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    • 27. 发明授权
    • Methods of forming a plurality of capacitors
    • 形成多个电容器的方法
    • US08450164B2
    • 2013-05-28
    • US12710077
    • 2010-02-22
    • Vishwanath BhatKevin R. SheaFarrell Good
    • Vishwanath BhatKevin R. SheaFarrell Good
    • H01L21/337
    • H01L27/10894H01L27/10852H01L28/91
    • A method of forming a plurality of capacitors includes an insulative material received over a capacitor array area and a circuitry area. The array area comprises a plurality of capacitor electrode openings within the insulative material received over individual capacitor storage node locations. The intervening area comprises a trench. Conductive material is formed within the openings and against a sidewall portion of the trench to less than completely fill the trench. Covering material is formed over an elevationally outer lateral interface of the conductive material within the trench and the insulative material of the circuitry area. The insulative material within the array area is etched with a liquid etching solution effective to expose outer sidewall portions of the conductive material within the array area and to expose the conductive material within the trench. The conductive material within the array area is incorporated into a plurality of capacitors.
    • 形成多个电容器的方法包括在电容器阵列区域和电路区域上接收的绝缘材料。 阵列区域包括在单独的电容器存储节点位置处接收的绝缘材料内的多个电容器电极开口。 中间区域包括沟槽。 导电材料形成在开口内并抵靠沟槽的侧壁部分,以小于完全填充沟槽。 覆盖材料形成在沟槽内的导电材料的正面外侧界面和电路区域的绝缘材料之间。 用液体蚀刻溶液蚀刻阵列区域内的绝缘材料,该液体蚀刻溶液有效地暴露阵列区域内的导电材料的外侧壁部分并露出沟槽内的导电材料。 阵列区域内的导电材料被并入多个电容器中。