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    • 33. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07202149B2
    • 2007-04-10
    • US11010389
    • 2004-12-14
    • Saishi FujikawaEtsuko AsanoTatsuya AraoTakashi YokoshimaTakuya MatsuoHidehito Kitakado
    • Saishi FujikawaEtsuko AsanoTatsuya AraoTakashi YokoshimaTakuya MatsuoHidehito Kitakado
    • H01L21/4763H01L21/3205
    • H01L29/78621H01L27/1237H01L29/42384H01L29/49H01L29/66757
    • A semiconductor device of which manufacturing steps can be simplified by doping impurities at a time, and a manufacturing method thereof. The manufacturing method of the semiconductor device comprises the steps of: forming first and second semiconductor layers over a substrate, forming a first insulating film over the first and second semiconductor layers, forming first and second conductive films thereover, forming a first gate electrode having a stacked layer of the first and second conductive films, in which a portion of the first conductive film is exposed from the second conductive film, over the first semiconductor layer with the first insulating film interposed therebetween, forming a second insulating film over the first insulating film, forming third and fourth conductive films thereover, and forming a second gate electrode having a stacked layer of the third and fourth conductive films, in which a portion of the third conductive film is exposed from the fourth conductive film, over the second semiconductor layer with the first and second insulating films interposed therebetween.
    • 通过一次掺杂杂质可以简化制造步骤的半导体器件及其制造方法。 半导体器件的制造方法包括以下步骤:在衬底上形成第一和第二半导体层,在第一和第二半导体层上形成第一绝缘膜,在其上形成第一和第二导电膜,形成具有 将第一导电膜的一部分从第二导电膜露出的第一导电膜和第二导电膜的第一绝缘膜在第一绝缘膜之上形成第二绝缘膜, 在其上形成第三和第四导电膜,并且形成第二栅电极,其具有第三导电膜和第四导电膜的堆叠层,其中第三导电膜的一部分从第四导电膜暴露在第二半导体层上, 其间插入第一绝缘膜和第二绝缘膜。
    • 34. 发明申请
    • Semiconductor device and method for manufacturing the same
    • 半导体装置及其制造方法
    • US20070034874A1
    • 2007-02-15
    • US11584524
    • 2006-10-23
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • H01L29/04H01L21/84
    • H01L27/124H01L27/1214H01L27/1259H01L29/6675H01L29/78621H01L29/78648
    • A semiconductor device that can be manufactured with a reduced cost by decreasing the number of masks is disclosed, and a method for manufacturing the semiconductor device is disclosed. The method for manufacturing the semiconductor device comprises the steps of: forming a semiconductor layer 3 having a source and a drain regions 10, 11, and LDD regions 16, 17; a gate insulating film 5; and a gate electrode 6; forming a first and a second interlayer insulating films 24, 25 over the gate electrode 6 and the gate insulating film 5; forming contact holes 25a, 25c to these interlayer insulating films so as to be located over each of the source region and the drain region; and an opening portion 25b to these interlayer insulating films so as to be located over the gate electrode and the LDD region; forming a second gate electrode 26b by a conductive film in the opening portion so as to cover the gate electrode and the LDD region; and a pixel electrode 26a over the second interlayer insulating film; removing the gate insulating film in the contact hole; and forming wirings 27, 28 connected to each the source region and the drain region.
    • 公开了可以通过减少掩模数而降低成本的半导体器件,并且公开了一种用于制造半导体器件的方法。 制造半导体器件的方法包括以下步骤:形成具有源极和漏极区域10,11以及LDD区域16,17的半导体层3; 栅极绝缘膜5; 和栅电极6; 在栅极电极6和栅极绝缘膜5上形成第一和第二层间绝缘膜24,25; 向这些层间绝缘膜形成接触孔25a,25c,以便位于源极区域和漏极区域之上; 和这些层间绝缘膜的开口部分25b,以便位于栅电极和LDD区之上; 通过开口部中的导电膜形成第二栅电极26b,以覆盖栅电极和LDD区; 以及在第二层间绝缘膜上的像素电极26a; 去除接触孔中的栅极绝缘膜; 以及形成连接到每个源极区域和漏极区域的布线27,28。
    • 37. 发明授权
    • Irregular semiconductor film, having ridges of convex portion
    • 不规则的半导体膜,具有凸部的凸脊
    • US06777713B2
    • 2004-08-17
    • US10265634
    • 2002-10-08
    • Hidekazu MiyairiAiko ShigaKatsumi NomuraNaoki MakitaTakuya Matsuo
    • Hidekazu MiyairiAiko ShigaKatsumi NomuraNaoki MakitaTakuya Matsuo
    • H01L2900
    • H01L27/12G02F1/1362H01L21/0237H01L21/02488H01L21/02532H01L21/02667H01L21/02672H01L21/02686H01L27/1277H01L29/66757H01L29/78621H01L29/78675
    • By adding a novel improvement to the technique disclosed in JP 8-78329 A, a manufacturing method in which film characteristics of a semiconductor film having a crystalline structure are improved is provided. In addition, a TFT having superior TFT characteristics, such as field effect mobility, which uses the semiconductor film as an active layer, and a method of manufacturing the TFT, are also provided. A metallic element which promotes the crystallization of silicon is added to a semiconductor film having an amorphous structure and an oxygen concentration within the film of less than 5×1018/cm3. The semiconductor film having an amorphous structure is then heat-treated, forming a semiconductor film having a crystalline structure. Subsequently, an oxide film on the surface is removed. Oxygen is introduced to the semiconductor film having a crystalline structure, and processing is performed such that the concentration of oxygen within the film is from 5×1018/cm3 to 1×1021/cm3. After removing an oxide film on the surface of the semiconductor film, the semiconductor film surface is leveled by irradiating laser light under an inert gas atmosphere or in a vacuum.
    • 通过添加对JP 8-78329A中公开的技术的新颖改进,提供了具有改善晶体结构的半导体膜的膜特性的制造方法。 此外,还提供了具有优异TFT特性的TFT,例如使用半导体膜作为有源层的场效应迁移率,以及TFT的制造方法。 将促进硅结晶的金属元素加入到膜内的非晶结构和氧浓度小于5×10 18 / cm 3的半导体膜中。 然后对具有非晶结构的半导体膜进行热处理,形成具有晶体结构的半导体膜。 随后,除去表面上的氧化物膜。 将氧气引入具有晶体结构的半导体膜,并且进行处理,使得膜内的氧浓度为5×10 18 / cm 3至1×10 21 / cm 3。 在去除半导体膜表面上的氧化物膜之后,通过在惰性气体气氛或真空中照射激光来平整半导体膜表面。