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    • 8. 发明授权
    • Transparent conductor based pinned photodiode
    • 透明导体固定光电二极管
    • US08298846B2
    • 2012-10-30
    • US12704769
    • 2010-02-12
    • Chandra MouliHoward E. Rhodes
    • Chandra MouliHoward E. Rhodes
    • H01L21/00
    • H01L27/14609H01L27/14601H01L27/1463H01L27/14689
    • A pinned photodiode with improved short wavelength light response. In exemplary embodiments of the invention, a gate oxide is formed over a doped, buried region in a semiconductor substrate. A gate conductor is formed on top of the gate oxide. The gate conductor is transparent, and in one embodiment is a layer of indium-tin oxide. The transparent conductor can be biased to reduce the need for a surface dopant in creating a pinned photodiode region. The biasing of the transparent conductor produces a hole-rich accumulation region near the surface of the substrate. The gate conductor material permits a greater amount of charges from short wavelength light to be captured in the photo-sensing region in the substrate, and thereby increases the quantum efficiency of the photosensor.
    • 具有改善的短波长光响应的钉扎光电二极管。 在本发明的示例性实施例中,在半导体衬底中的掺杂的掩埋区域上形成栅极氧化物。 栅极导体形成在栅极氧化物的顶部。 栅极导体是透明的,在一个实施例中是一层氧化铟锡。 透明导体可以被偏置以减少在产生钉扎光电二极管区域时对表面掺杂剂的需要。 透明导体的偏压在基板的表面附近产生一个富含孔的堆积区域。 栅极导体材料允许在衬底中的光敏区域中捕获较短波长的光的更大量的电荷,从而提高光电传感器的量子效率。