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61. 发明授权

US07496126B2 Gas laser oscillator and method of measuring laser gas replacement amount 有权
标题翻译：气体激光振荡器及测量激光气体更换量的方法
公开(公告)号：US07496126B2
公开(公告)日：2009-02-24
申请号：US11700768
申请日：2007-02-01
申请人： Yoshitaka Kubo , Toshiyasu Shiomi , Akira Egawa , Kazuhiro Suzuki
发明人： Yoshitaka Kubo , Toshiyasu Shiomi , Akira Egawa , Kazuhiro Suzuki
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/10069 , H01S3/104
摘要： A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.
摘要翻译：气体激光振荡器包括用于调节对气室的激光气体供应的供给侧阀，用于调节来自气室的激光气体排出的排气侧阀，用于测量气室中的压力的气体压力测量装置以及用作激光气体置换测量装置的控制装置。控制装置在气室的抽真空或吹扫期间，以预定的时间间隔，通过气体压力测量装置对气室中的压力进行第一次测量和第二次测量，并且确定每单位时间内的激光气体替换量激光振荡操作，基于第一和第二测量的结果。

62. 发明申请

US20080291962A1 BANDWIDTH-LIMITED AND LONG PULSE MASTER OSCILLATOR POWER OSCILLATOR LASER SYSTEMS 有权
标题翻译： BANDWIDTH有限公司和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US20080291962A1
公开(公告)日：2008-11-27
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

63. 发明申请

US20080219317A1 GAS-PURGED LASER SYSTEM AND METHOD THEREOF 审中-公开
标题翻译：气体激光系统及其方法
公开(公告)号：US20080219317A1
公开(公告)日：2008-09-11
申请号：US12041986
申请日：2008-03-04
申请人： George H. Pettit , George Richard Downes , Steven E. Bott
发明人： George H. Pettit , George Richard Downes , Steven E. Bott
IPC分类号： H01S3/22
CPC分类号： H01S3/02 , A61F9/008 , A61F9/00804 , H01S3/027 , H01S3/225
摘要： A gas-purged laser system and method of gas-purging a laser system are disclosed. One embodiment of the laser system comprises an excimer refractive surgical laser system having a laser beam optical path configured to allow purging of a portion of a volume enclosing the laser beam optical path with a gas, and a gas generator, operable to generate the purging gas and provide the gas to the volume portion. The portion of the volume can be the entire volume enclosing the laser beam optical path or a selected portion thereof. The gas can be nitrogen gas and the gas generator can be a self-contained nitrogen generator as will be known to those having skill in the art. Embodiments can further comprise a controller for controlling the flow of purging gas in response to received signals representative of various parameters, such as temperature, oxygen level, pressure, humidity and flow rate.
摘要翻译：公开了一种气体净化激光系统和气体吹扫激光系统的方法。激光系统的一个实施例包括准分子折射外科激光系统，其具有被配置为允许用气体吹扫包围激光束光路的体积的一部分的激光束光学路径，以及气体发生器，其可操作以产生吹扫气体并将气体提供到体积部分。体积的一部分可以是包围激光束光路的整个体积或其选定部分。气体可以是氮气，并且如本领域技术人员将知道的，气体发生器可以是独立的氮气发生器。实施例还可以包括控制器，用于响应于表示各种参数（例如温度，氧气水平，压力，湿度和流量）的接收信号来控制净化气体的流动。

64. 发明申请

US20080205472A1 Laser gas injection system 有权
标题翻译：激光喷射系统
公开(公告)号：US20080205472A1
公开(公告)日：2008-08-28
申请号：US11796065
申请日：2007-04-25
申请人： Wayne J. Dunstan , Kevin M. O'Brien , Robert N. Jacques , Herve A. Besaucele , Daniel J. Riggs , Aravind Ratnam
发明人： Wayne J. Dunstan , Kevin M. O'Brien , Robert N. Jacques , Herve A. Besaucele , Daniel J. Riggs , Aravind Ratnam
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , G03F7/70025 , G03F7/70525 , G03F7/70975 , H01S3/0014 , H01S3/1305 , H01S3/1306 , H01S3/134 , H01S3/2251 , H01S3/2256
摘要： A method and apparatus are disclosed which may comprise predicting the gas lifetime for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas may comprise: utilizing at least one of a plurality of laser operating input and/or output parameters; utilizing a set of at least one parameter of utilization in the photolithography process to determine a gas use model in relation to the respective input or output parameter; predicting the end of gas life based upon the model and a measurement of the respective input or output parameter. The parameter may comprise a pulse utilization pattern. The method and apparatus may comprise performing gas management for a gas discharge laser light source for a photolithography process, the light source comprising a halogen containing lasing gas comprising: utilizing periodic and frequent partial gas refills comprising an inject comprising a mixture of halogen gas and bulk gas in generally the same ration as the premix ratio provided to the laser in a full gas refill, and in an amount less than two percent of the total gas pressure prior to the injection.
摘要翻译：公开了一种方法和装置，其可以包括预测用于光刻工艺的气体放电激光光源的气体寿命，包括含卤素的激光气体的光源可以包括：利用多个激光操作输入和/ 或输出参数; 在光刻工艺中利用一组至少一个利用参数来确定相对于相应输入或输出参数的气体使用模型; 基于模型和相应的输入或输出参数的测量来预测气体寿命的结束。该参数可以包括脉冲利用模式。该方法和装置可以包括对用于光刻工艺的气体放电激光光源执行气体管理，该光源包括含卤素的激光气体，其包括：利用周期性和频繁的部分气体再填充，其包括含有卤素气体和体积的混合物气体通常与在全气体再填充中提供给激光器的预混合比率相同，并且其量小于喷射前的总气体压力的2％。

65. 发明授权

US07415056B2 Confocal pulse stretcher 有权
标题翻译：共焦脉冲担架
公开(公告)号：US07415056B2
公开(公告)日：2008-08-19
申请号：US11394512
申请日：2006-03-31
申请人： Palash P. Das , Thomas Hofmann , Gang Lei
发明人： Palash P. Das , Thomas Hofmann , Gang Lei
IPC分类号： H01S3/22
CPC分类号： H01S3/0057 , G03F7/7055 , H01S3/225
摘要： A gas discharge laser system producing a laser output pulse and a method of operating such a system is disclosed which may comprise a pulse stretcher which may comprise a laser output pulse optical delay initiating optic directing a portion of the laser output pulse along a laser system output pulse optical axis and diverting a portion of the output pulse into an optical delay having an optical delay path and which may comprise a plurality of confocal resonators in series aligned to deliver an output of the optical delay to the laser output pulse optical delay initiating optic; an optical axis alignment mechanism comprising an radial mirror positioning mechanism operable to position the output of the optical delay to the align with the portion of the laser output pulse transmitted along the optical axis of the portion of the laser system output pulse transmitted by the laser output pulse optical delay initiating optic.
摘要翻译：公开了一种产生激光输出脉冲的气体放电激光器系统和一种操作这种系统的方法，其可以包括脉冲展宽器，其可以包括激光输出脉冲光学延迟启动光学器件，以将激光输出脉冲的一部分沿着激光系统输出脉冲光轴并将输出脉冲的一部分转换成具有光学延迟路径的光学延迟，并且可以包括串联对准的多个共焦谐振器，以将光学延迟的输出传递到激光输出脉冲光学延迟启动光学器件; 光轴对准机构，其包括径向镜定位机构，其可操作以将光学延迟的输出定位成与激光输出脉冲的沿激光输出脉冲发射的激光系统输出脉冲部分的光轴传输的部分对准脉冲光学延迟启动光学器件。

66. 发明授权

US07408969B2 Optical cavity and laser 失效
标题翻译：光腔和激光
公开(公告)号：US07408969B2
公开(公告)日：2008-08-05
申请号：US10968280
申请日：2004-10-18
申请人： Donald Bennett Hilliard
发明人： Donald Bennett Hilliard
IPC分类号： H01S3/22 , H01S3/08
CPC分类号： H01S3/0602 , H01S3/025 , H01S3/0385 , H01S3/042 , H01S3/0604 , H01S3/0612 , H01S3/07 , H01S3/08004 , H01S3/08022 , H01S3/08045 , H01S3/08059 , H01S3/0813 , H01S3/0941 , H01S3/225
摘要： A novel laser cavity structure is disclosed which pertains to laser resonator geometries possessing circular symmetry, such as in the case of disk or spherical lasers. The disclosed invention utilizes a very-high finesse Bragg reflector (VHF-BR) thin film reflectors of many layer pairs of very small refractive index difference, the VHF-BR deposited on a surface of revolution, thereby forming an optical cavity. These dielectric reflectors are disposed in such a way as to allow selection of preferred low order modes and suppression of parasitic modes while allowing a high cavity Q factor for preferred modes. The invention disclosed, in its preferred embodiments, is seen as particularly useful in applications requiring high efficiency in the production and coupling of coherent radiation. This is accomplished in a cavity design that is relatively compact and economical. Of particular novelty is the combination of the disclosed cavity design with polymer multilayers. The ability to deposit an unusually large number of polymer thin films without loss of specularity, while maintaining very low extinction, renders the disclosed polymer-based cavity particularly well-suited for higher mode discrimination, more rugged and light-weight cavities, as well as economical fabrication.
摘要翻译：公开了一种新颖的激光腔结构，其涉及具有圆形对称性的激光谐振器几何形状，例如在盘或球形激光器的情况下。所公开的发明利用非常高的精细布拉格反射器（VHF-BR）薄膜反射器，其具有非常小折射率差异的许多层对，VHF-BR沉积在旋转表面上，从而形成光腔。这些电介质反射器被设置成允许选择优选的低阶模式和抑制寄生模式，同时允许用于优选模式的高腔Q因子。在其优选实施方案中公开的本发明被认为特别适用于在相干辐射的生产和耦合中需要高效率的应用中。这是在相对紧凑和经济的腔设计中实现的。特别新颖的是所公开的空腔设计与聚合物多层的组合。在不损失镜面反射性的同时沉积异常大量聚合物薄膜的能力，同时保持非常低的消光，使得所公开的基于聚合物的腔特别适合于更高模式识别，更坚固和轻质的腔，以及经济的制作。

67. 发明申请

US20080031298A1 Laser Processing Deivce 失效
标题翻译：激光加工设备
公开(公告)号：US20080031298A1
公开(公告)日：2008-02-07
申请号：US11576792
申请日：2005-10-06
申请人： Hirotaka Sakai , Tetsuya Watabe , Hidenori Nakano
发明人： Hirotaka Sakai , Tetsuya Watabe , Hidenori Nakano
IPC分类号： H01S3/22
CPC分类号： B23K26/147 , B23K26/037 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/0823 , B23K26/10 , B23K26/123 , B23K26/142 , B23K26/24 , B23K26/28 , B23K26/38
摘要： A laser processing device in which even a short nozzle provided with a follower roller (35) can prevent disturbance of a laser beam and contamination of protective glass and in which shield gas can act effectively. The laser processing device comprises a head section (11) from which a laser beam that is condensed by a condenser lens (16) provided inside the device is irradiated through a nozzle section (13); a gas delivery means (28) opened in a processing direction X, in the vicinity of the focal point of laser beam, and jetting a shield gas from the opening; a primary air delivery means (31) directed in the processing direction X, above the focal point F of the laser beam, and jetting primary air A1 substantially in the horizontal direction to form a first air curtain; and secondary air delivery means (18, 13, 19) directed to the focal point from the vicinity of the condenser lens and jetting secondary air A2 to form a second air curtain.
摘要翻译：一种激光加工装置，其中即使设有从动辊（35）的短喷嘴也可以防止激光束的干扰和保护玻璃的污染，并且其中保护气体可以有效地起作用。激光加工装置包括头部（11），通过设置在装置内部的聚光透镜（16）聚光的激光束通过喷嘴部分（13）被照射; 在处理方向X上在激光束焦点附近开口的气体输送装置（28），并从开口喷出保护气体; 沿着处理方向X指向激光束的焦点F上方的一次空气传送装置（31），并且基本上沿水平方向喷射一次空气A 1以形成第一空气幕; 以及从聚光透镜附近指向焦点的二次空气输送装置（18,13,19），并且喷射二次空气A 2以形成第二气帘。

68. 发明授权

US07274722B2 CO2 slab laser 失效
标题翻译：二氧化碳板激光
公开(公告)号：US07274722B2
公开(公告)日：2007-09-25
申请号：US11041613
申请日：2005-01-24
申请人： Norbert Taufenbach
发明人： Norbert Taufenbach
IPC分类号： H01S3/22 , H01S3/03 , H01S3/097
CPC分类号： H01S3/038 , H01S3/0315 , H01S3/0407 , H01S3/041
摘要： CO2 slab laser having a gas-filled tubular housing, sealed off at both ends by end pieces, which accommodates two overlapping electrodes extending into the tubular housing and mirrors arranged in the region of the electrodes, where each of the two end pieces holds an electrode, the mirrors are arranged stationary relative to the electrodes and the electrodes, jointly with the mirrors, are adjustable relative to one another.
摘要翻译：具有充气管状壳体的CO 2平板激光器，两端通过端部件封闭，其容纳延伸到管状壳体中的两个重叠电极和布置在电极区域中的反射镜，其中每个两个端片保持电极，反射镜相对于电极静止地布置，并且电极与反射镜一起可相对于彼此调节。

69. 发明申请

US20070147446A1 FREQUENCY STABILISED GAS LASER 有权
标题翻译：频率稳定气体激光
公开(公告)号：US20070147446A1
公开(公告)日：2007-06-28
申请号：US11548038
申请日：2006-10-10
申请人： Dietrich Meier
发明人： Dietrich Meier
IPC分类号： H01S3/13 , H01S3/22 , H01S3/223
CPC分类号： H01S3/134 , H01S3/041 , H01S3/1317 , H01S3/2222
摘要： A method for the frequency stabilization of a gas laser with a laser tube (1), in stable operation includes a continuous operation control procedure with the following steps: Operating the gas laser for the radiation of laser light; measuring an intensity of one component of the radiated laser light with a detector (8); adjusting a tube temperature of the laser tube (1) by means of a control system (7), so that the measured intensity is controlled to a set-point value. During a startup phase, the procedure includes the following steps: Measuring an ambient temperature; controlling the condition of the laser tube (1) by means of the control system (7) to a set-point state, wherein the set-point state corresponds to a temperature of the laser tube (1) at the measured ambient temperature in the steady condition without any further heating or cooling; and switching over to the continuous operation control.
摘要翻译：一种用于激光管（1）的气体激光器的稳定化稳定的方法，包括以下步骤的连续操作控制步骤：操作用于激光辐射的气体激光器; 用检测器（8）测量辐射激光的一个分量的强度; 通过控制系统（7）调节激光管（1）的管温度，使得测量的强度被控制到设定值。在启动阶段，程序包括以下步骤：测量环境温度; 通过控制系统（7）将激光管（1）的状态控制到设定点状态，其中设定点状态对应于在测量的环境温度下的激光管（1）的温度稳定状态，无需进一步加热或冷却; 并切换到连续运行控制。

70. 发明申请

US20070091972A1 Thermal-expansion tolerant, preionizer electrode for a gas discharge laser 有权
标题翻译：用于气体放电激光器的热膨胀容限预除电极
公开(公告)号：US20070091972A1
公开(公告)日：2007-04-26
申请号：US11237535
申请日：2005-09-27
申请人： Thomas Steiger , Richard Ujazdowski
发明人： Thomas Steiger , Richard Ujazdowski
IPC分类号： H01S3/22 , H01S3/03 , H01S3/097 , H01S3/223
CPC分类号： H01S3/09713 , H01S3/036 , H01S3/0384 , H01S3/0385 , H01S3/0388 , H01S3/225
摘要： A corona-discharge type, prelonizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated 0o conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.
摘要翻译：公开了一种用于气体放电激光器的电晕放电型预振器组件。组件可以包括限定管孔的电极和中空的电介质管。在一个方面，电极可以包括第一细长导电构件，其具有设置在管的孔中的第一端。此外，电极可以包括第二细长导电构件，其具有设置在孔中并与第一导电构件的第一端隔开的第一端。对于组件，第一和第二导电构件可以保持在相同的电压电位。

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