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71. 发明申请

US20070071047A1 6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements 审中-公开
标题翻译： 6K脉冲重复率及以上气体放电激光系统固态脉冲电源系统改进
公开(公告)号：US20070071047A1
公开(公告)日：2007-03-29
申请号：US11300979
申请日：2005-12-15
申请人： Chaofeng Huang , Paul Melcher , Richard Ness
发明人： Chaofeng Huang , Paul Melcher , Richard Ness
IPC分类号： H01S3/04 , H01S3/00 , H01S3/22 , H01S3/223
CPC分类号： H01S3/097 , H01S3/04 , H01S3/09702 , H01S3/0975 , H01S3/225 , H03K3/57 , H03K17/127 , H03K17/567 , H03K17/6872 , H03K17/785
摘要： A method and apparatus for operating a very high repetition gas discharge laser system magnetic switch pulsed power system is disclosed, which may comprise a solid state switch, a charging power supply electrically connected to one side of the solid state switch; a charging inductor electrically connected to the other side of the solid state switch; a deque circuit electrically in parallel with the solid state switch comprising a deque switch; a peaking capacitor electrically connected to the charging inductor, a peaking capacitor charging control system operative to charge the peaking capacitor by opening the deque switch and leaving the solid state switch open and then shutting the solid state switch. The solid state switch may comprise a plurality of solid state switches electrically in parallel.
摘要翻译：公开了一种用于操作非常高重复气体放电激光系统磁开关脉冲功率系统的方法和装置，其可以包括固态开关，电连接到固态开关的一侧的充电电源; 充电电感器电连接到固态开关的另一侧; 与固态开关并联电路的德克电路，其包括德克式开关; 与充电电感器电连接的峰值电容器，峰值电容器充电控制系统，其操作以通过打开所述开关开关并使固态开关断开并且然后关断所述固态开关来对所述峰值电容器充电。固态开关可以并联电连接多个固态开关。

72. 发明授权

US07194015B2 Laser oscillating apparatus and laser working machine 有权
标题翻译：激光振荡器和激光加工机
公开(公告)号：US07194015B2
公开(公告)日：2007-03-20
申请号：US10542488
申请日：2004-12-08
申请人： Hiroyuki Hayashikawa , Hitoshi Hongu
发明人： Hiroyuki Hayashikawa , Hitoshi Hongu
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/036
摘要： A laser oscillating apparatus includes a discharger for exciting a laser medium, a blower for blowing a laser gas and a laser gas path for connecting the discharger and the blower, and a laser oscillating apparatus characterized in that the blower includes a shaft portion provided with a blade wheel portion at a front end thereof, a driving portion for rotating the shaft portion, and a partition wall portion for separating the blade wheel portion and the driving portion, and a surface of the partition wall portion is provided with a metal layer dispersing precipitated polytetrafluoroethylene (PTFE).
摘要翻译：激光振荡装置包括用于激发激光介质的放电器，用于吹送激光气体的鼓风机和用于连接放电器和鼓风机的激光气体路径，以及激光振荡装置，其特征在于，所述鼓风机包括：轴部，其前端的叶轮部分，用于使轴部旋转的驱动部分和用于分离叶轮部分和驱动部分的分隔壁部分和分隔壁部分的表面设置有分散沉淀的金属层聚四氟乙烯（PTFE）。

73. 发明申请

US20070047610A1 HIGH FREQUENCY DISCHARGE EXCITED GAS LASER OSCILLATOR 失效
标题翻译：高频放电激光激光振荡器
公开(公告)号：US20070047610A1
公开(公告)日：2007-03-01
申请号：US11467029
申请日：2006-08-24
申请人： Akira Egawa , Minoru Ando , Hajime Ikemoto
发明人： Akira Egawa , Minoru Ando , Hajime Ikemoto
IPC分类号： H01S3/04 , H01S3/22
CPC分类号： H01S3/097 , H01S3/036 , H01S3/073 , H01S3/10069 , H01S3/134
摘要： A high-frequency discharge excited gas laser oscillator receiving power from a laser power supply controlled by a pulse command, the high-frequency discharge excited gas laser oscillator provided with a power detecting section for detecting supply power from the laser power supply to a discharge tube and a pulse command control section positioned at an upstream side of the laser power supply, comparing an allowable upper limit value of supply power found from a relationship between a discharge tube temperature and supply power and an actual supply power detected by the power detecting section, stopping the pulse command value to the discharge tube when the supply power is higher than the allowable upper limit value, and setting a pulse command value based on the allowable upper limit value.
摘要翻译：一种高频放电激励气体激光振荡器，其从由脉冲命令控制的激光电源接收电力，所述高频放电激励气体激光振荡器设置有用于检测从激光电源向放电管供电的功率检测部以及脉冲指令控制部，其位于所述激光电源的上游侧，将从放电管温度和供给电力之间的关系求出的供给电力的容许上限值与由所述功率检测部检测出的实际供给电力进行比较，当供电功率高于允许上限值时，将放电管的脉冲指令值停止，并根据容许上限值设定脉冲指令值。

74. 发明申请

US20070036194A1 Excimer-lamp pumped semiconductor laser 审中-公开
标题翻译：准分子泵浦半导体激光器
公开(公告)号：US20070036194A1
公开(公告)日：2007-02-15
申请号：US11203734
申请日：2005-08-15
申请人： Sergei Govorkov , Luis Spinelli , R. Austin
发明人： Sergei Govorkov , Luis Spinelli , R. Austin
IPC分类号： H01S3/22 , H01S3/091 , H01S3/09
CPC分类号： H01S5/041 , B82Y20/00 , H01S5/0222 , H01S5/02296 , H01S5/024 , H01S5/141 , H01S5/183 , H01S5/3018 , H01S5/3045 , H01S5/327 , H01S5/347
摘要： In an optically pumped semiconductor laser including a semiconductor laser heterostructure, energy of high-energy electrons of an electron beam is converted by excimer formation and dissociation in a gas into ultraviolet (UV) radiation. The ultraviolet radiation is used to optically pump the heterostructure. Materials of the heterostructure may include II-VI compounds, oxides, or diamond. Both surface-emitting and edge-emitting heterostructures may be optically pumped by the UV radiation.
摘要翻译：在包括半导体激光异质结构的光泵浦半导体激光器中，电子束的高能电子的能量通过准分子的形成和气体中的解离转化成紫外（UV）辐射。使用紫外线辐射来泵浦异质结构。异质结构的材料可以包括II-VI化合物，氧化物或金刚石。表面发射和边缘发射异质结构都可以通过UV辐射被光泵浦。

75. 发明申请

US20070036193A1 Laser with Brayton cycle outlet pump 审中-公开
标题翻译：激光与布雷顿循环出口泵
公开(公告)号：US20070036193A1
公开(公告)日：2007-02-15
申请号：US11581696
申请日：2006-10-16
申请人： George Emanuel
发明人： George Emanuel
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/0953 , H01S3/2215
摘要： A chemical oxygen-iodine laser (COIL) comprises an oxygen generator and a nozzle for accelerating generated oxygen to a high or supersonic velocity. A laser cavity is coupled to the nozzle, wherein the accelerated fluid, with injected iodine, is employed as a laser gain medium. A Brayton cycle outlet pump employs the accelerated oxygen and iodine as a component of a process fluid in a Brayton cycle to raise the static pressure of the accelerated fluid to ambient conditions. The Brayton cycle pump comprises a compressor having an inlet and an outlet, the inlet being coupled to the laser cavity to receive and compress accelerated oxygen. A combustor is coupled to the outlet of the compressor to receive compressed oxygen and ignite and combust it A turbine is coupled to the outlet of the combustor to expand the ignited and combusted gas, wherein the turbine powers the compressor. Multiple reheat stages may be used and regeneration and intercooling may also be used. The use of reheat, regeneration, and intercooling depends on the application.
摘要翻译：化学氧碘激光器（COIL）包括氧气发生器和用于将生成的氧气加速到高或超音速的喷嘴。激光腔耦合到喷嘴，其中使用注入的碘的加速流体被用作激光增益介质。 Brayton循环出口泵采用加速氧和碘作为Brayton循环中工艺流体的一个组成部分，以将加速流体的静压升高到环境条件。布雷顿循环泵包括具有入口和出口的压缩机，入口耦合到激光腔以接收和压缩加速的氧气。燃烧器联接到压缩机的出口以接收压缩的氧并点燃和燃烧。涡轮联接到燃烧器的出口，以膨胀点燃和燃烧的气体，其中涡轮机为压缩机供电。可以使用多个再热阶段，也可以使用再生和中间冷却。使用再热，再生和中间冷却取决于应用。

76. 发明申请

US20070030877A1 Apparatus and method for monitoring power of a UV laser 有权
标题翻译：用于监测UV激光器功率的装置和方法
公开(公告)号：US20070030877A1
公开(公告)日：2007-02-08
申请号：US11498382
申请日：2006-08-03
申请人： Jeffrey Levatter
发明人： Jeffrey Levatter
IPC分类号： H01S3/22 , H01S3/03
CPC分类号： H01S3/225 , A61B18/20 , A61B2017/00057 , A61B2018/00636 , H01S3/1317 , H01S3/134
摘要： An excimer laser includes a chamber for containing laser gas, electrodes in the chamber disposed to excite the laser gas, thereby producing optical emissions, first and second mirrors arranged to form a resonator cavity, and a detector disposed to receive a portion of light transmitted through the first mirror. The first mirror is more reflective than the second mirror.
摘要翻译：准分子激光器包括用于容纳激光气体的腔室，设置在腔室中的电极，用于激发激光气体，从而产生光发射，布置成形成谐振腔的第一和第二反射镜，以及用于接收透射的光的一部分的检测器第一个镜子。第一个镜子比第二个镜子更反射。

77. 发明申请

US20070002918A1 Acoustic shock-wave damping in pulsed gas-laser discharge 审中-公开
标题翻译：脉冲气体激光放电中的声波冲击波阻尼
公开(公告)号：US20070002918A1
公开(公告)日：2007-01-04
申请号：US11172266
申请日：2005-06-30
申请人： Norbert Niemoeller , Igor Bragin , Vadim Berger
发明人： Norbert Niemoeller , Igor Bragin , Vadim Berger
IPC分类号： H01S3/22 , H01S3/097
CPC分类号： H01S3/0388 , H01S3/032 , H01S3/036 , H01S3/0384 , H01S3/0385 , H01S3/0971 , H01S3/225
摘要： An excimer laser has a laser chamber containing a laser gas and including an electrode assembly for firing gas discharge pulses in the laser gas for pumping the laser. The electrode assembly includes two elongated electrodes, one or both of which is partially covered by a ceramic foam. The electrodes are arranged to provide a discharge gap between the electrodes. The ceramic foam on an electrode serves to damp acoustic disturbances and resulting refractive index disturbances in the gas that occur as a result of firing a gas discharge pulse in the discharge gap.
摘要翻译：准分子激光器具有包含激光气体的激光室，并且包括用于激发激光器中的气体放电脉冲的电极组件，用于泵浦激光。电极组件包括两个细长电极，其中一个或两个部分被陶瓷泡沫覆盖。电极被布置成在电极之间提供放电间隙。电极上的陶瓷泡沫用于抑制由于在放电间隙中发生气体放电脉冲而发生的气体中的声学干扰和由此产生的折射率干扰。

78. 发明申请

US20060291518A1 Laser filament imager 失效
标题翻译：激光灯丝成像仪
公开(公告)号：US20060291518A1
公开(公告)日：2006-12-28
申请号：US11169263
申请日：2005-06-27
申请人： Daniel Gordon , Antonio Ting , Eldridge Briscoe
发明人： Daniel Gordon , Antonio Ting , Eldridge Briscoe
IPC分类号： H01S3/22 , H01S3/223 , H01S3/03
CPC分类号： H01S3/0014
摘要： An apparatus includes a gas chamber comprising a gas feed nozzle, an exhaust nozzle, and a window. The apparatus also includes a first partial reflector, in the gas chamber, sharing an optical path with the exhaust nozzle, and the window. Optionally, The apparatus includes a gas source communicating with the gas feed nozzle. Optionally, the gas source includes a gas having an ionization potential higher than air and a nonlinear index of refraction lower than air.
摘要翻译：一种装置包括一个包括气体供给喷嘴，排气喷嘴和一个窗口的气室。该装置还包括在气室中的与排气喷嘴和窗口共享光路的第一部分反射器。可选地，该装置包括与气体供给喷嘴连通的气体源。可选地，气源包括具有高于空气的电离电位和非线性折射率低于空气的气体。

79. 发明授权

US07149234B2 High repetition rate gas discharge laser with precise pulse timing control 有权
标题翻译：高重复率气体放电激光器，具有精确的脉冲定时控制
公开(公告)号：US07149234B2
公开(公告)日：2006-12-12
申请号：US10650578
申请日：2003-08-27
申请人： Palash P. Das , Jennan Yu , Stuart L. Anderson , Helmut Schillinger , Tobias Pflanz , Claus Strowitzki , Claudia A. Hartmann , Stephan Geiger , Brett D. Smith , William N. Partlo
发明人： Palash P. Das , Jennan Yu , Stuart L. Anderson , Helmut Schillinger , Tobias Pflanz , Claus Strowitzki , Claudia A. Hartmann , Stephan Geiger , Brett D. Smith , William N. Partlo
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/134 , H01S3/22 , H01S3/2207 , H01S3/225 , H03K3/57 , H03K17/80
摘要： A high repetition rate, compact, modular gas discharge, ultraviolet laser. The laser is useful as a light source for very rapid inspections of wafers in an integrated circuit fabrication process. It is also useful for reticle writing at very rapid rates. A preferred embodiment operates at pulse repetition rates of 1000 to 4000 Hz and is designed for round-the-clock production line operation. This preferred embodiment comprises a pulse control unit which controls the timing of pulses to an accuracy of less than 4 nanoseconds. Preferred embodiments of this gas discharge laser can be configured to operate with a KrF gas mixture, an ArF gas mixture or an F2 gas mixture, each with an approximate buffer gas, producing 248 nm, 197 nm or 157 nm ultraviolet light pulses.
摘要翻译：高重复率，紧凑型，模块化气体放电，紫外线激光。激光器可用作用于在集成电路制造工艺中非常快速地检查晶片的光源。它也以非常快的速度对掩模版书写有用。优选实施例以1000至4000Hz的脉冲重复率工作，并被设计用于全天候的生产线操作。该优选实施例包括脉冲控制单元，其将脉冲的定时控制到小于4纳秒的精度。该气体放电激光器的优选实施例可被配置为与KrF气体混合物，ArF气体混合物或F 2气体混合物一起操作，每个气体混合物具有近似的缓冲气体，产生248nm，197nm或 157 nm紫外光脉冲。

80. 发明申请

US20060274806A1 Gas laser apparatus 审中-公开
标题翻译：气体激光设备
公开(公告)号：US20060274806A1
公开(公告)日：2006-12-07
申请号：US11443011
申请日：2006-05-31
申请人： Takanori Sato , Takafumi Murakami , Akira Egawa
发明人： Takanori Sato , Takafumi Murakami , Akira Egawa
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/036 , H01S3/104 , H01S3/2232
摘要： A gas laser apparatus including a laser oscillating section including a medium circuit allowing a medium gas to flow therethrough under pressure, and a gas-composition adjusting section for adjusting the composition of the medium gas flowing through the medium circuit of the laser oscillating section. The gas-composition adjusting section comprising a gas supply section for supplying several types of medium gases having different compositions to the medium circuit of the laser oscillating section with a flow rate of each of the medium gases being adjustable; a gas exhaust section for exhausting the medium gas from the medium circuit of the laser oscillating section; and a control section for controlling the gas supply section and the gas exhaust section, to adjust the composition of the medium gas flowing through the medium circuit, in accordance with an oscillation condition including at least one of an attribute of an object matter acted on by a laser beam oscillated by the laser oscillating section and the accuracy of action of the laser beam.
摘要翻译：一种气体激光装置，包括具有允许中等气体在压力下流过的介质回路的激光振荡部，以及用于调整流过激光振荡部的介质电路的介质气体的成分的气体成分调整部。气体成分调节部分包括一个气体供应部分，用于向每个介质气体的流量调节激光振荡部分的介质回路，提供不同组成的几种介质气体; 用于从激光振荡部的介质电路排出介质气体的排气部; 以及控制部分，用于控制气体供应部分和排气部分，以根据包括以下操作的物体的属性中的至少一个的振荡条件来调节流经介质回路的介质气体的组成：由激光振荡部分振荡的激光束和激光束的作用精度。

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