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    • 2. 发明申请
    • GAS LASER OSCILLATOR APPARATUS AND LASER GAS REPLACEMENT METHOD
    • 气体激光振荡器装置和激光气体替代方法
    • US20140105237A1
    • 2014-04-17
    • US13981312
    • 2013-01-17
    • Hiroyuki HayashikawaHitoshi HonguTakayuki Yamashita
    • Hiroyuki HayashikawaHitoshi HonguTakayuki Yamashita
    • H01S3/036
    • H01S3/036H01S3/041H01S3/073
    • The gas laser oscillator apparatus of the present invention has laser gas sealed in a vacuum chamber under a decompressed condition lower than atmospheric pressure; a discharge means for exciting the laser gas; a blower means for blowing the laser gas; a laser-gas flow passage as a circulation passage of the laser gas between the discharge means and the blower means; and a gas compression means for discharging a predetermined amount of the laser gas from the laser-gas flow passage. The gas decompression means is structured on the application of Bernoulli's principle. The gas decompression means has a sequence for decreasing the ratio of air mixed into the laser gas below a predetermined level with use of a part of pressurized gas used in a laser processing machine or the gas laser oscillator apparatus.
    • 本发明的气体激光振荡器装置在低于大气压的减压条件下将激光气体密封在真空室中; 用于激发激光气体的放电装置; 用于吹送激光气体的鼓风机装置; 作为激光气体在排出装置和送风装置之间的循环通道的激光气体流路; 以及用于从激光气体流路排出预定量的激光气体的气体压缩装置。 气体减压装置是根据伯努利原则的结构而构成的。 气体减压装置具有使用激光加工机或气体激光振荡器装置中使用的一部分加压气体将混入激光气体的空气比例降低到预定水平的顺序。
    • 3. 发明授权
    • Laser oscillating device
    • 激光振荡装置
    • US06895030B1
    • 2005-05-17
    • US10048226
    • 2000-05-30
    • Hiroyuki HayashikawaHitoshi Hongu
    • Hiroyuki HayashikawaHitoshi Hongu
    • H01S3/03H01S3/034H01S3/036H01S3/038H01S3/07H01S3/08H01S3/086H01S3/22H01S3/223
    • H01S3/03H01S3/034H01S3/036H01S3/038H01S3/073H01S3/086
    • A support unit (20a) for supporting an OPM holder (15a) so as to be vertical to the laser beam axis is disposed in the lower part of the OPM holder (15a). A rotary shaft (19) is inserted into the support unit (20a) and rotary shaft support unit (20b), and the OPM holder (15a) and DT base (17) are assembled together. Thus, a rotation support unit (200) is composed. The rotation support unit has a degree of freedom in the rotating direction of arrow (202). On the other hand, in the lower part of an RM holder (15b), a support bar (21) is provided. At the DT base (17), a rotating element (22) and a rotating element support unit (23) supporting the rotating element are composed so as to support the support bar. Thus, a slider structure (220) slidable in the optical axis direction is formed. The slider structure has a degree of freedom in the direction of arrow (222).
    • 用于支撑OPM保持器(15a)以与激光束轴线垂直的支撑单元(20a)被布置在OPM保持器(15a)的下部。 旋转轴(19)插入到支撑单元(20a)和旋转轴支撑单元(20b)中,并且OPM保持器(15a)和DT基座(17)组装在一起。 因此,构成旋转支撑单元(200)。 旋转支撑单元具有沿箭头(202)的旋转方向的自由度。 另一方面,在RM保持器(15b)的下部设有支撑杆(21)。 在DT基座(17)上,支撑旋转元件的旋转元件(22)和旋转元件支撑单元(23)构成为支撑支撑杆。 因此,形成可沿光轴方向滑动的滑块结构(220)。 滑块结构具有沿箭头(222)的方向的自由度。
    • 5. 发明授权
    • Gas laser oscillator
    • 气体激光振荡器
    • US06768761B2
    • 2004-07-27
    • US09795084
    • 2001-03-01
    • Hitoshi HonguHiroyuki Hayashikawa
    • Hitoshi HonguHiroyuki Hayashikawa
    • H01S3223
    • H01S3/036
    • A gas laser oscillator comprising a laser gas pressure controller for controlling the pressure of laser gas in laser gas chamber to be constant, an electromagnetic valve for supplying laser gas into the laser gas chamber from a gas bottle so that the laser gas within the laser gas chamber is maintained constant, detection means for detecting that the cycle period of open/close actions of the electromagnetic valve became longer than a reference value, and an alarm display controller which issues an alarm. In a gas laser oscillator of the present invention, even such a micro vacuum leak that hardly ill-affects the laser output can be detected with ease while the gas laser oscillator is in operation. This makes it possible to apply an appropriate maintenance work beforehand on the vacuum seal. Thus, reliable gas laser oscillators can be offered in accordance with the present invention.
    • 气体激光振荡器包括用于控制激光气室中的激光气体的压力恒定的激光气体压力控制器,用于从气瓶向激光气体室供应激光气体的电磁阀,使激光气体内的激光气体 检测装置,用于检测电磁阀的打开/关闭动作周期何时变得比参考值长;以及发出报警的报警显示控制器。 在本发明的气体激光振荡器中,即使在气体激光振荡器工作的情况下也能够容易地检测出几乎不影响激光输出的这样的微真空泄漏。 这样可以预先在真空密封上进行适当的维护工作。 因此,可以根据本发明提供可靠的气体激光振荡器。
    • 9. 发明授权
    • Laser oscillating apparatus
    • 激光振荡装置
    • US06580742B1
    • 2003-06-17
    • US09689072
    • 2000-10-12
    • Hiroyuki HayashikawaTetsuji NishimuraHitoshi Hongu
    • Hiroyuki HayashikawaTetsuji NishimuraHitoshi Hongu
    • H01S322
    • H01S3/036H01S3/073
    • An orifice (254) is disposed near the junction of a discharge tube (1) and a laser gas lead-in pipe (242). A laser gas relay pipe (244) is disposed so as to allow the laser gas to flow parallel in the same direction as or in the reverse direction to the flowing direction of laser gas in the discharge tube (1). The orifice (254) includes a portion for impeding flow of laser gas, and plural holes for passing laser gas, and at least one of the holes is deviated from the center. The total area of the holes summing up the area of the plural holes provided in the orifice (254) is at a rate of 0.5 to 0.8 to the sectional area of the discharge tube. The plural holes of the orifice (254) are nearly circular, and the diameter of each hole is smaller than the radius of the orifice.
    • 在排放管(1)和激光气体引入管(242)的接合处附近设置孔(254)。 激光气体中继管(244)被配置成允许激光气体沿与喷射管(1)中的激光气体的流动方向相反的方向平行地流动。 孔(254)包括用于阻止激光气体流动的部分,以及用于通过激光气体的多个孔,并且至少一个孔偏离中心。 将设在孔口254中的多个孔的面积相加的孔的总面积相对于放电管的截面积为0.5〜0.8。 孔254的多个孔几乎是圆形的,每个孔的直径小于孔的半径。
    • 10. 发明授权
    • Gas laser oscillator
    • 气体激光振荡器
    • US07580439B2
    • 2009-08-25
    • US10576688
    • 2005-09-20
    • Hiroyuki HayashikawaHitoshi HonguAtsuki Yamamoto
    • Hiroyuki HayashikawaHitoshi HonguAtsuki Yamamoto
    • H01S3/22
    • H01S3/036
    • A gas laser oscillator appropriately detecting a clogging of a laying pipe of a sub ejection apparatus is disclosed. The gas laser oscillator according to the present invention includes a laser gas flow pipe, a driving part, a divide wall, a main ejection apparatus, a sub ejection apparatus, a detect portion, and a clogged laying pipe judge part. The laser gas flow pipe constitutes a circulating route of the laser gas. The driving part drives the air blower for blowing the laser gas. The divide wall separates the air blower and the driving part. The main ejection apparatus has a valve, and ejects laser gas from the laser gas flow pipe. The sub ejection apparatus ejects laser gas from the driving part. The detector detects an amount of laser gas ejected from the main ejection apparatus and the sub ejection apparatus. The clogged laying pipe judge part judges that the laying pipe of the sub ejection apparatus is clogged when an amount of ejected laser gas measured at a time the valve of the main ejection apparatus is closed is lower than a predetermined value.
    • 公开了一种适当地检测副喷射装置的铺设管的堵塞的气体激光振荡器。 根据本发明的气体激光振荡器包括激光气体流动管,驱动部分,分隔壁,主喷射装置,副喷射装置,检测部分和堵塞的放置管判断部分。 激光气体流动管构成激光气体的循环路径。 驱动部件驱动用于吹送激光气体的鼓风机。 分隔壁将鼓风机和驱动部分分开。 主喷射装置具有阀,并且从激光气体流管喷出激光气体。 副喷射装置从驱动部喷射激光气体。 检测器检测从主喷射装置和副喷射装置喷射的激光气体的量。 当在主喷射装置的阀关闭时测量的喷射激光气体的量低于预定值时,堵塞的铺管管判断部分判断副喷射装置的放置管堵塞。