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    • 63. 发明授权
    • Method of manufacturing a magnetic head with common seed layer for coil and pedestal
    • 制造具有用于线圈和基座的普通种子层的磁头的方法
    • US07228619B2
    • 2007-06-12
    • US10976370
    • 2004-10-29
    • Quang Le
    • Quang Le
    • G11B5/17G11B5/187
    • G11B5/3163G11B5/1278G11B5/133G11B5/17G11B5/1871Y10T29/49041Y10T29/49043Y10T29/4906Y10T29/49064
    • A method for fabricating a coil and pedestal for a write head using a common seed layer is described. A nonmetallic gap layer is deposited on a planarized pole piece surface. Openings for the pole piece pedestal and the back gap pole piece are etched through the nonmetallic gap layer. A seed layer comprising a magnetic material is deposited on the etched gap layer. Preferably the coil is fabricated first on the planar surface of the seed layer. The coil structure, the pedestal pole piece, back-gap pole piece, side and center tap connections are fabricated on the same seed layer. The remaining seed layer is removed, the coil is encapsulated, the wafer is refilled with alumina and the wafer is planarized. The prior art process can be resumed at this point. Optionally a second seed layer such as copper (Cu) can be used.
    • 描述了使用公共种子层制造用于写入头的线圈和基座的方法。 非金属间隙层沉积在平坦化的极片表面上。 通过非金属间隙层蚀刻极片基座和后间隙极片的开口。 包含磁性材料的种子层沉积在蚀刻间隙层上。 优选地,首先在种子层的平坦表面上制造线圈。 线圈结构,基座极片,后隙极片,侧面和中心抽头连接在相同的种子层上制造。 剩下的种子层被去除,线圈被封装,晶片用氧化铝再填充并且晶片被平坦化。 此时可以恢复现有技术的处理。 可选地,可以使用第二晶种层,例如铜(Cu)。
    • 64. 发明授权
    • Thin-film magnetic head, a head gimbal assembly, and a hard disk drive
    • 薄膜磁头,磁头万向节组件和硬盘驱动器
    • US07119987B2
    • 2006-10-10
    • US10671440
    • 2003-09-29
    • Yoshitaka SasakiTakehiro Kamigama
    • Yoshitaka SasakiTakehiro Kamigama
    • G11B5/17
    • B82Y25/00B82Y10/00G11B5/17G11B5/313G11B5/3909G11B5/3967G11B2005/3996H01F10/3254H01F17/0006H01F41/042H01F41/046H01L27/08
    • A thin-film magnetic head comprises first and second magnetic pole groups, magnetically connected to each other, having respective magnetic pole parts opposing each other on a side of a medium-opposing surface; a recording gap layer formed between the magnetic pole parts; and a thin-film coil insulated from the first and second magnetic pole groups and helically wound about at least one of them; which are laminated on a substrate. The thin-film coil comprises a first conductor group having a plurality of inner conductor parts disposed between the first and second magnetic pole groups, a second conductor group having a plurality of outer conductor parts disposed outside the second magnetic pole group, and a connecting part group having a plurality of connecting parts for connecting the inner conductor parts to the outer conductor parts. Each of the first and second conductor groups includes an insulating contact structure for making the inner or outer conductor parts in contact with each other by way of an insulating film.
    • 薄膜磁头包括彼此磁连接的第一和第二磁极组,它们在介质相对表面的一侧具有彼此相对的各自的磁极部分; 形成在所述磁极部之间的记录间隙层; 以及与所述第一和第二磁极组绝缘并围绕其中的至少一个螺旋缠绕的薄膜线圈; 其层压在基板上。 薄膜线圈包括具有设置在第一和第二磁极组之间的多个内部导体部分的第一导体组,具有设置在第二磁极组外部的多个外部导体部分的第二导体组和连接部分 组具有用于将内导体部分连接到外导体部分的多个连接部分。 第一和第二导体组中的每一个包括用于通过绝缘膜使内部或外部导体部分彼此接触的绝缘接触结构。
    • 68. 发明授权
    • Magnetic head having a write coil structure with a reduced electrical resistance for reducing thermal protrusion
    • 磁头具有具有降低的电阻降低热突起的写入线圈结构
    • US07079353B2
    • 2006-07-18
    • US10629060
    • 2003-07-29
    • Wen-chien David HsiaoEdward Hin Pong LeeVladimir NikitinSamuel Weisan Yuan
    • Wen-chien David HsiaoEdward Hin Pong LeeVladimir NikitinSamuel Weisan Yuan
    • G11B5/17
    • G11B5/3136G11B5/012G11B5/17G11B5/3116G11B5/313G11B5/40
    • Magnetic heads having write coil structures with reduced electrical resistances for reducing thermal protrusion are disclosed. In one illustrative example, a magnetic head includes a magnetic yoke; a write gap layer formed between upper and lower poles of the magnetic yoke; and a write coil having a plurality of coil layers. Each coil layer of the write coil extends continuously between the upper and the lower poles through a plane defined by the write gap layer. Preferably, the write coil is formed using a damascene process, such that each coil layer is wider than each coil separating layer. Such a structure provides for a relatively large amount of coil materials to be used, which reduces the coil's electrical resistance. This, in turn, reduces the heat generated by the write coils during operation. Further, either one or both of the lower and upper poles may include a horizontally laminated structure of alternating magnetic and non-magnetic dielectric layers to further reduce heating caused by eddy current losses. Since thermal protrusion is reduced, the fly height of magnetic head may be made relatively small with a reduced risk of head-to-disk crashes and disk scratches.
    • 公开了具有降低的电阻以减少热突起的具有写入线圈结构的磁头。 在一个说明性示例中,磁头包括磁轭; 形成在磁轭的上下极之间的写间隙层; 以及具有多个线圈层的写入线圈。 写入线圈的每个线圈层通过由写入间隙层限定的平面在上极和下极之间连续延伸。 优选地,使用镶嵌工艺形成写入线圈,使得每个线圈层比每个线圈分离层宽。 这种结构提供了相对大量的待使用的线圈材料,这降低了线圈的电阻。 这又减少了在操作期间由写入线圈产生的热量。 此外,下极和上极中的一个或两个可以包括交替的磁和非磁性介电层的水平层叠结构,以进一步减少由涡流损耗引起的加热。 由于热突起减少,所以磁头的飞行高度可以相对较小,同时降低了磁头与磁盘的碰撞和磁盘划痕的风险。