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    • 53. 发明申请
    • ION GENERATION APPARATUS AND ELECTRIC EQUIPMENT INCLUDING THE SAME
    • 离子发生装置和包括其的电气设备
    • US20160104595A1
    • 2016-04-14
    • US14889263
    • 2014-02-27
    • SHARP KABUSHIKI KAISHA
    • Hiromu NISHIDAKoichi IZUNobuyuki OHEYoshinori SEKOGUCHI
    • H01J27/02H01J27/26
    • H01J27/022H01J27/26H01T19/04H01T23/00
    • A housing, a substrate accommodated in the housing, a needle electrode for generating ions through discharging, which is held by the substrate such that a tip end portion protrudes outside the housing, an insulating sealing portion insulating and sealing the substrate in the housing, and an electrode protection portion for protecting the needle electrode outside the housing are included. The housing is provided with an opening portion through which a side of the tip end portion of the needle electrode is inserted and which is sealed with the insulating sealing portion. The electrode protection portion has a first protection portion and a second protection portion which are provided to protrude from the housing relative to the tip end portion of the needle electrode and opposed to each other at a distance from each other on opposing sides of the needle electrode.
    • 壳体,容纳在壳体中的基板,用于通过排出产生离子的针状电极,其由基板保持,使得前端部突出到壳体外部;绝缘密封部,其将基板绝缘并密封在壳体中;以及 包括用于将针电极保护在壳体外部的电极保护部分。 壳体设置有开口部,针状电极的前端部的一侧插入该开口部,并且与绝缘密封部密封。 电极保护部具有第一保护部和第二保护部,该第一保护部和第二保护部设置成相对于针电极的前端部从壳体突出并且在针电极的相对侧彼此相对距离 。
    • 56. 发明授权
    • Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an object
    • 用于在存在于物体的平坦表面上的内壁和凹部上沉积保护涂层的手电筒系统
    • US09273393B2
    • 2016-03-01
    • US14164168
    • 2014-01-25
    • Yuri Glukhoy
    • Yuri Glukhoy
    • C23C16/00C23C16/453C23C16/04C23C16/32C23C16/40C23C16/507C23C16/513C23C16/52H01J27/02
    • C23C16/453C23C16/045C23C16/325C23C16/405C23C16/507C23C16/513C23C16/52H01J27/02
    • A torch system for deposition of protective coatings on the walls of holes and recesses on the surface of showerheads includes a capacitive coupling plasma processing apparatuses. The system comprises an atmospheric-pressure inductively coupled plasma reactor for the formation of a plasma torch, a showerhead holder for moving the showerhead relative to the tip of the torch during deposition of the protective coating, and a plasma torch focusing device for squeezing and focusing the tip of the torch to cross-sectional dimensions comparable with the diameters of the gas holes of the showerhead which may be as small as 0.5 mm. The focusing device is moveable relative to the plasma reactor and the treated object in the direction perpendicular to the surface of the object. The movements of the showerhead and of the focusing device relative to the treated surface are automatically adjusted through feedbacks for maintaining the torch tip at optimal parameters.
    • 用于在喷头表面上的孔和凹槽的壁上沉积保护涂层的手电筒系统包括电容耦合等离子体处理装置。 该系统包括用于形成等离子体焰炬的大气压感应耦合等离子体反应器,用于在保护涂层沉积期间相对于割炬尖端移动喷头的喷头保持器,以及用于挤压和聚焦的等离子体焰炬聚焦装置 手电筒的顶端的横截面尺寸可与喷头的气孔的直径相当,可以小至0.5mm。 聚焦装置可以相对于等离子体反应器和被处理物体在垂直于物体表面的方向上移动。 淋浴头和聚焦装置相对于处理过的表面的运动通过反馈自动调节,以将割炬尖保持在最佳参数。