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51. 发明申请

US20220337218A1 MICROELECTROMECHANICAL RESONATOR 有权
公开(公告)号：US20220337218A1
公开(公告)日：2022-10-20
申请号：US17847438
申请日：2022-06-23
申请人： SiTime Coporation
发明人： Joseph C. Doll , Nicholas Miller , Charles I. Grosjean , Paul M. Hagelin , Ginel C. Hill
IPC分类号： H03H9/125 , H03H3/007 , H03H9/02 , H03H9/10 , H03H9/24 , H03H9/17
摘要： A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.

52. 发明申请

US20220077841A1 PIEZOELECTRIC RESONATOR DEVICE 有权
公开(公告)号：US20220077841A1
公开(公告)日：2022-03-10
申请号：US17417778
申请日：2019-12-19
申请人： DAISHINKU CORPORATION
发明人： Satoru ISHINO , Hiroki YOSHIOKA , Hiroki FUJIWARA
IPC分类号： H03H9/10 , H03B5/32 , H03H9/19 , H03H9/125
摘要： In a piezoelectric resonator device according to one or more embodiments, an internal space for hermetically sealing a vibrating part including a first excitation electrode and a second excitation electrode of a crystal resonator plate is formed by bonding a first sealing member and a second sealing member respectively to the crystal resonator plate. A through hole is formed in the second sealing member. A through electrode is formed along an inner wall surface of the through hole to establish conduction between an electrode formed on a first main surface and an external electrode terminal formed on a second main surface. A corrosion resistance structure to solder is formed on the through electrode that establishes conduction between the electrode and the external electrode terminal with a conductive metal other than Au.

53. 发明授权

US11082024B1 Temperature stable mems resonator 有权
公开(公告)号：US11082024B1
公开(公告)日：2021-08-03
申请号：US16702765
申请日：2019-12-04
申请人： SiTime Coporation
发明人： Paul M. Hagelin , Charles I. Grosjean
IPC分类号： H03B5/30 , H03H3/007 , H03H9/15 , H03H9/02 , H03H9/21 , H01L41/22 , H03H9/24 , H03B5/32 , H02N1/00 , H01L41/253 , H03H9/125
摘要： A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

54. 发明授权

US10541662B2 Methods for fabricating acoustic structure with inclined c-axis piezoelectric bulk and crystalline seed layers 有权
公开(公告)号：US10541662B2
公开(公告)日：2020-01-21
申请号：US15293071
申请日：2016-10-13
申请人： Qorvo US, Inc.
发明人： Kevin McCarron , John Belsick
IPC分类号： H03H3/02 , H01L41/35 , H03H9/02 , H03H9/205 , H03H9/125 , H01J37/34 , C30B25/06 , C30B25/18 , C30B29/40 , H01J37/32
摘要： Systems and methods for growing hexagonal crystal structure piezoelectric material with a c-axis that is tilted (e.g., 25 to 50 degrees) relative to normal of a face of a substrate are provided. A deposition system includes a linear sputtering apparatus, a translatable multi-aperture collimator, and a translatable substrate table arranged to hold multiple substrates, with the substrate table and/or the collimator being electrically biased to a nonzero potential. An enclosure includes first and second deposition stations each including a linear sputtering apparatus, a collimator, and a deposition aperture.

55. 发明授权

US10355623B1 Generator employing piezolectric and resonating elements with synchronized heat delivery 有权
公开(公告)号：US10355623B1
公开(公告)日：2019-07-16
申请号：US15412680
申请日：2017-01-23
申请人： Dmitriy Yavid
发明人： Dmitriy Yavid
IPC分类号： H02N2/18 , H01L41/113 , H03H9/17 , H03H9/125
摘要： Disclosed are various embodiments of systems, devices and methods for generating electricity, transforming voltages and generating motion using one or more piezoelectric elements operably coupled to one or more non-piezoelectric resonating elements. In one embodiment, a non-piezoelectric resonating element is configured to oscillate and dissipate mechanical energy into a piezoelectric element, which converts a portion of such mechanical energy into electricity and therefore acts as a generator. In another embodiment, a piezoelectric element is configured to drive one or more mechanical elements operably coupled to the one or more non-piezoelectric resonating elements, and therefore acts as a motor. In still another embodiment, a piezoelectric element is operably coupled to a non-piezoelectric resonating element to form an electrical transformer. The mechanical properties of the non-piezoelectric resonating elements are typically selected to permit relatively high permissible stress and strain in comparison to the corresponding piezoelectric elements to which coupled or attached.

56. 发明授权

US10333053B2 Piezoelectric resonator device, and bonding structure of piezoelectric resonator device and circuit board 有权
公开(公告)号：US10333053B2
公开(公告)日：2019-06-25
申请号：US15109645
申请日：2014-12-22
申请人： Daishinku Corporation
发明人： Minoru Iizuka , Takuya Kojo
IPC分类号： H01L41/04 , H01L41/31 , H03H9/10 , H03H9/125 , H03H9/15 , H03H9/17 , H03H9/05
摘要： A crystal resonator includes: a crystal resonator plate; a first sealing member that covers a first excitation electrode of the crystal resonator plate; and a second sealing member that covers a second excitation electrode of the crystal resonator plate and includes a first external electrode terminal and a second external electrode terminal to be bonded to a circuit board using a flowable conductive bonding material. The second sealing member includes a second through hole and a third through hole that pass through between a first main surface and a second main surface on which the first external electrode terminal and the second external electrode terminal are formed. The second through hole and the third through hole include: respective through electrodes for conduction between electrodes formed on the first main surface and the second main surface; and respective through parts.

57. 发明申请

US20180077497A1 Cantilevered Shear Resonance Microphone 审中-公开
公开(公告)号：US20180077497A1
公开(公告)日：2018-03-15
申请号：US15263765
申请日：2016-09-13
申请人： Akustica, Inc. , Robert Bosch GmbH
发明人： Gokhan Hatipoglu
IPC分类号： H04R17/10 , H03H9/17 , H03H9/02 , H03H9/125 , H04R3/06
CPC分类号： H04R17/10 , B81B2201/0257 , H03H9/02244 , H03H9/125 , H03H9/17 , H03H2009/155 , H04R3/06 , H04R17/02 , H04R31/00 , H04R2201/003
摘要： A MEMS microphone includes a base structure and a piezoelectric resonator body having a first end and a second end. The first end is fixedly supported by the base structure and the second end is free such that the piezoelectric resonator is cantilevered from the base structure. The MEMS microphone further includes a first electrode operably connected to the piezoelectric resonator body and a second electrode operably connected to the piezoelectric resonator body. A controller includes at least one circuit operably connected to the first and second electrodes and configured to drive the piezoelectric resonator body at a shear resonance frequency of the piezoelectric resonator body and to detect a difference in the shear resonance frequency from a baseline resonance frequency resulting from a sound pressure.

58. 发明申请

US20160329877A1 PIEZOELECTRIC VIBRATOR AND PIEZOELECTRIC VIBRATION DEVICE 审中-公开
标题翻译：压电振动器和压电振动装置
公开(公告)号：US20160329877A1
公开(公告)日：2016-11-10
申请号：US15211055
申请日：2016-07-15
申请人： Murata Manufacturing Co., Ltd.
发明人： TOSHIO NISHIMURA , Keiichi Umeda , Ville Kaajakari
IPC分类号： H03H9/02 , H03H9/05 , H03H9/125
CPC分类号： H03H9/02244 , H03H9/0595 , H03H9/125 , H03H9/2489 , H03H2009/155
摘要： A piezoelectric vibrator that includes first and second vibration portions that vibrate with mutually reverse phases. Each of the vibration portions includes a silicon layer, a first piezoelectric layer and a second piezoelectric layer that has polarization in an opposite direction to a direction of polarization of the first piezoelectric layer. First and second electrodes are disposed on opposite sides of the second piezoelectric layer. The piezoelectric vibrator has a structure such that a first potential is applied to the first electrode of the first vibration portion and the second electrode of the second vibration portion, and a second potential is applied to the second electrode of the first vibration portion and the first electrode of the second vibration portion.
摘要翻译：一种压电振动器，包括相互相反的振动的第一振动部和第二振动部。每个振动部分包括具有与第一压电层的偏振方向相反的方向的极化的硅层，第一压电层和第二压电层。第一和第二电极设置在第二压电层的相对侧上。压电振子具有第一电位施加到第一振动部的第一电极和第二振动部的第二电极的结构，第二电位施加到第一振动部的第二电极，第一电位施加到第一振动部的第二电极电极。

59. 发明授权

US09350319B2 Self-powered sensing and transmitting device and method of fabricating the same 有权
标题翻译：自供电感测和发射装置及其制造方法
公开(公告)号：US09350319B2
公开(公告)日：2016-05-24
申请号：US14187359
申请日：2014-02-24
申请人： Siemens Energy, Inc.
发明人： David J. Mitchell , Anand A. Kulkarni
IPC分类号： H03H9/125 , H01L41/09 , H03H9/25 , G01M15/14 , F01D17/02 , F01D21/00 , G01K1/02 , H04Q9/00 , G01N29/24
CPC分类号： H03H9/25 , F01D17/02 , F01D21/003 , F05D2230/90 , G01K1/024 , G01M15/14 , G01N29/2462 , G01N2291/2693 , H04Q9/00
摘要： A self-powered sensing and transmitting circuit (50) including a power element (44) and a sensing element (46) that is powered by the power element for generating a sensor signal responsive to a local operating environment The circuit also includes a transmitting element (48) powered by the power element for transmitting an output signal responsive to the sensor signal to a receiving location (33, 55) remote from the circuit The power element, sensing element and transmitting element of the circuit are arranged in a generally planar and non-integrated circuit configuration formed on a substrate (57) component exposed to operating temperatures at or exceeding 650° C.
摘要翻译：一种自供电感测和发射电路（50），包括功率元件（44）和感测元件（46），该功率元件（44）由功率元件供电，用于响应于本地操作环境产生传感器信号。该电路还包括发射元件（48）由功率元件供电，用于将响应于传感器信号的输出信号发送到远离电路的接收位置（33,55）。电路的功率元件，感测元件和传输元件被布置在大致平面和形成在暴露于或超过650℃的工作温度的基板（57）部件上的非集成电路配置

60. 发明授权

US09257959B2 Resonator element, resonator, oscillator, electronic apparatus, sensor, and moving object 有权
标题翻译：谐振器元件，谐振器，振荡器，电子设备，传感器和移动物体
公开(公告)号：US09257959B2
公开(公告)日：2016-02-09
申请号：US14220656
申请日：2014-03-20
申请人： SEIKO EPSON CORPORATION
发明人： Akinori Yamada
IPC分类号： H03B5/32 , H03H9/215 , H03H9/125 , H03H9/05 , H03H9/10
CPC分类号： H03H9/125 , H03B5/32 , H03H9/0547 , H03H9/1021 , H03H9/215
摘要： A resonator element includes a quartz crystal substrate having a base, a pair of vibration arms extending from the base, and a support arm located between the vibration arms and extending from the base in the direction in which the vibration arms extend. Each of the vibration arms has an arm portion and a hammer head provided at the front end of the arm portion. The arm portion has a pair of principal surfaces and a groove that has a bottom and opens through each of the principal surfaces. In the invention, the width of each of bank-shaped portions of each of the principal surfaces that are disposed side by side on opposite sides of the groove along the width direction of the vibration arm perpendicular to the longitudinal direction thereof is set at 6 μm or smaller.
摘要翻译：谐振器元件包括具有基座的石英晶体基板，从基座延伸的一对振动臂，以及位于振动臂之间并沿着振动臂延伸的方向从基座延伸的支撑臂。每个振动臂具有臂部和设置在臂部的前端的锤头。臂部分具有一对主表面和一个具有底部并通过每个主表面开口的凹槽。在本发明中，沿着垂直于其纵向的振动臂的宽度方向并排设置在槽的相对侧上的每个主表面的每个堤形部分的宽度被设定为6μm 或更小。

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