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41. 发明授权

US07885309B2 Laser system 有权
公开(公告)号：US07885309B2
公开(公告)日：2011-02-08
申请号：US11787180
申请日：2007-04-13
申请人： Alexander I. Ershov , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov , Robert A. Bergstedt , Richard L. Sandstrom , Ivan Lalovic
发明人： Alexander I. Ershov , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov , Robert A. Bergstedt , Richard L. Sandstrom , Ivan Lalovic
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/005 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/083 , H01S3/10092 , H01S3/2251 , H01S3/2258 , H01S3/2333 , H01S3/2383 , H01S2301/02
摘要： A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module within a first oscillator cavity; a laser amplification stage containing an amplifying gain medium in a second gas discharge excimer or molecular fluorine laser chamber receiving the output of the seed laser oscillator and amplifying the output of the seed laser oscillator to form a laser system output comprising a laser output light beam of pulses, which may comprise a ring power amplification stage.

42. 发明授权

US07804876B2 Optically pumped alkali laser and amplifier using helium-3 buffer gas 有权
标题翻译：光泵浦碱性激光和放大器采用氦-3缓冲气体
公开(公告)号：US07804876B2
公开(公告)日：2010-09-28
申请号：US12055408
申请日：2008-03-26
申请人： Raymond J. Beach , Ralph Page , Thomas Soules , Eddy Stappaerts , Sheldon Shao Quan Wu
发明人： Raymond J. Beach , Ralph Page , Thomas Soules , Eddy Stappaerts , Sheldon Shao Quan Wu
IPC分类号： H01S3/22
CPC分类号： H01S3/227 , H01S3/036 , H01S3/06741 , H01S3/094057 , H01S3/109 , H01S3/1106 , H01S3/1317
摘要： In one embodiment, a laser oscillator is provided comprising an optical cavity, the optical cavity including a gain medium including an alkali vapor and a buffer gas, the buffer gas including 3He gas, wherein if 4He gas is also present in the buffer gas, the ratio of the concentration of the 3He gas to the 4He gas is greater than 1.37×10−6. Additionally, an optical excitation source is provided. Furthermore, the laser oscillator is capable of outputting radiation at a first frequency. In another embodiment, an apparatus is provided comprising a gain medium including an alkali vapor and a buffer gas including 3He gas, wherein if 4He gas is also present in the buffer gas, the ratio of the concentration of the 3He gas to the 4He gas is greater than 1.37×10−6. Other embodiments are also disclosed.
摘要翻译：在一个实施例中，提供了包括光学腔的激光振荡器，所述光学腔包括包括碱性蒸汽和缓冲气体的增益介质，所述缓冲气体包括3He气体，其中如果4He气体也存在于缓冲气体中， 3He气体与4He气体的浓度比大于1.37×10-6。另外，提供光激励源。此外，激光振荡器能够以第一频率输出辐射。在另一个实施例中，提供了一种装置，其包括包括碱蒸气和包括3He气体的缓冲气体的增益介质，其中如果4He气体也存在于缓冲气体中，则3He气体与4He气体的浓度之比为大于1.37×10-6。还公开了其他实施例。

43. 发明申请

US20100232460A1 ELECTROMAGNETICALLY PUMPED ALKALI METAL VAPOR CELL SYSTEM 有权
标题翻译：电磁抽吸碱性金属蒸汽细胞系统
公开(公告)号：US20100232460A1
公开(公告)日：2010-09-16
申请号：US12404593
申请日：2009-03-16
申请人： John S. Canham
发明人： John S. Canham
IPC分类号： H01S3/10 , H01S3/22 , H01S3/00 , H01S3/04
CPC分类号： H01S3/227 , H01S3/0057 , H01S3/0384 , H01S3/0387 , H01S3/09702 , H01S3/0975 , H01S3/104 , H01S3/115 , H01S3/2308
摘要： An electromagnetic pumped alkali metal vapor cell system is provided. The system comprises a vapor cell and windings. The vapor cell contains alkali metal and a buffer. The windings are positioned around the vapor cell and are configured to create an electromagnet field in the vapor cell when an AC signal is applied to the windings. The electromagnetic field pumps unexcited alkali vapor into unionized D1 and D2 states.
摘要翻译：提供电磁抽吸碱金属蒸汽池系统。该系统包括蒸汽池和绕组。蒸汽池含有碱金属和缓冲液。绕组围绕蒸汽池定位，并且被构造成当AC信号施加到绕组时在蒸气室中产生电磁场。电磁场将未燃化的碱性蒸气泵入成团化的D1和D2状态。

44. 发明授权

US07751460B2 Solid state laser with beam path conditioning 有权
标题翻译：固态激光器具有光束路径调节
公开(公告)号：US07751460B2
公开(公告)日：2010-07-06
申请号：US11405281
申请日：2006-04-17
申请人： Jan Vetrovec , Charles C. Thompson , Tri H. Tran
发明人： Jan Vetrovec , Charles C. Thompson , Tri H. Tran
IPC分类号： H01S3/04 , H01S3/14 , H01S3/22
CPC分类号： H01S3/025 , H01S3/0404 , H01S3/08 , H01S3/0941
摘要： A solid state laser system having at least one gas injector is disclosed. The gas injector may be configured to so as cause gas flow in a path of the laser beam in order to mitigate distortion of the laser beam due to optical path difference. Each gas injector may be configured so as to cause gas flow proximate at least one optical surface of a solid state gain element of the laser beam system. In this manner gain uniformity may be enhanced so as to facilitate use of the laser system in a variety of military and commercial applications.
摘要翻译：公开了一种具有至少一个气体喷射器的固态激光系统。气体注射器可以被配置为使得气体在激光束的路径中流动，以便由于光程差而减轻激光束的失真。每个气体注射器可以被配置成使得靠近激光束系统的固态增益元件的至少一个光学表面的气体流动。以这种方式，可以增强增益均匀性，以便促进在各种军事和商业应用中使用激光系统。

45. 发明申请

US20100118901A1 HERMETICALLY-SEALED RF FEED-THROUGH WITH INTEGRATED CAPACITOR 有权
标题翻译：具有集成电容器的密封式RF进料
公开(公告)号：US20100118901A1
公开(公告)日：2010-05-13
申请号：US12481460
申请日：2009-06-09
申请人： Leon A. Newman , Vernon A. Seguin , Lanny Laughman , Adrian Papanide
发明人： Leon A. Newman , Vernon A. Seguin , Lanny Laughman , Adrian Papanide
IPC分类号： H01S3/04 , H01S3/00 , H01S3/22
CPC分类号： H01S3/0315 , H01S3/0385 , H01S3/041 , H01S3/2232
摘要： A carbon-dioxide (CO2) gas-discharge slab laser includes elongated discharge-electrodes in a sealed enclosure. Radio Frequency (RF) power is supplied to the electrodes via an impedance matching network and a co-axial electrical low inductance transmission line feed-through sealed to the enclosure. The feed-trough includes two spring contacts which are configured to be spring compression push-fit in grooves in edges of the discharge-electrodes. A central conductor of the feed-through is fluid cooled. A capacitor of the impedance matching network is assembled on the central conductor as an integral part of the feed-trough.
摘要翻译：二氧化碳（CO 2）气体放电板激光器在密封的外壳中包括细长的放电电极。射频（RF）功率经由阻抗匹配网络和同轴电气低电感传输线馈通密封到外壳提供给电极。馈电槽包括两个弹簧触头，其构造成在放电电极的边缘的凹槽中被压配合成弹簧压配合。馈通的中心导体是流体冷却的。阻抗匹配网络的电容器作为馈电槽的组成部分组装在中心导体上。

46. 发明授权

US07715459B2 Laser system 失效
标题翻译：激光系统
公开(公告)号：US07715459B2
公开(公告)日：2010-05-11
申请号：US11982152
申请日：2007-10-31
申请人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
发明人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
IPC分类号： H01S3/22
CPC分类号： H01S3/2308 , G03F7/70025 , G03F7/70041 , G03F7/7055 , G03F7/70575 , G03F7/70583 , H01S3/005 , H01S3/0057 , H01S3/08036 , H01S3/225 , H01S3/2325 , H01S3/2383
摘要： An apparatus/method which may comprise: a very high power line narrowed lithography laser light source which may comprise: a solid state seed laser system which may comprise: a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-seed laser output and providing an amplified seed laser pulse which may comprise: a pulse having a nominal wavelength outside of the DUV range; a frequency converter converting to essentially the wavelength of the amplifier gain medium; a first and a second gas discharge laser amplifier gain medium operating at different repetition rates from that of the seed laser output; a beam divider providing the amplifier gain mediums with output pulses from the seed laser; a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser system.
摘要翻译：可以包括：非常高的电力线狭窄的光刻激光光源，其可以包括：固态种子激光系统，其可以包括：提供种子间激光输出的种子间激光; 接收所述种子间激光输出并提供放大的种子激光脉冲的光纤放大器，其可以包括：具有在所述DUV范围之外的标称波长的脉冲; 变换器基本上转换为放大器增益介质的波长; 第一和第二气体放电激光放大器增益介质，与种子激光输出的重复频率不同; 一个分束器，为放大器增益介质提供来自种子激光器的输出脉冲; 组合各个放大器增益介质的输出的光束组合器，以提供具有固态种子激光器系统的脉冲重复率的激光输出光脉冲光束。

47. 发明申请

US20100103974A1 THERMAL DISTORTION COMPENSATION FOR LASER MIRRORS 有权
标题翻译：激光镜的热失真补偿
公开(公告)号：US20100103974A1
公开(公告)日：2010-04-29
申请号：US12651023
申请日：2009-12-31
申请人： Leon A. NEWMAN , Vernon A. Seguin , Lanny Laughman , Adrian Papanide
发明人： Leon A. NEWMAN , Vernon A. Seguin , Lanny Laughman , Adrian Papanide
IPC分类号： H01S3/22 , H01S3/08 , G02B7/182
CPC分类号： H01S3/0346 , G02B7/182 , H01S3/0401
摘要： A laser mirror assembly is disclosed with improved pointing stability. An elongated mirror includes a concave reflecting portion. A pair of elongated planar portions extend parallel to the concave reflecting portion on either side thereof. The planar portions are stepped down from the reflecting portion. The mirror is formed from copper. A pair of stainless steel strips are connected to planar portions. The bimetallic effect between the copper mirror and the stainless steel strips operates to counteract the warping of the mirror due to differential heating effects which arise during operation. In an alternate embodiment, a pair of aluminum strips are mounted on the rear surface of the mirror.
摘要翻译：公开了具有改进的指向稳定性的激光镜组件。细长的反射镜包括凹入的反射部分。一对细长的平面部分在其任一侧平行于凹面反射部分延伸。平面部分从反射部分下降。镜子由铜形成。一对不锈钢带连接到平面部分。铜镜和不锈钢带之间的双金属效应用于抵消由于在操作期间出现的不同的加热效应导致的镜的翘曲。在替代实施例中，一对铝条被安装在反射镜的后表面上。

48. 发明申请

US20100076418A1 OPHTHALMOLOGIC DEVICE FOR BREAKING DOWN EYE TISSUE 有权
标题翻译：用于打破眼部组织的眼科装置
公开(公告)号：US20100076418A1
公开(公告)日：2010-03-25
申请号：US12575336
申请日：2009-10-07
申请人： Christian Rathjen , Wolfgang Zesch , Karl Michael Deyerler , Holger Lubatschowski , Tammo Ripken
发明人： Christian Rathjen , Wolfgang Zesch , Karl Michael Deyerler , Holger Lubatschowski , Tammo Ripken
IPC分类号： A61F9/008 , A61B18/20 , H01S3/22
CPC分类号： A61F9/008 , A61F9/00804 , A61F9/00836 , A61F9/009 , A61F2009/00872 , A61F2009/00897
摘要： An opthalmological apparatus (1) comprises a base station (11) having a light source (51) for generating light pulses, and an application head (3) which can be mounted on an eye (2) having a light projector (58) for the focussed projection of the light pulses for punctiform breakdown of eye tissue (22). The application head (3) additionally has movement drivers (57) for moving the light projector (58) in a feed direction and in a first scanning direction. A scanner (52) is arranged in the base station (11) in order to deflect the light pulses in a second scanning direction. In addition, the opthalmological apparatus (1) comprises an optical transmission system for transmitting deflected light pulses from the base station (11) to the application head (3), and for superimposing the light pulses deflected in the second scanning direction onto the movement of the light projector (58) in the first scanning direction. It is possible to use light sources with high light pulse rates, for example femtosecond lasers, without the need for impractical enlargement of the overall size of the application head (3) owing to the scanner. In addition, it is possible while safeguarding a manageable overall size of the application head (3) to make use of light sources with high light pulse rates, something which increases the accuracy of treatment and reduces the burden on the eye (2).
摘要翻译：一种眼科装置（1）包括具有用于产生光脉冲的光源（51）的基站（11）和可安装在具有光投射器（58）的眼睛（2）上的应用头（3），用于光脉冲的聚焦投影用于眼组织的点状分裂（22）。应用头（3）还具有用于沿进给方向和第一扫描方向移动光投射器（58）的移动驱动器（57）。扫描器（52）布置在基站（11）中，以便沿第二扫描方向偏转光脉冲。另外，眼科装置（1）包括光传输系统，用于将偏转的光脉冲从基站（11）传送到应用头（3），并且将在第二扫描方向上偏转的光脉冲叠加到所述投光器（58）处于所述第一扫描方向。可以使用具有高光脉冲率的光源，例如飞秒激光器，而不需要由于扫描器而使应用头（3）的整体尺寸不切实际地扩大。另外，可以在保护应用头（3）的可管理的整体尺寸的同时，利用具有高光脉冲率的光源，这提高了治疗的准确性并减轻了眼睛的负担（2）。

49. 发明授权

US07653112B2 Line narrowing module 有权
标题翻译：线窄模块
公开(公告)号：US07653112B2
公开(公告)日：2010-01-26
申请号：US12074079
申请日：2008-02-28
申请人： Walter D. Gillespie , Brian Strate
发明人： Walter D. Gillespie , Brian Strate
IPC分类号： H01S3/22
CPC分类号： H01S3/1055 , G03F7/70025 , G03F7/70041 , H01S3/005 , H01S3/036 , H01S3/08 , H01S3/08004 , H01S3/08059 , H01S3/097 , H01S3/106 , H01S3/2251
摘要： A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic.
摘要翻译：一种用于窄带DUV大功率高重复率气体放电激光器的线窄化方法和模块，其产生具有标称光路的脉冲串中的输出激光束脉冲束脉冲，其可以包括：分散中心波长选择光学器件可移动地安装在线路窄化模块的光路内，为至少部分地由分散波长选择光学器件上包含相应脉冲的激光束的入射角确定的每个脉冲选择至少一个中心波长; 第一调谐机构部分地通过选择包含脉冲朝向分散中心的激光束的透射角度来选择包含分散中心波长选择光学器件上的各个脉冲的激光束的入射角波长选择光学元件。

50. 发明授权

US07643529B2 Laser system 有权
标题翻译：激光系统
公开(公告)号：US07643529B2
公开(公告)日：2010-01-05
申请号：US11982103
申请日：2007-10-31
申请人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
发明人： Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
IPC分类号： H01S3/22
CPC分类号： G03F7/70341 , G03F7/70025 , G03F7/70041 , G03F7/7055 , H01S3/005 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/083 , H01S3/10092 , H01S3/225 , H01S3/2251 , H01S3/2258 , H01S3/2333 , H01S3/2383 , H01S2301/02
摘要： An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the second seed laser.
摘要翻译：一种装置/方法可以包括线窄的脉冲光刻激光光源，其可以包括：提供激光系统的种子脉冲，其可以包括：以X kHz的速率产生种子脉冲的第一脉冲种子激光器; 第二脉冲种子激光器以XkHz的速率产生种子脉冲; 放大系统，其可以包括：第一放大器增益系统，其可以包括第一和第二脉冲气体放电放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第一种子激光; 第二放大器增益系统，其可以包括第一和第二脉冲放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第二种子激光器的输出脉冲上以1/2 X kHz工作。

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