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    • 31. 发明授权
    • Image processing method, image processing apparatus, and storage medium
    • 图像处理方法,图像处理装置和存储介质
    • US06674905B1
    • 2004-01-06
    • US09488792
    • 2000-01-21
    • Masakazu MatsuguToshiaki KondoFumiaki Takahashi
    • Masakazu MatsuguToshiaki KondoFumiaki Takahashi
    • G06K948
    • G06T7/11G06T7/187G06T2207/10016G06T2207/20064G06T2207/20096
    • When a dispersion value of a shading value is equal to or more than a threshold value in the neighborhood of a standard point, it is determined that an image pattern has a texture dominant characteristic. When the value is less than the threshold value, a change of the shading value is determined to be moderate (S11). When the dispersion value is equal to or more than the threshold value (S11), a texture characteristic amount is loaded (S12), a characteristic amount suitable for area growth (e.g., texture energy) is calculated (S13), and a distance DT concerning the texture characteristic amount is obtained (S14). When the dispersion value is less than the threshold value (S11), a color component characteristic amount is loaded (S16), a characteristic amount suitable for the area growth (e.g., a characteristic vector obtained from a local histogram concerning a color component or a list of representative color components) is extracted (S17), and a distance DC concerning the color component is obtained (S18). The area is grown based on the corresponding characteristic amount (S15, S19), and a renewal position is determined based on a new borderline of a core area obtained by unifying area growth results from standard points (S20).
    • 当阴影值的色散值等于或大于标准点附近的阈值时,确定图像图案具有纹理主导特性。 当该值小于阈值时,阴影值的变化被确定为适度(S11)。 当色散值等于或大于阈值(S11)时,加载纹理特征量(S12),计算适合于面积生长的特征量(例如,纹理能量)(S13),并且距离DT 获得关于纹理特征量的数据(S14)。 当色散值小于阈值(S11)时,加载颜色分量特征量(S16),适合于区域增长的特征量(例如,从关于颜色分量的局部直方图获得的特征向量 提取代表性颜色分量的列表)(S17),并且获得关于颜色分量的距离DC(S18)。 基于对应的特征量生长区域(S15,S19),并且基于通过从标准点统一区域增长结果而获得的核心区域的新的边界线来确定更新位置(S20)。
    • 34. 发明授权
    • Position detecting method and apparatus including Fraunhofer diffraction
detector
    • 位置检测方法和装置,包括弗劳恩霍夫衍射检测器
    • US5325176A
    • 1994-06-28
    • US875601
    • 1992-04-28
    • Shigeyuki SudaKenji SaitohMasakazu MatsuguNaoto AbeMinoru YoshiiRyo Kuroda
    • Shigeyuki SudaKenji SaitohMasakazu MatsuguNaoto AbeMinoru YoshiiRyo Kuroda
    • G03F9/00G01B11/02
    • G03F9/7076
    • A device usable with a first object and a second object at least one of which is provided with a diffraction grating, for detecting the position of the second object relative to the first object, is disclosed. The device includes a light source for projecting a position detecting beam upon the first object; a beam detecting portion for receiving the position detecting beam after it is directed from the first object and being incident on the second object, the beam detecting portion receiving the position detecting beam to detect the position of the second object relative to the first object; wherein at least one diffraction grating is disposed in the path of the position detecting beam to be received by the beam detecting portion, which diffraction grating is effective to diffract the position detecting beam at least twice and wherein the beam detecting portion is disposed at a site effective not to receive unwanted diffraction light produced from the or at least one diffraction grating.
    • 公开了一种可用于第一物体和第二物体的装置,其中至少一个具有用于检测第二物体相对于第一物体的位置的衍射光栅。 该装置包括用于将位置检测光束投射到第一物体上的光源; 光束检测部分,用于在从第一物体引导之后接收位置检测光束并入射到第二物体上,光束检测部分接收位置检测光束以检测第二物体相对于第一物体的位置; 其中至少一个衍射光栅设置在所述位置检测光束的路径中,以由所述光束检测部分接收,所述衍射光栅有效地将所述位置检测光束衍射至少两次,并且其中所述光束检测部分设置在位置 有效地不接收由该至少一个衍射光栅产生的不想要的衍射光。
    • 35. 发明授权
    • Position detecting method and apparatus
    • 位置检测方法和装置
    • US5235408A
    • 1993-08-10
    • US888434
    • 1992-05-28
    • Masakazu MatsuguKenji SaitohShigeyuki Suda
    • Masakazu MatsuguKenji SaitohShigeyuki Suda
    • G03F9/00
    • G03F9/7049
    • A device for detecting a positional relationship between a mask and a wafer, includes a light source for projecting light toward the mask, a first photodetecting system for detecting the position, on a predetermined plane, of first light deflected by the mask and the wafer, wherein the position of incidence on the first photodetecting system of the first light is changeable with the positional relationship between the mask and the wafer, a second photodetecting system for detecting the position, on a predetermined plane, of incidence of second light deflected by the mask, wherein the position of incidence on the second photodetecting system, of the second light being changeable with relative inclination between the mask and the light source, and a position detecting system for detecting the relative position of the mask and the wafer on the basis of the detection by the first and second photodetecting systems, wherein the detection by the position detecting system can be free from the relative inclination between the mask and the light source.
    • 一种用于检测掩模和晶片之间的位置关系的装置,包括用于将光投射到掩模的光源,用于检测由掩模和晶片偏转的第一光在预定平面上的位置的第一光电检测系统, 其中,所述第一光的第一受光系统上的入射位置可根据所述掩模和所述晶片之间的位置关系而改变;第二光电检测系统,用于检测由所述掩模偏转的第二光在预定平面上的位置的位置; 其特征在于,所述第二光检测系统中的所述入射位置,所述第二光的入射位置可以通过所述掩模和所述光源之间的相对倾斜度而变化;以及位置检测系统,用于基于所述掩模和所述光源检测所述掩模和所述晶片的相对位置 由第一和第二光电检测系统进行检测,其中位置检测系统的检测可以不受 面罩与光源之间的相对倾斜度。
    • 39. 发明授权
    • Estimation apparatus, control method thereof, and program
    • 估计装置及其控制方法和程序
    • US08755562B2
    • 2014-06-17
    • US12956037
    • 2010-11-30
    • Miho IshigamiMasakazu MatsuguKatsuhiko MoriYusuke Mitarai
    • Miho IshigamiMasakazu MatsuguKatsuhiko MoriYusuke Mitarai
    • G06K9/00
    • G06K9/00993G06T7/77G06T2207/10028
    • An apparatus includes a capturing unit that captures a target object and generates a range image representing distance information, a general estimation unit that analyzes the range image and estimates a general position and orientation of the target object, and a determination unit that determines a priority order of a plurality of identification units, based on the estimated general position and orientation. In addition, a setting unit sets a search window indicating a range for detailed estimation of position and orientation of the range image based on a preregistered general size of the target object, a calculation unit calculates a difference between a first distance value of a first pixel in the range image and a second distance value of a second pixel which is next to the first pixel in the range image, and an updating unit updates the search window based on the calculated difference. A detailed estimation unit estimates a detailed position and orientation of the target object, using the plurality of identification units in the determined priority order within the range of the search window.
    • 一种装置,包括拍摄目标对象并产生代表距离信息的范围图像的拍摄单元,分析所述距离图像并估计所述目标对象的一般位置和方位的一般估计单元,以及确定所述优先顺序的确定单元 基于所估计的一般位置和方位来确定多个识别单元。 另外,设置单元基于目标对象的预先注册的一般尺寸,设定表示范围图像的位置和姿态的详细估计的范围的搜索窗口,计算单元计算第一像素的第一距离值 在距离图像中的第二像素的第二距离值和距离图像中的第一像素旁边的第二距离值,并且更新单元基于计算出的差异来更新搜索窗口。 详细估计单元使用搜索窗口范围内所确定的优先顺序中的多个识别单元来估计目标对象的详细位置和方位。