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1. 发明授权

US09739612B2 Sensor including moving masses and means for detecting relative movements of the masses 有权
公开(公告)号：US09739612B2
公开(公告)日：2017-08-22
申请号：US15037832
申请日：2014-11-20
申请人： Safran Electronics & Defense
发明人： Alain Jeanroy , Philippe Onfroy
IPC分类号： G01C19/00 , G01P3/44 , G01P9/00 , G01P15/08 , G01C19/574 , B81B3/00 , B81C1/00 , G01P15/097
CPC分类号： G01C19/574 , B81B3/0021 , B81B3/007 , B81B2201/0242 , B81B2201/0271 , B81B2203/0109 , B81B2203/04 , B81C1/00658 , G01P15/097 , G01P2015/084
摘要： A MEMS type inertial sensor comprising a support structure having at least a first seismic body and a second seismic body connected thereto by resilient means in order to be movable in a suspension plane, transducers for maintaining the seismic bodies in vibration and for determining movements of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conductor means. The transducers comprise at least one electrode secured to the first seismic body and at least one electrode secured to the second seismic body, the two electrodes being arranged to enable relative movements of the seismic bodies relative to each other in the suspension plane to be measured directly.

2. 发明授权

US08240204B2 Synchronous detection circuit, sensing circuit, physical quantity measuring device, gyro sensor, and electronic apparatus 有权
标题翻译：同步检测电路，感测电路，物理量测量装置，陀螺仪传感器和电子设备
公开(公告)号：US08240204B2
公开(公告)日：2012-08-14
申请号：US12407424
申请日：2009-03-19
申请人： Masahiro Kanai , Asami Kobayashi , Naoki Yoshida
发明人： Masahiro Kanai , Asami Kobayashi , Naoki Yoshida
IPC分类号： G01P9/00 , G01C19/00
CPC分类号： G01C19/56 , G01P15/097
摘要： A synchronous detection circuit includes: an offset compensation circuit which generates an offset compensation voltage to compensate an offset voltage superposed on a direct current voltage signal; and a temperature compensation circuit which generates a temperature compensation voltage to compensate variation of a direct current reference voltage that depends on a temperature in a signal path of a sensing circuit. In the circuit, the synchronous detection circuit synchronously detects an alternating current signal, the offset compensation voltage and the temperature compensation voltage are respectively superposed on the alternating current signal which is input into the synchronous detection circuit, and the synchronous detection circuit synchronously detects the alternating current signal on which the offset compensation voltage and the temperature compensation voltage have been superposed.
摘要翻译：一种同步检测电路包括：偏移补偿电路，产生偏移补偿电压以补偿叠加在直流电压信号上的偏移电压; 以及温度补偿电路，其生成温度补偿电压，以补偿依赖于感测电路的信号路径中的温度的直流参考电压的变化。在该电路中，同步检测电路同步检测交流信号，偏移补偿电压和温度补偿电压分别叠加在输入到同步检测电路的交流信号上，同步检测电路同步检测交替偏移补偿电压和温度补偿电压叠加的电流信号。

3. 发明授权

US08234091B2 Angular velocity sensor correcting apparatus for deriving value for correcting output signal from angular velocity sensor, angular velocity calculating apparatus, angular velocity sensor correcting method, and angular velocity calculating method 有权
标题翻译：角速度传感器校正装置，用于从角速度传感器，角速度计算装置，角速度传感器校正方法和角速度计算方法得出校正输出信号的值
公开(公告)号：US08234091B2
公开(公告)日：2012-07-31
申请号：US12606061
申请日：2009-10-26
申请人： Takahiro Kondoh
发明人： Takahiro Kondoh
IPC分类号： G01C17/38 , G01C19/00 , G01P9/00 , G01P15/097 , G01P3/00
CPC分类号： G01C21/28
摘要： A measuring unit obtains measurement data of an object measured on the basis of a signal from a GPS satellite and angular velocity of an object output from an angular velocity sensor. An offset value computing unit estimates a running condition of the object on the basis of the measurement data and the angular velocity. The offset value computing unit sequentially derives temporary offset values while changing combination of the measurement data and the angular velocity in accordance with the estimated running condition of the object and, after that, executes statistical process on the temporary offset values, thereby deriving an offset value. An angular velocity conversion coefficient computing unit sequentially derives temporary angular velocity conversion coefficients on the basis of the measurement data and the angular velocity and, after that, executes statistical process on the temporary angular velocity conversion coefficients, thereby deriving an angular velocity conversion coefficient. An angular velocity converting unit derives final angular velocity on the basis of the angular velocity conversion coefficient, the offset value, and the angular velocity.
摘要翻译：测量单元获得基于来自GPS卫星的信号测量的物体的测量数据和从角速度传感器输出的物体的角速度。偏移值计算单元基于测量数据和角速度估计对象的运行状况。偏移值计算单元根据估计的对象的运行状况，在改变测量数据和角速度的组合的同时依次导出临时偏移值，然后对临时偏移值执行统计处理，从而得到偏移值。角速度转换系数计算单元根据测量数据和角速度依次导出临时角速度转换系数，然后对临时角速度转换系数执行统计处理，从而导出角速度转换系数。角速度转换单元基于角速度转换系数，偏移值和角速度导出最终的角速度。

4. 发明申请

US20120024059A1 Yaw rate sensor and method for manufacturing a mass element 有权
标题翻译：偏心率传感器和制造质量元件的方法
公开(公告)号：US20120024059A1
公开(公告)日：2012-02-02
申请号：US13179157
申请日：2011-07-08
申请人： Johannes CLASSEN
发明人： Johannes CLASSEN
IPC分类号： G01P9/00 , B05D5/12
CPC分类号： G01C19/5747
摘要： A yaw rate sensor includes a drive device, at least one mass element which is connected to the drive device, and at least one detection electrode for detecting a motion of the mass element. The mass element has a base layer and at least one web which is situated on the base layer. Also, a method for manufacturing a mass element.
摘要翻译：偏航率传感器包括驱动装置，连接到驱动装置的至少一个质量元件和用于检测质量元件的运动的至少一个检测电极。质量元件具有基底层和位于基底层上的至少一个腹板。另外，制造质量元件的方法。

5. 发明授权

US08037755B2 Physical quantity sensor 有权
标题翻译：物理量传感器
公开(公告)号：US08037755B2
公开(公告)日：2011-10-18
申请号：US12442437
申请日：2007-09-21
申请人： Yoichi Nagata , Tohru Yanagisawa
发明人： Yoichi Nagata , Tohru Yanagisawa
IPC分类号： G01P9/00
CPC分类号： G01P15/097 , G01C19/56 , G01D3/021
摘要： A physical quantity sensor 1 comprises a driving circuit 4 that drives a sensor element based on a reference signal; the sensor element 3 that is driven by the driving circuit 4 to convert an externally applied physical quantity to an electrical signal; and an amplifier circuit 5 that amplifies an output signal of the sensor element 3. The driving circuit 4 controls a driving signal, which drives the sensor element, based on the reference signal so that the driving signal is at a fixed level, and the amplifier circuit 5 has a gain characteristic that amplifies the output signal in a direction reverse to a direction in which the reference signal varies or the driving signal of the driving circuit varies. This configuration allows the physical quantity sensor to reduce output level variations in the sensor output against signal level variations in the reference signal and to make the sensitivity constant.
摘要翻译：物理量传感器1包括基于参考信号驱动传感器元件的驱动电路4; 由驱动电路4驱动以将外部施加的物理量转换为电信号的传感器元件3; 以及放大电路5，其放大传感器元件3的输出信号。驱动电路4根据参考信号控制驱动传感器元件的驱动信号，使得驱动信号处于固定电平，放大器电路5具有在与参考信号变化的方向相反的方向或驱动电路的驱动信号变化的方向上放大输出信号的增益特性。该配置允许物理量传感器降低传感器输出中的输出电平变化，防止参考信号中的信号电平变化，并使灵敏度保持不变。

6. 发明申请

US20110051144A1 INTEGRATED RESONATING GYRO ACCELEROMETER IN A SEMICONDUCTOR SUBSTRATE 失效
标题翻译：在半导体基板中集成的共振加速度计
公开(公告)号：US20110051144A1
公开(公告)日：2011-03-03
申请号：US12330419
申请日：2008-12-08
申请人： Ray Wilfinger , Eric Bailey , Carl Wingard
发明人： Ray Wilfinger , Eric Bailey , Carl Wingard
IPC分类号： G01C19/64 , G01P9/00 , G01P15/12
CPC分类号： G01C19/721 , G01C21/16 , G01P15/097 , G01P15/123 , G01P15/18
摘要： An integrated interferometric gyroscope and accelerometer device. An example device includes a cantilever beam, a package having a post connected to one end of the beam, a piezoresistor driver, a piezoresistor sensor, and a semiconductor interferometric optical gyro. The piezoresistor driver is incorporated within the beam at a first area proximate to the post. The driver electro-thermally resonates the beam. The piezoresistor sensor is incorporated within the beam at the first area. The sensor piezoresitively senses a signal that relates to an acceleration force out-of-plane of the beam. The semiconductor interferometric optical gyro is also incorporated within the beam at a second area of the beam. The gyro senses rotational motion about an axis approximately equivalent to the acceleration force out-of-plane of the beam. The gyro includes a waveguide, a laser source and a light detector. The beam is formed from a semiconductor substrate.
摘要翻译：集成干涉陀螺仪和加速度计装置。示例性装置包括悬臂梁，具有连接到梁的一端的柱的封装，压电电阻驱动器，压电电阻传感器和半导体干涉光学陀螺仪。压电电阻驱动器在靠近柱的第一区域内并入梁内。驱动器电热谐振光束。压电电阻传感器结合在第一区域的光束内。传感器压阻地感测与束的平面外的加速力有关的信号。半导体干涉光学陀螺仪也被结合在波束的第二区域内。陀螺仪感测绕近似等于梁的平面外的加速力的轴的旋转运动。陀螺仪包括波导，激光源和光检测器。光束由半导体衬底形成。

7. 发明授权

US07578187B2 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor 有权
标题翻译：振动陀螺传感器及调节振动陀螺传感器的方法
公开(公告)号：US07578187B2
公开(公告)日：2009-08-25
申请号：US11950725
申请日：2007-12-05
申请人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
发明人： Kazuo Takahashi , Teruo Inaguma , Manabu Aizawa , Koji Suzuki , Shin Sasaki , Eiji Nakashio
IPC分类号： G01P3/00 , G01P9/00
CPC分类号： G01C19/5663 , Y10T29/49002
摘要： A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.
摘要翻译：一种振动陀螺仪传感器元件，包括悬臂振动器，悬臂振子上的至少一个第一凹陷，设置在悬臂振动器上的一对检测电极和悬臂振子上的至少一个第二凹陷。从振动陀螺仪传感器元件的基部突出的悬臂振子和第一凹陷有效地调节振动器的垂直共振频率和水平共振频率之间的频率差。此外，第二凹陷有效地调节从检测电极输出的信号的差异。

8. 发明授权

US07363814B2 Multi-axial angular velocity sensor 失效
标题翻译：多轴角速度传感器
公开(公告)号：US07363814B2
公开(公告)日：2008-04-29
申请号：US11398380
申请日：2006-04-05
申请人： Kazuhiro Okada
发明人： Kazuhiro Okada
IPC分类号： G01P9/00 , G01P3/44
CPC分类号： G01P15/125 , G01C19/56 , G01P15/0907 , G01P15/0922 , G01P15/11 , G01P15/123 , G01P15/18 , G01P2015/084
摘要： An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a device for oscillating the oscillator in an X-axis direction, and a detection device detecting deviation of oscillation of the oscillator in a Y-axis direction for indicating the angular velocity about the Z-axis.
摘要翻译：用于在XYZ坐标系中检测围绕Z轴的角速度的角速度传感器具有基板振荡器，用于将振荡器连接到壳体的柔性部件，用于在X轴方向振荡振荡器的装置和检测器件检测振荡器在Y轴方向上的振荡的偏差，用于指示围绕Z轴的角速度。

9. 发明授权

US07159461B2 Vibrating rate gyro with slaving of detection frequency to excitation frequency 有权
标题翻译：振动率陀螺仪具有检测频率到激励频率
公开(公告)号：US07159461B2
公开(公告)日：2007-01-09
申请号：US10539766
申请日：2003-12-18
申请人： Pierre Gallon , Bernard Chaumet
发明人： Pierre Gallon , Bernard Chaumet
IPC分类号： G01C19/00 , G01P9/00
CPC分类号： G01C19/56
摘要： The invention relates to a gyroscope comprising at least one mass capable of vibrating along an x axis at a resonant excitation frequency Fx capable of vibrating along a y axis perpendicular to the x axis, at a resonant detection frequency Fy, under the effect of a Coriolis force generated by a rotation about a z axis perpendicular to the x and y axes. It includes, connected to the mass or masses, a feedback control loop for controlling the resonant frequency Fy so that Fy is equal or practically equal to Fx throughout the duration of use of the gyroscope.
摘要翻译：本发明涉及一种陀螺仪，该陀螺仪包括至少一个能够沿着垂直于x轴的垂直轴振动的共振激发频率F x沿着x轴振动的物质，谐振检测频率F 在由围绕z轴垂直于x和y轴的旋转产生的科里奥利力的作用下。它包括连接到质量块或质量块的反馈控制回路，用于控制共振频率F Y y，使得F Y y等于或实际上等于F x 在使用陀螺仪的整个持续时间内。

10. 发明授权

US07155976B2 Rotation sensing apparatus and method for manufacturing the same 有权
标题翻译：旋转传感装置及其制造方法
公开(公告)号：US07155976B2
公开(公告)日：2007-01-02
申请号：US11028524
申请日：2005-01-05
申请人： Chang Kai-Cheng , Liang Pei-Fang , Hsu Ming-Hsiu , Chen Yi-Ru , Chen Ya-Ping
发明人： Chang Kai-Cheng , Liang Pei-Fang , Hsu Ming-Hsiu , Chen Yi-Ru , Chen Ya-Ping
IPC分类号： G01C19/00 , G01P9/00
CPC分类号： G01C19/5719
摘要： The invention provides a rotation sensing apparatus and method for manufacturing the same, in which the rotation sensing apparatus comprises at least a pair of vibration parts and a sensing electrode. The pair of vibration parts is disposed on a substrate symmetrically and each vibration part comprises an electrostatic vibrating body, a fixed support and an elastic body. The electrostatic vibrating body is away from the substrate with an appropriate distance. The fixed support connects with the electrostatic vibrating body and the substrate. The elastic body connects the fixed support with some rods thereof and connects with the electrostatic vibrating body with some other rods thereof. The sensing electrode is disposed on the substrate and under the at least pair of vibration parts. The pair of vibration parts can vibrate horizontally by electrostatic force and will sway vertically to the substrate by Coriolis force when a rotation occurs. The rotation can be measured by detecting the change of capacitance between the electrostatic vibrating body and the sensing electrode.
摘要翻译：本发明提供了一种旋转感测装置及其制造方法，其中旋转感测装置至少包括一对振动部分和感测电极。该对振动部件对称地设置在基板上，并且每个振动部分包括静电振动体，固定支撑件和弹性体。静电振动体距适当距离的基板。固定支架与静电振动体和基板连接。弹性体将固定支撑件与其一些杆连接，并与静电振动体与其它一些杆连接。感测电极设置在基板上并且在至少一对振动部分之下。一对振动部件可以通过静电力水平振动，并且当旋转发生时将通过科里奥利力垂直于基板摆动。可以通过检测静电振动体和感测电极之间的电容的变化来测量旋转。

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