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    • 81. 发明授权
    • Elemental semiconductor material contact for GaN-based light emitting diodes
    • GaN基发光二极管的元素半导体材料接触
    • US08933434B2
    • 2015-01-13
    • US13897508
    • 2013-05-20
    • International Business Machines Corporation
    • Anirban BasuBahman HekmatshoartabariDavood Shahrjerdi
    • H01L33/06H01L29/15H01L33/00H01L33/32
    • H01L33/06H01L33/0075H01L33/02H01L33/20H01L33/32H01L2933/0016
    • A vertical stack including a p-doped GaN portion, a multi-quantum-well, and an n-doped GaN portion is formed on an insulator substrate. The p-doped GaN portion may be formed above, or below, the multi-quantum-well. A dielectric material liner is formed around the vertical stack, and is patterned to physically expose a top surface of the p-doped GaN portion. A selective low temperature epitaxy process is employed to deposit a semiconductor material including at least one elemental semiconductor material on the physically exposed surfaces of the p-doped GaN portion, thereby forming an elemental semiconductor material portion. Metallization is performed on a portion of the elemental semiconductor material portions to form an electrical contact structure that provides effective electrical contact to the p-doped GaN portion through the elemental semiconductor material portion. The elemental semiconductor material portion spreads electrical current between the electrical contact structure and the p-doped GaN portion.
    • 包括p掺杂GaN部分,多量子阱和n掺杂GaN部分的垂直堆叠形成在绝缘体基板上。 p掺杂的GaN部分可以形成在多量子阱的上方或下方。 在垂直叠层周围形成电介质材料衬垫,并被图案化以物理暴露p掺杂GaN部分的顶表面。 采用选择性低温外延工艺将包含至少一种元素半导体材料的半导体材料沉积在p掺杂GaN部分的物理暴露表面上,从而形成元素半导体材料部分。 在元素半导体材料部分的一部分上进行金属化以形成通过元素半导体材料部分向p掺杂的GaN部分提供有效的电接触的电接触结构。 元素半导体材料部分在电接触结构和p掺杂GaN部分之间扩展电流。
    • 82. 发明申请
    • ELEMENTAL SEMICONDUCTOR MATERIAL CONTACT FOR HIGH INDIUM CONTENT InGaN LIGHT EMITTING DIODES
    • 元素半导体材料接触高含量InGaN发光二极管
    • US20140342485A1
    • 2014-11-20
    • US14019726
    • 2013-09-06
    • International Business Machines Corporation
    • Anirban BasuWilfried HaenschBahman HekmatshoartabariDavood Shahrjerdi
    • H01L33/32H01L33/06
    • H01L33/06H01L33/0075H01L33/02H01L33/20H01L33/32H01L2933/0016
    • A vertical stack including a p-doped GaN portion, a multi-quantum-well including indium gallium nitride layers, and an n-doped transparent conductive material portion is formed on an insulator substrate. A dielectric material liner is formed around the vertical stack, and is patterned to physically expose a surface of the p-doped GaN portion. A selective low temperature epitaxy process is employed to deposit a semiconductor material including at least one elemental semiconductor material on the physically exposed surfaces of the p-doped GaN portion, thereby forming an elemental semiconductor material portion. The selective low temperature epitaxy process can be performed at a temperature lower than 600° C., thereby limiting diffusion of materials within the multi-quantum well and avoiding segregation of indium within the multi-quantum well. The light-emitting diode can generate a radiation of a wide range including blue and green lights in the visible wavelength range.
    • 包括p掺杂的GaN部分,包括氮化镓镓层的多量子阱和n掺杂的透明导电材料部分的垂直堆叠形成在绝缘体基板上。 在垂直堆叠周围形成电介质材料衬垫,并被图案化以物理暴露p掺杂GaN部分的表面。 采用选择性低温外延工艺将包含至少一种元素半导体材料的半导体材料沉积在p掺杂GaN部分的物理暴露表面上,从而形成元素半导体材料部分。 选择性低温外延工艺可以在低于600℃的温度下进行,从而限制多量子阱内材料的扩散,并避免多量子阱内铟的偏析。 发光二极管可以产生宽范围的辐射,包括可见光波长范围内的蓝光和绿光。