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    • 81. 发明授权
    • Laser drive circuit with independently adjustable maximum and minimum
power levels
    • 激光驱动电路具有独立可调的最大和最小功率电平
    • US5477557A
    • 1995-12-19
    • US409934
    • 1995-03-23
    • Naoto InabaHiroshi Meguro
    • Naoto InabaHiroshi Meguro
    • G11B7/125G11B11/105H01S5/068H01S3/102G11B7/00
    • G11B7/126G11B11/10506G11B11/10595H01S5/068
    • A laser drive circuit for modulating a laser beam intensity emitted from a laser device to a maximum power and a minimum power in accordance with a first and second values of a binary signal comprises: a photo-detector for detecting the laser beam emitted from the laser device to produce a detection output signal; a first differential amplifier for producing a maximum error detection signal representing a difference between the detection output signal applied thereto and a maximum reference; a second differential amplifier for producing a minimum error detection signal representing a difference between the detection output signal applied thereto and a minimum reference, a first sample and hold circuit for sampling and holding the maximum error detection signal at a timing of the first value of the binary signal and outputting the same as a maximum error signal; a second sample and hold circuit for sampling and holding the minimum error detection signal at a timing of the second value of the binary signal and outputting the same as a minimum error signal; and a laser drive amplifier for controlling the maximum power and the minimum power of the laser beam emitted from the laser device in accordance with the maximum error signal and the minimum error signal.
    • 根据二进制信号的第一和第二值,用于将从激光装置发射的激光束强度调制到最大功率和最小功率的激光驱动电路包括:用于检测从激光器发射的激光束的光电检测器 设备产生检测输出信号; 第一差分放大器,用于产生表示施加到其上的检测输出信号与最大参考之间的差的最大误差检测信号; 第二差分放大器,用于产生表示施加到其上的检测输出信号与最小参考之间的差的最小误差检测信号;第一采样和保持电路,用于在第一值的定时处采样和保持最大误差检测信号 二进制信号并输出​​相同的最大误差信号; 第二采样和保持电路,用于在二进制信号的第二值的定时采样和保持最小误差检测信号,并将其输出为最小误差信号; 以及激光驱动放大器,用于根据最大误差信号和最小误差信号来控制从激光装置发射的激光束的最大功率和最小功率。
    • 82. 发明授权
    • Low cost, high average power, high brightness solid state laser
    • 低成本,高平均功率,高亮度固态激光器
    • US5434875A
    • 1995-07-18
    • US295283
    • 1994-08-24
    • Harry RiegerHenry ShieldsRichard M. Foster
    • Harry RiegerHenry ShieldsRichard M. Foster
    • G03F7/20H01S3/00H01S3/0941H01S3/098H01S3/102H01S3/11H01S3/23H05G2/00H01S3/10
    • H05G2/001H01S3/07H01S3/2333H01S2301/08H01S3/005H01S3/0057H01S3/0085H01S3/08072H01S3/09415H01S3/1024H01S3/1068H01S3/1103H01S3/1109H01S3/235
    • A high average power, high brightness solid state laser system. A laser produces a first pulse laser beam with a high pulse frequency. A pulse spacing selector removes from the first pulse laser beam more than 80 percent of the pulses to produce a second pulse laser beam having a series of periodically spaced short pulses in excess of 1,000 pulses per second. A laser amplifier amplifies the second pulse train to produce an amplified pulse laser beam which is focused to produce pulses with brightness levels in excess of 10.sup.11 Watts/cm.sup.2. A preferred embodiment produces an amplified pulse laser beam having an average power in the range of 1 KW, an average pulse frequency of 12,000 pulses per second with pulses having brightness levels in excess of 10.sup.14 Watts/cm.sup.2 at a 20 .mu.m diameter spot which is steered rapidly to simulate a larger spot size. These beams are useful in producing X-ray sources for lithography.As compared with prior art high brightness lasers, we have reduced the pulse duration by about 2 or 3 orders of magnitude, from a few ns to 100 ps or less. We achieve our very high brightness by focusing on a very small spot, but we are able to simulate a much larger spot by very rapidly steering our high average power beam over the area we need.
    • 高平均功率,高亮度固态激光系统。 激光产生具有高脉冲频率的第一脉冲激光束。 脉冲间隔选择器从第一脉冲激光束中移除超过80%的脉冲,以产生具有超过每秒1000个脉冲的一系列周期性间隔的短脉冲的第二脉冲激光束。 激光放大器放大第二脉冲序列以产生放大的脉冲激光束,其被聚焦以产生亮度水平超过1011瓦/ cm 2的脉冲。 优选实施例产生具有在1KW范围内的平均功率,每秒12,000脉冲的平均脉冲频率的放大的脉冲激光束,其中在20μm直径光斑处的亮度水平超过1014瓦/ cm 2的脉冲,其是 快速转向以模拟较大的斑点尺寸。 这些光束可用于生产用于光刻的X射线源。 与现有技术的高亮度激光器相比,我们已经将脉冲持续时间从几个ns减小到约100个或更少的数量级。 我们通过专注于非常小的亮点实现了非常高的亮度,但是我们能够通过在我们所需的区域上快速地调整高平均功率波束来模拟更大的点。
    • 84. 发明授权
    • Optical switch
    • 光开关
    • US5136353A
    • 1992-08-04
    • US521781
    • 1990-05-10
    • Jacques I. PankoveChristian V. Radehaus
    • Jacques I. PankoveChristian V. Radehaus
    • H01L31/12H01L33/00H01S3/102
    • H01L33/0016H01L31/125H01S3/1022Y10S257/921
    • The present invention relates to an optical switch which will generate and emit a beam of light when an optical signal is directed therein, but includes means to inhibit the generation of the beam of light when a second optical signal is directed therein. The switch includes a light emitter formed of a plurality of layers of alternating opposite conductivity type which is adapted to generate the beam of light when an optical signal is directed therein. A photovoltaic inhibitor is connected to the emitter so that any current generated by the inhibitor is applied across the emitter in a manner to prevent the generation of the light in the emitter. The photovoltaic inhibitor generates the current when a second optical signal is directed therein. Depending on the external circuit, the device can be operated in either a digital (bistable) or analog mode.
    • 光开关本发明涉及一种光开关,其在光信号被引导时产生并发出光束,但是包括当第二光信号被引导到其中时抑制光束产生的装置。 开关包括由多个交替相反导电类型的层形成的发光体,当光信号被引导到其中时适于产生光束。 光电抑制剂连接到发射极,使得由抑制剂产生的任何电流以防止发射器中的光的产生的方式施加在发射器两端。 当第二光信号被引导到其中时,光伏抑制器产生电流。 根据外部电路,器件可以以数字(双稳态)或模拟模式工作。
    • 85. 发明授权
    • Appartaus for transmitting a coherent frequency modulated optical signal
    • 用于发送相干调频光信号的公司
    • US5010587A
    • 1991-04-23
    • US321065
    • 1989-03-08
    • Hans A. Eklund
    • Hans A. Eklund
    • H01S3/102H04B10/04H04B10/06H04B10/142H04B10/145H04B10/152H04B10/155
    • H04B10/50
    • A first (1) and a second (6) narrowband laser device (1, 6) are each connected to an optical coupler means (3, 8) and also to each an input (13, 14) of a directional coupler (15). The coupler means (3, 8) have their respective outputs (5, 10) connected to a photo detector (18). The laser devices (1, 6) are each connected to their respective control circuit (17, 20). The control circuit (20) of the second laser device (6) is in turn connected to the output (19) of the photo diode (18) and to an exterior control signal (V2) with a frequency f.sub.0. Controlled by its control circuit (17) the first laser device (1) transmits a light signal (S1) with a fixed frequency f.sub.1, and the second laser device (6) transmits a light signal (S3) with a frequency f.sub.2. The photo detector (18) transmits a signal (V1) with a frequency f.sub.2 -f.sub.1 and the second control circuit (20) controls the second laser device (6) so that f.sub.2 -f.sub.1 =f.sub.0. An information carrying signal (V.sub.3) resets the directional coupler (15) and alternatingly switches the laser devices (1, 6) to the output (16) of the directional coupler (15). From this output there is sent a coherent frequency modulated signal S7 with the frequencies f.sub.1 and f.sub.2.
    • 第一(1)和第二(6)窄带激光装置(1,6)各自连接到光耦合器装置(3,8),并且还连接到定向耦合器(15)的每个输入端(13,14) 。 耦合器装置(3,8)具有连接到光电检测器(18)的各自的输出(5,10)。 激光装置(1,6)各自连接到它们各自的控制电路(17,20)。 第二激光装置(6)的控制电路(20)又连接到光电二极管(18)的输出端(19)和频率为f0的外部控制信号(V2)。 通过其控制电路(17)控制,第一激光装置(1)发送具有固定频率f1的光信号(S1),第二激光装置(6)发送频率为f2的光信号(S3)。 光检测器(18)发送频率为f2-f1的信号(V1),第二控制电路(20)控制第二激光装置(6),使得f2-f1 = f0。 信息携带信号(V3)复位定向耦合器(15)并交替地将激光器件(1,6)切换到定向耦合器(15)的输出端(16)。 从该输出发送具有频率f1和f2的相干调频信号S7。
    • 87. 发明授权
    • Laser with variable emission wavelength
    • 具有可变发射波长的激光器
    • US4742524A
    • 1988-05-03
    • US810588
    • 1985-12-19
    • Gerhard Muller
    • Gerhard Muller
    • H01S3/16H01S3/04H01S3/042H01S3/102H01S3/14H01S3/20H01S3/213H01S3/10
    • H01S3/042H01S3/102H01S3/14H01S3/0407
    • A laser with variable wavelength contains, as laser-active material in the laser resonator, a mixture consisting of a first substance present as granulate and of a fluid (liquid or gaseous) second substance. One of these substances is laser-active. The course of the dispersion curves (11-12, and 13-14, respectively) of the indices of refraction of the two substances is dependent on temperature and/or pressure or density, and the curves have at least one point of intersection. When the laser is excited, it emits at a wavelength (.lambda..sub.1, .lambda..sub.2) which corresponds to the point of intersection of the dispersion curves. The temperature and/or pressure or density of the mixture of substances within the laser resonator is varied for controlled selection of the emission wavelength (.lambda..sub.1, .lambda..sub.2).
    • 具有可变波长的激光器包含作为激光谐振器中的激光活性材料的由以颗粒形式存在的第一物质和流体(液体或气体)第二物质组成的混合物。 这些物质之一是激光活性的。 两种物质的折射率的分散曲线(分别为11-12和13-14)的过程取决于温度和/或压力或密度,曲线至少有一个交点。 当激光被激发时,它以与色散曲线的交点相对应的波长(λ1,λ2)发射。 激光谐振器内的物质混合物的温度和/或压力或密度是变化的,用于受控选择发射波长(λ1,λ2)。
    • 88. 发明授权
    • Switching fiber optic amplifier
    • 开关光纤放大器
    • US4554510A
    • 1985-11-19
    • US531231
    • 1983-09-12
    • Herbert J. ShawMichel J. F. Digonnet
    • Herbert J. ShawMichel J. F. Digonnet
    • G01P9/00G01C19/64G01C19/72G02B6/00G02F1/01G02F1/313G02F1/39H01S3/06H01S3/067H01S3/07H01S3/091H01S3/094H01S3/10H01S3/102H01S3/16H01S3/23H03F3/68
    • H01S3/06754H01S3/094011H01S3/10007H01S3/1611H01S3/1643
    • A fiber optic amplifier utilizes a crystal fiber of laser material to bidirectionally amplify light signals. This amplifier permits the application of both pumping illumination and the signal to be amplified to the end of the crystal fiber to avoid the disadvantages inherent in side pumping this fiber. End pumping is accomplished by taking advantage of the slow spontaneous fluorescence of the laser crystal to sequentially apply the pumping illumination and then the signal to be amplified to the crystal. This sequential application of signals is made possible through the use of a switchable coupler which allows light to be selectively coupled from either of a pair of input optical fibers to a single output optical fiber which is coupled to the crystal fiber. The pumping illumination is initially supplied to the crystal fiber to invert the ions within the crystal. Once these ions are inverted, the coupler is switched to permit the application of the signal to be amplified to the crystal, and the application of pumping illumination is temporarily discontinued. The signal to be amplified propagates through the crystal to stimulate emission of coherent light from the laser material resulting in amplification of the signal. When this amplification process is complete, pumping illumination is again applied through the switch to the crystal fiber.
    • 光纤放大器利用激光材料的晶体光纤双向放大光信号。 该放大器允许将泵浦照明和信号放大到晶体光纤的端部,以避免侧向泵浦该光纤的固有缺点。 通过利用激光晶体的缓慢的自发荧光来顺序地施加泵浦照明,然后将待放大的信号施加到晶体来实现末端泵浦。 通过使用可切换耦合器来实现信号的这种顺序应用,其允许光从一对输入光纤中的任一个选择性地耦合到耦合到晶体光纤的单个输出光纤。 泵浦照明最初被提供给晶体纤维以反转晶体内的离子。 一旦这些离子被反转,耦合器被切换以允许将信号施加到晶体上,并且暂时停止施加泵浦照明。 要放大的信号通过晶体传播,以激发来自激光材料的相干光的发射,从而产生信号的放大。 当该放大过程完成时,泵浦照明再次通过开关施加到晶体光纤。
    • 89. 发明授权
    • Laser processing apparatus
    • 激光加工设备
    • US4394764A
    • 1983-07-19
    • US294816
    • 1981-08-20
    • Ken Ishikawa
    • Ken Ishikawa
    • H01S3/091B23K26/00B23K26/20H01S3/0915H01S3/102H01S3/00
    • H01S3/1022
    • Disclosed is a laser processing apparatus, which includes a falling waveform control circuit for controlling the falling of discharge current waveform. A direct current power supply circuit is connected to a main discharge circuit and the falling waveform control circuit for supplying discharge current to these circuits. The main control circuit causes the discharge of the main discharge circuit and falling waveform control circuit successively. The discharge of the main discharge circuit is provided so that it is stopped when the discharge of the falling waveform control circuit is started. The discharge of the falling waveform control circuit is stopped by a discharge current stopping circuit. The main discharge circuit and falling waveform control circuit are connected to a laser beam oscillating section. The laser beam oscillating section irradiates the workpiece with laser beam according to the main discharge current and discharge current having controlled falling waveform supplied from both the aforementioned circuits.
    • 公开了一种激光加工装置,其包括用于控制放电电流波形的下降的下降波形控制电路。 直流电源电路连接到主放电电路和用于向这些电路提供放电电流的下降波形控制电路。 主控制电路连续导致主放电电路和下降波形控制电路的放电。 提供主放电电路的放电,使得当下降波形控制电路的放电开始时它被停止。 下降波形控制电路的放电由放电电流停止电路停止。 主放电电路和下降波形控制电路连接到激光束振荡部分。 激光束振荡部根据从上述电路提供的具有受控下降波形的主放电电流和放电电流,用激光束照射工件。
    • 90. 发明授权
    • Optical modulator
    • 光调制器
    • US4364014A
    • 1982-12-14
    • US891542
    • 1978-03-30
    • Richard W. Gray
    • Richard W. Gray
    • G02F1/01H01S3/102H01S3/10
    • H01S3/102G02F1/0126
    • An optical modulator is provided in which one light beam is modulated by another. The modulator of the invention includes a saturable medium which is capable of amplifying an optical signal by stimulated emission of radiation. Two optical signals, in the form of two light beams are caused to pass through the medium and to emerge from the medium in amplified form. The beams, however, are caused to have different gains in the medium either by causing the beams to have different path lengths, or by other means. The beams are intercoupled by cross-saturation of the medium. Thus, any variations in the intensity of one of the beams causes a change in intensity in the other beam. Since one of the beams has a greater gain than the other, a small change in the intensity of one of the beams will produce a large change in the intensity of the other beam, thus producing in many aspects the optical analog of the transistor. The modulator of the invention shall be referred to herein as an "opto-optic" modulator.
    • 提供了一种光调制器,其中一个光束被另一个光束调制。 本发明的调制器包括能够通过受辐射辐射放大光信号的可饱和介质。 使两个光束形式的两个光信号通过介质并以放大形式从介质中出射。 然而,通过使光束具有不同的路径长度,或通过其他方式,使光束在介质中具有不同的增益。 光束通过介质的交叉饱和相互耦合。 因此,一个光束的强度的任何变化导致另一个光束的强度变化。 由于一束光束的增益大于另一光束,所以一束光束的强度的小的变化将产生另一光束的强度的大的变化,从而在许多方面产生晶体管的光模拟。 本发明的调制器在本文中将被称为“光电”调制器。