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31. 发明申请

US20220368113A1 HIGH SPEED NARROW SPECTRUM MINIARRAY OF VCSELS AND DATA TRANSMISSION DEVICE BASED THEREUPON 有权
公开(公告)号：US20220368113A1
公开(公告)日：2022-11-17
申请号：US17724041
申请日：2022-04-19
申请人： Nikolay Ledentsov , Vitaly Shchukin
发明人： Nikolay Ledentsov , Vitaly Shchukin
IPC分类号： H01S5/42 , H01S5/183 , H01S5/028
摘要： An on-chip miniarray of optically-coupled oxide-confined apertures of vertical cavity surface emitting lasers (VCSELs) is realized by etching holes from the chip surface down to at least one aperture layer. Oxidation of the aperture layer results in electrically-isolated apertures suitable for current injection. The lateral distance between the aperture centers and the shape of the aperture is chosen to result in effective interaction of the neighboring optical modes in the related aperture regions through optical field coupling effect causing the interaction-induced splitting of the wavelengths of the optical modes. At least one aperture has a different surface area due to different spacing of the etched holes. Different aperture sizes result in different wavelengths of the coupled modes. Splitting of the cavity modes in a frequency domain 3-100 GHz extends the modulation bandwidth of the device due to photon-photon interaction effects.
Selective deposition of highly reflective coating and/or anti-reflecting coating over apertures of different VCSELs foiining a miniarray allows stabilizing lasing in a single coherent mode of the array. Most preferably, highly reflective coating covers the largest aperture and stabilizes the fundamental mode of the coherent array. Anti-reflecting coatings can be deposited on at least one other aperture to reduce the photon lifetime and increase the homogeneous broadening of the related resonant wavelength. Consequently broadening of the photon-photon interaction resonances between the cavity modes can be controlled. Such resonance broadening allows control over the shape of the current modulation curve of the miniarray of VCSELs with the frequency maximum defined by the splitting of the cavity modes and the broadening defined by the broadening of the photon resonances. An increase in −3dB modulation bandwidth of the VCSEL miniarray up to at least 70 GHz is possible.
Such miniarray of VCSELs enables efficient coupling of the emitted light to a multimode optical fiber with the efficiency of at least 70%.

32. 发明申请

US20220368106A1 VERTICAL-CAVITY SURFACE-EMITTING LASER 有权
公开(公告)号：US20220368106A1
公开(公告)日：2022-11-17
申请号：US17878032
申请日：2022-07-31
申请人： SEOUL VIOSYS CO., LTD.
发明人： Ki Hwang LEE , Jeong Rae Ro , Byueng Su Yoo , Yoon Sang Jeon , Gong Hee Choi
IPC分类号： H01S5/183 , H01S5/42
摘要： A vertical-cavity surface-emitting laser (VCSEL) including a substrate including a plurality of emitters forming an array region, a lower mirror, an upper mirror, an active layer interposed between the lower mirror and the upper mirror, an aperture forming layer interposed between the upper mirror and the active layer and including an oxidation region and a window region, a connector disposed on the upper mirror, a plurality of oxidation holes passing through the upper mirror and the aperture forming layer, an upper insulation layer covering the plurality of oxidation holes, and a pad electrically connected to the connector, in which at least a portion of the connector is disposed in the plurality of oxidation holes, the plurality of emitters is disposed in substantially a honeycomb shape on the substrate, and the pad is formed on one side of the substrate adjacent to the array region.

33. 发明授权

US11489314B2 Light-emitting element and method of manufacturing the same 有权
公开(公告)号：US11489314B2
公开(公告)日：2022-11-01
申请号：US17127383
申请日：2020-12-18
申请人： Sony Corporation
发明人： Susumu Sato , Tatsushi Hamaguchi , Shoichiro Izumi , Noriyuki Futagawa , Masamichi Ito , Jugo Mitomo , Hiroshi Nakajima
IPC分类号： H01S5/00 , H01S5/183 , H01S5/343 , H01S5/042
摘要： A light-emitting element includes: a laminated structure body 20 which is formed from a GaN-based compound semiconductor and in which a first compound semiconductor layer 21 including a first surface 21a and a second surface 21b that is opposed to the first surface 21a, an active layer 23 that faces the second surface 21b of the first compound semiconductor layer 21, and a second compound semiconductor layer 22 including a first surface 22a that faces the active layer 23 and a second surface 22b that is opposed to the first surface 22a are laminated; a first light reflection layer 41 that is provided on the first surface 21a side of the first compound semiconductor layer 21; and a second light reflection layer 42 that is provided on the second surface 22b side of the second compound semiconductor layer 22. The first light reflection layer 41 includes a concave mirror portion 43, and the second light reflection layer 42 has a flat shape.

34. 发明申请

US20220344909A1 MATRIX ADDRESSABLE VERTICAL CAVITY SURFACE EMITTING LASER ARRAY 有权
公开(公告)号：US20220344909A1
公开(公告)日：2022-10-27
申请号：US17538592
申请日：2021-11-30
申请人： Lumentum Operations LLC
发明人： Yeyu ZHU , Eric R. HEGBLOM , Yuefa LI
IPC分类号： H01S5/42 , H01S5/042 , H01S5/183
摘要： In some implementations, a vertical cavity surface emitting laser (VCSEL) array may include a substrate. In some implementations, the VCSEL array may include a set of cathodes disposed on the substrate in a first direction, wherein a cathode, of the set of cathodes, is defined by a serpentine shape. In some implementations, the VCSEL array may include a set of anodes disposed on the substrate in a second direction, wherein an anode, of the set of anodes, is defined by the serpentine shape.

35. 发明申请

US20220320827A1 PHOTONIC CRYSTAL SURFACE EMITTING LASER DEVICE 有权
公开(公告)号：US20220320827A1
公开(公告)日：2022-10-06
申请号：US17709442
申请日：2022-03-31
申请人： Phosertek Corporation
发明人： Lih-Ren Chen , Kuo-Bin Hong , Tien-Chang Lu , Chien-Hung Lin , Hsiu-Ling Chen , Kuan-Chih Huang
IPC分类号： H01S5/11 , H01S5/042 , H01S5/183
摘要： A photonic crystal surface emitting laser device including at least one photonic crystal surface emitting laser unit is provided. The photonic crystal surface emitting laser unit includes a light-emitting layer, a photonic crystal layer, a doped semiconductor layer, and a diffractive grating. The light-emitting layer is configured to emit a light beam. The photonic crystal layer is disposed on one side of the light-emitting layer. The doped layer is disposed on another side of the light-emitting layer. The diffractive grating is disposed on the photonic crystal layer or the doped semiconductor layer.

36. 发明授权

US11451009B2 Vertical cavity surface emitting laser mode control 有权
公开(公告)号：US11451009B2
公开(公告)日：2022-09-20
申请号：US16725400
申请日：2019-12-23
申请人： Lumentum Operations LLC
发明人： Pengfei Qiao , Chien-Yao Lu , Albert Yuen
IPC分类号： H01S5/183 , H01S5/042 , H01S5/20 , H01S5/065
摘要： A vertical cavity surface emitting laser (VCSEL) may include a top contact, wherein the top contact is associated with a particular shape, and wherein the particular shape is a toothed shape with a particular quantity of teeth. The VCSEL may include at least one implanted region. The VCSEL may include at least one top contact segment.

37. 发明申请

US20220294185A1 VERTICAL CAVITY SURFACE EMITTING LASER DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
公开(公告)号：US20220294185A1
公开(公告)日：2022-09-15
申请号：US17689079
申请日：2022-03-08
申请人： TRIPLE WIN TECHNOLOGY(SHENZHEN) CO.LTD.
发明人： CHENG-DONG WANG
IPC分类号： H01S5/183 , H01S5/042
摘要： A vertical cavity surface emitting laser (VCSEL) device and a method for manufacturing the VCSEL device without wire bonding process for the topmost positive electrode are disclosed. The device includes epitaxial layer, ohmic contact layer, positive electrode, first insulating layer, conductive layer, and negative electrode. The epitaxial layer includes first and second opposing surfaces, and sidewalls connected to first and second surfaces. The ohmic contact layer is disposed on the first surface and the positive electrode connected thereto is disposed on the second surface. The first insulating layer is disposed on the second surface and extends to the ohmic contact layer along the sidewall. The conductive layer is disposed on the first insulating layer corresponding to the sidewall/sidewalls which carry power for the positive electrode.

38. 发明申请

US20220291341A1 OPTICAL DEVICE TESTING SYSTEM 有权
公开(公告)号：US20220291341A1
公开(公告)日：2022-09-15
申请号：US17303421
申请日：2021-05-28
申请人： Lumentum Operations LLC
发明人： Suning XIE , Abhinav ROHIT , Lucas MORALES , Mikhail DOLGANOV , Peter TRAN
IPC分类号： G01S7/484 , G01S17/894 , G01S7/486 , H01S5/183
摘要： A characterization circuit for an optical device includes: an optical device, a switch, a switch driver, one or more resistors, and one or more capacitors. The switch driver is configured to receive a trigger pulse from an external pulse generator and to provide the trigger pulse to the switch, which causes the switch to be in an on state. The one or more capacitors are configured to, when the switch is in an off state, receive a charge current (e.g., with a greater than 50 nanoseconds rise time) from an external driver voltage source via the one or more resistors; and, when the switch is in the on state, discharge a current pulse (e.g., with a less than 10 nanosecond pulse width) to the optical device. The optical device is configured to receive the current pulse and to emit, based on the current pulse, an optical output pulse.

39. 发明授权

US11419546B2 Wearable self-mixing interferometry device used to sense physiological conditions 有权
公开(公告)号：US11419546B2
公开(公告)日：2022-08-23
申请号：US16581695
申请日：2019-09-24
申请人： Apple Inc.
发明人： Ahmet Fatih Cihan , Adrian Z. Harb , Mehmet Mutlu , Mengshu Huang , Stephen E. Dey , Yuhao Pan
IPC分类号： A61B5/04 , A61B5/00 , G06F1/16 , A61B5/24 , H01S5/183
摘要： A wearable electronic device including a housing that is worn by a user and a SMI sensor contained within the housing. The SMI sensor may include an emitter that outputs coherent light toward the skin of a user when the housing is worn by the user. The SMI sensor may also include a detector that detects a portion of the coherent light reflected towards the sensor and generates electrical signals that indicate displacements of the skin based on the portion of coherent light received at the detector. The housing may include a transmitter that is operatively coupled with the SMI sensor and is configured to transmit physiological data to a receiving device based on electrical signals output from the SMI sensor.

40. 发明申请

US20220263291A1 VERTICAL-CAVITY SURFACE-EMITTING LASER 有权
公开(公告)号：US20220263291A1
公开(公告)日：2022-08-18
申请号：US17611548
申请日：2020-05-14
申请人： Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
发明人： Dieter BIMBERG , Gunter LARISCH
IPC分类号： H01S5/183 , H01S5/20
摘要： An exemplary embodiment of the present invention relates to a method of fabricating at least one radiation emitter comprising the steps of depositing an etch stop layer on a top side of a substrate; depositing a layer stack on the etch stop layer, said layer stack comprising a first contact layer, a first reflector, an active region, a second reflector, and a second contact layer; locally removing the layer stack and the etch stop layer, and thereby forming at least one mesa, said at least one mesa comprising an unremoved section of the etch stop layer and a layered pillar which forms a vertical cavity laser structure based on the unremoved layer stack inside the at least one mesa; depositing a protection material on the top side of the substrate and thereby embedding the entire mesa in the protection material wherein the backside of the substrate remains unprotected; removing the substrate by applying at least one etching chemical that is capable of etching the substrate but incapable or less capable of etching the etch stop layer and the protection material; and removing the etch stop layer and thereby exposing the first contact layer of the at least one layered pillar.

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