cycle in progress depending on the type of malfunction if the machine is so adapted.
    • 一种故障检测器,用于自动监测和控制对在一个或多个站上的工件执行一个或多个操作的循环操作机器的操作。 检测器是模块化结构,并且包括用于提供监测检查循环的电路以及监测周期已经完成而没有检测到任何故障或循环未被启动的指示。 还提供电路用于指示哪个单独的站在监视周期期间发生任何故障,并指示是否在任何站的这种故障电路已经不起作用。 还提供电路,用于启动机器的立即停机或在机器循环结束时停止进行,这取决于机器如何适应的故障类型。