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1. 发明公开

US20230283257A1 RESONATOR AND RESONANCE DEVICE 审中-公开
公开(公告)号：US20230283257A1
公开(公告)日：2023-09-07
申请号：US18315665
申请日：2023-05-11
申请人： Murata Manufacturing Co., Ltd.
发明人： Ryota KAWAI , Masakazu FUKUMITSU , Yoshiyuki HIGUCHI
IPC分类号： H03H9/05 , H03H9/10 , H03H9/24
CPC分类号： H03H9/0595 , H03H9/1057 , H03H9/2489
摘要： A resonator is provided that includes a vibrating portion including three or more vibrating arms with at least two vibrating arms that bend out of plane with different phases and a base. The resonator also includes a frame that holds the vibrating portion; and a support arm having one end connected to the frame and the other end connected to a rear end portion of the base. The other end of the support arm is connected to a position in a range from −0.1 WB to 0.1 WB, with respect to a base width WB of the base, relative to a position, on the rear end portion of the base where a center line passes in a plan view. A support arm length of the support arm is 0.2 or more times and 0.4 or less times a vibrating arm length of the vibrating arms.

2. 发明申请

US20160363609A1 METHOD OF FORMING CAPACITIVE MEMS SENSOR DEVICES 审中-公开
标题翻译：形成电容式MEMS传感器器件的方法
公开(公告)号：US20160363609A1
公开(公告)日：2016-12-15
申请号：US15148086
申请日：2016-05-06
申请人： Texas Instruments Incorporated
发明人： IRA OAKTREE WYGANT , PETER B. JOHNSON
IPC分类号： G01P15/125 , B81C1/00 , B81B7/00 , H03H3/007 , H03H9/24
CPC分类号： G01P15/125 , B81B7/007 , B81B2201/0271 , B81B2203/0127 , B81B2207/096 , B81C1/00301 , B81C2201/013 , B81C2203/0109 , B81C2203/0118 , B81C2203/036 , H02N1/006 , H03H3/0072 , H03H9/1057 , H03H9/2468 , H03H9/2489 , H04R19/005 , Y10T29/49165
摘要： A method of forming a capacitive micro-electro-mechanical system (MEMS) sensor device includes at least one capacitive MEMS sensor element with at least one capacitive MEMS sensor cell. A patterned dielectric layer including a thick dielectric region and a thin dielectric region is formed on a top side of a first substrate. A second substrate is bonded to the thick dielectric region to provide at least one sealed micro-electro-mechanical system (MEMS) cavity. The second substrate is thinned to reduce a thickness of said second substrate to provide a membrane layer. Vias are etched through the membrane layer and said thick dielectric region extending into the first substrate to form embedded vias. A dielectric liner which lines the embedded vias is formed within the first substrate. The embedded vias are filed with electrically conductive TSV filler material to form a plurality of through-substrate vias (TSVs), said plurality of TSVs extending to at least a top of said membrane layer. A patterned metal cap layer including metal caps is formed on top of said plurality of TSVs. Trenches are etched through regions of the membrane layer for releasing a first portion of the membrane layer over said MEMS cavity to provide a MEMS electrode and to define a fixed electrode. A third substrate including an inner cavity and outer protruding portions framing said inner cavity is bonded to the thick dielectric. The protruding portions are bonded to the thick dielectric region and, together with said first substrate vacuum, seals said MEMS electrode. The plurality of TSVs on a bottom side of said first substrate are exposed.
摘要翻译：形成电容式微机电系统（MEMS）传感器装置的方法包括具有至少一个电容式MEMS传感器单元的至少一个电容式MEMS传感器元件。包括厚电介质区域和薄介电区域的图案化电介质层形成在第一衬底的顶侧上。第二衬底被结合到厚电介质区域以提供至少一个密封的微机电系统（MEMS）空腔。第二衬底被薄化以减小所述第二衬底的厚度以提供膜层。通过膜层蚀刻通孔，并且延伸到第一衬底中的所述厚电介质区域形成嵌入的通孔。在第一基板内形成有嵌入通孔的电介质衬垫。嵌入的通孔与导电TSV填充材料一起放置以形成多个穿通基板通孔（TSV），所述多个TSV延伸到所述膜层的至少顶部。在所述多个TSV的顶部上形成包括金属盖的图案化金属盖层。通过膜层的区域蚀刻沟槽，以在所述MEMS空腔上释放膜层的第一部分，以提供MEMS电极并限定固定电极。包括内腔的第三基板和框架所述内腔的外突出部分结合到厚电介质。突出部分结合到厚电介质区域，并与所述第一衬底真空一起密封所述MEMS电极。在所述第一基板的底侧上的多个TSV暴露。

3. 发明授权

US09470710B2 Capacitive MEMS sensor devices 有权
标题翻译：电容式MEMS传感器装置
公开(公告)号：US09470710B2
公开(公告)日：2016-10-18
申请号：US13779160
申请日：2013-02-27
申请人： Texas Instruments Incorporated
发明人： Ira Oaktree Wygant , Peter B. Johnson
IPC分类号： G01P15/125 , H02N1/00 , H04R19/00 , B81B7/00 , H03H3/007 , H03H9/24 , H03H9/10
CPC分类号： G01P15/125 , B81B7/007 , B81B2201/0271 , B81B2203/0127 , B81B2207/096 , B81C1/00301 , B81C2201/013 , B81C2203/0109 , B81C2203/0118 , B81C2203/036 , H02N1/006 , H03H3/0072 , H03H9/1057 , H03H9/2468 , H03H9/2489 , H04R19/005 , Y10T29/49165
摘要： A packaged capacitive MEMS sensor device includes at least one capacitive MEMS sensor element with at least one capacitive MEMS sensor cell including a first substrate having a thick and a thin dielectric region. A second substrate with a membrane layer is bonded to the thick dielectric region and over the thin dielectric region to provide a MEMS cavity. The membrane layer provides a fixed electrode and a released MEMS electrode over the MEMS cavity. A first through-substrate via (TSV) extends through a top side of the MEMS electrode and a second TSV through a top side of the fixed electrode. A metal cap is on top of the first TSV and second TSV. A third substrate including an inner cavity and outer protruding portions framing the inner cavity is bonded to the thick dielectric regions. The third substrate together with the first substrate seals the MEMS electrode.
摘要翻译：封装的电容MEMS传感器装置包括至少一个电容式MEMS传感器元件，其具有至少一个电容式MEMS传感器单元，该电容式MEMS传感器单元包括具有厚和薄电介质区域的第一基板具有膜层的第二衬底被结合到厚电介质区域和薄介电区域上以提供MEMS空腔。膜层在MEMS腔体上提供固定电极和释放的MEMS电极。第一穿通基板通孔（TSV）延伸穿过MEMS电极的顶侧，通过固定电极的顶侧延伸穿过第二TSV。金属帽位于第一TSV和第二TSV的顶部。包括内腔和构成内腔的外突出部分的第三基板被接合到厚电介质区域。第三衬底与第一衬底一起密封MEMS电极。

4. 发明申请

US20140070901A1 RESONATOR ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE OBJECT 有权
标题翻译：谐振器元件，谐振器，振荡器，电子设备和移动对象
公开(公告)号：US20140070901A1
公开(公告)日：2014-03-13
申请号：US14022921
申请日：2013-09-10
申请人： SEIKO EPSON CORPORATION
发明人： Akinori YAMADA , Masaru MIKAMI
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03H9/2489
摘要： A resonator element includes a base section, a pair of vibrating arms projecting toward the same side from the base section, and disposed side by side in a predetermined direction, a support arm projecting from the base section toward the same side as the pair of vibrating arms, disposed between the pair of vibrating arms, and having a recessed portion disposed on one principal surface, and a first electrically-conductive pad and a second electrically-conductive pad disposed side by side across the recessed portion.
摘要翻译：谐振器元件包括基部，从基部朝向同一侧突出的一对振动臂，并且沿预定方向并排布置;支撑臂，从基部突出到与该一对振动相同的一侧臂，设置在一对振动臂之间，并且具有设置在一个主表面上的凹部，以及并排设置在该凹部上的第一导电垫和第二导电垫。

5. 发明授权

US07876177B2 Resonator having an output electrode underneath first and second electrode arms 有权
标题翻译：谐振器具有位于第一和第二电极臂下方的输出电极
公开(公告)号：US07876177B2
公开(公告)日：2011-01-25
申请号：US12344349
申请日：2008-12-26
申请人： Wei Nl
发明人： Wei Nl
IPC分类号： H03H9/125 , H03H9/24
CPC分类号： H03H9/2489 , H03H3/0072 , H03H9/02259
摘要： A resonator that can alleviate restrictions in usage and design due to the bias voltage dependency and for which usage and design conditions can be easily determined, includes a movable electrode opposite and sandwiching the fixed electrode, and an extension of the fixed electrode or the movable electrode that extends along a plane crossing the opposite surfaces of the fixed electrode and the movable electrode. With being displaced vertically relative to the fixed electrode, the movable electrode is vibrated.
摘要翻译：可以容易地确定能够减轻由于偏置电压依赖性而导致的使用和设计限制的谐振器，并且可以容易地确定使用和设计条件的谐振器，其包括与固定电极相对并夹持的可动电极，以及固定电极或可动电极的延伸部其沿着与固定电极和可动电极的相对表面交叉的平面延伸。随着相对于固定电极垂直移动，可动电极振动。

6. 发明公开

US20240128948A1 RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME 审中-公开
公开(公告)号：US20240128948A1
公开(公告)日：2024-04-18
申请号：US18398422
申请日：2023-12-28
申请人： Murata Manufacturing Co., Ltd.
发明人： Masakazu FUKUMITSU , Yoshiyuki HIGUCHI , Takehiko KISHI
IPC分类号： H03H9/10 , H03H3/007 , H03H9/24
CPC分类号： H03H9/1057 , H03H3/0072 , H03H9/2489
摘要： A resonance device that includes: a first substrate having a first silicon substrate and a resonator, wherein the resonator includes a single-crystal silicon film and a first silicon oxide film interposed between the single-crystal silicon film and the first silicon substrate, and a through hole that passes through the single-crystal silicon film and the first silicon oxide film; a second substrate opposite the first substrate; a frame shaped bonding portion that bonds the first substrate to the second substrate to seal a vibration space of the resonator; and a first blocking member disposed in an interior of the through hole and surrounding a vibration portion of the resonator in a plan view of the first substrate so as to divide the first silicon oxide film, wherein the first blocking member has a lower helium permeability than the first silicon oxide film.

7. 发明申请

US20180034441A1 RESONATOR AND RESONANCE DEVICE 审中-公开
公开(公告)号：US20180034441A1
公开(公告)日：2018-02-01
申请号：US15725469
申请日：2017-10-05
申请人： Murata Manufacturing Co., Ltd.
发明人： Wakana Hirota , Ville Kaajakari
IPC分类号： H03H9/05 , H03H9/10 , H03H9/21
CPC分类号： H03H9/0595 , H03H9/10 , H03H9/1057 , H03H9/21 , H03H9/2489
摘要： A resonator is provided that suppresses a shift in resonant frequency. The resonator includes a vibration member including vibration arms extending therefrom with two or more of the vibration arms performing out-of-plane bend with different phases. Moreover, the resonator includes a base having a front end connected to the vibration arms and a rear end opposing the front end and structured to bend in a direction of the out-of-plane bend when the vibration arms perform the out-of-plane bend. Moreover, a frame surrounds a periphery of the vibration member and one or more holding arms are positioned between the vibration member and the frame. One end of each holding arm is connected to the base and the other end of the holding arm is connected to the frame. The holding arms bend in the direction of the out-of-plane bend when the base bends.

8. 发明授权

US09553561B2 Vibrating device and manufacturing method therfor 有权
标题翻译：振动装置及其制造方法
公开(公告)号：US09553561B2
公开(公告)日：2017-01-24
申请号：US14643286
申请日：2015-03-10
申请人： Murata Manufacturing Co., Ltd.
发明人： Keiichi Umeda , Takehiko Kishi , Toshio Nishimura , Takashi Hase
IPC分类号： H03H9/21 , H03H3/007 , H03H9/02 , H03H9/24 , H01L41/29 , H01L41/31
CPC分类号： H03H9/21 , H01L41/29 , H01L41/31 , H03H3/0072 , H03H9/02448 , H03H9/2489 , Y10T29/42
摘要： A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.
摘要翻译：具有连接到支撑件的振动臂的振动装置。振动臂具有作为退化半导体的n型Si层和设置在n型Si层上的激励器。励磁机具有压电薄膜和插入压电薄膜的第一和第二电极。

9. 发明申请

US20140368088A1 PIEZOELECTRIC DEVICE AND ELECTRONIC APPARATUS 有权
标题翻译：压电器件和电子设备
公开(公告)号：US20140368088A1
公开(公告)日：2014-12-18
申请号：US14293630
申请日：2014-06-02
申请人： Sony Corporation
发明人： Kazuo TAKAHASHI , Satoshi MITANI , Hidetoshi KABASAWA
IPC分类号： H03H9/21
CPC分类号： H03H9/21 , G01C19/5607 , H03H9/02259 , H03H9/2484 , H03H9/2489
摘要： A piezoelectric device includes a vibrator, a piezoelectric drive unit, and a first piezoelectric detector. The vibrator includes a first surface, a first groove formed along a first axis direction, and a second groove formed to be parallel to the first groove. The piezoelectric drive unit includes a first electrode pair provided in the first groove and opposed to each other in a second axis direction orthogonal to the first axis direction and parallel to the first surface, and a first piezoelectric body provided between the first electrode pair, and is capable of vibrating the vibrator. The first piezoelectric detector includes a second electrode pair provided in the second groove and opposed to each other in the second axis direction, and a second piezoelectric body provided between the second electrode pair, and is capable of detecting a vibration of the vibrator.
摘要翻译：压电装置包括振动器，压电驱动单元和第一压电检测器。振动器包括第一表面，沿着第一轴线方向形成的第一凹槽和形成为平行于第一凹槽的第二凹槽。所述压电驱动单元包括：第一电极对，设置在所述第一槽中，并且在与所述第一轴方向正交且与所述第一表面平行的第二轴方向上彼此相对;以及第一压电体，设置在所述第一电极对之间，能振动振动器。第一压电检测器包括设置在第二槽中并在第二轴向彼此相对的第二电极对，以及设置在第二电极对之间并且能够检测振动器的振动的第二压电体。

10. 发明授权

US08294534B2 Resonator 有权
标题翻译：谐振器
公开(公告)号：US08294534B2
公开(公告)日：2012-10-23
申请号：US12888185
申请日：2010-09-22
申请人： Casper van der Avoort , Jozef Thomas Martinus Van Beek , Johannes van Wingerden , Joep Bontemps , Robert James Pascoe Lander
发明人： Casper van der Avoort , Jozef Thomas Martinus Van Beek , Johannes van Wingerden , Joep Bontemps , Robert James Pascoe Lander
IPC分类号： H03H9/02 , H01L21/00
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/2447 , H03H9/2473 , H03H9/2489
摘要： A resonator comprising a beam formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, wherein the ratio of the cross sectional area of the first material to the cross sectional area of the second material varies along the length of the beam, the cross sectional areas being measured substantially perpendicularly to the beam.
摘要翻译：一种谐振器，包括由具有第一杨氏模量和第一杨氏模量的第一温度系数的第一材料形成的梁，以及具有第二杨氏模量和第二杨氏模量的第二温度系数的第二材料，所述第二温度系数至少在所述谐振器的操作条件下与所述第一温度系数的符号相反，其中所述第一材料的横截面积与所述第二材料的横截面面积的比率沿着所述梁的长度变化横截面面积基本上垂直于梁测量。

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