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81. 发明申请

US20050012570A1 Component functioning with bulk acoustic waves having coupled resonators 有权
标题翻译：具有耦合谐振器的体声波的分量
公开(公告)号：US20050012570A1
公开(公告)日：2005-01-20
申请号：US10837211
申请日：2004-04-30
申请人： Christian Korden , Werner Ruile
发明人： Christian Korden , Werner Ruile
IPC分类号： H03H9/00 , H03H9/13 , H03H9/15 , H03H9/54 , H03H9/56 , H03H9/58 , H03H9/60
CPC分类号： H03H9/564 , H03H9/0095 , H03H9/583 , H03H9/589 , H03H9/605
摘要： A component that functions with bulk acoustic waves, particularly a bandpass filter, has an increased number of degrees of design freedom in order to improve the transmission characteristics of the component. The component has BAW resonators coupled acoustically in the vertical and/or lateral direction through common electrodes, coupling layer systems and through the excitation of lateral acoustic modes. Through the acoustic coupling of the resonators, it is possible to create additional pole points in the transfer function so that in this manner, the rejection band characteristics of a bandpass filter can be improved. Through acoustic paths which are added in addition to the electrical connection, the insertion loss can be reduced. Through an acoustic coupling instead of an electrical connection, decoupling between input and output loops of a circuit can be achieved.
摘要翻译：与体声波特别是带通滤波器一起使用的部件具有增加的设计自由度，以提高部件的传输特性。该组件具有通过公共电极，耦合层系统和通过横向声学模式的激励而在垂直和/或横向方向上声学耦合的BAW谐振器。通过谐振器的声耦合，可以在传递函数中产生额外的极点，从而以这种方式可以提高带通滤波器的阻带特性。通过除了电连接之外加上的声学路径，可以减少插入损耗。通过声耦合而不是电连接，可以实现电路的输入和输出环路之间的去耦。

82. 发明授权

US6046656A Elastic boundary wave device and method of its manufacture 有权
标题翻译：弹性边界波装置及其制造方法
公开(公告)号：US6046656A
公开(公告)日：2000-04-04
申请号：US147485
申请日：1999-01-08
申请人： Naoyuki Mishima
发明人： Naoyuki Mishima
IPC分类号： H03H9/145 , H03H9/02 , H03H9/46 , H03H9/15
CPC分类号： H03H9/0222 , Y10T29/42
摘要： A boundary wave device and a fabrication method thereof that allow the conversion efficiency of a boundary wave excited by electrodes to be improved and prevents the device from being affected by parasitical resistance between the electrodes are provided. interdigital transducers 3 are formed on a main surface of a piezoelectric first substrate 2. A dielectric film 5 is formed on a main surface of the first substrate 2 so that the dielectric film 5 coats the interdigital transducers 3 and has a smooth surface 4. A Si second substrate 6 is layered on the dielectric film 5.
摘要翻译： PCT No.PCT / JP98 / 02008 Sec。 371日期1999年1月8日第 102（e）日期1999年1月8日PCT提交1998年5月6日PCT公布。公开号WO98 / 51011 PCT 日期：1998年11月12日提供允许改善由电极激发的边界波的转换效率的边界波器件及其制造方法，并且防止器件受到电极之间的寄生电阻的影响。叉指换能器3形成在压电第一基板2的主表面上。电介质膜5形成在第一基板2的主表面上，使得电介质膜5涂覆叉指换能器3并具有平滑表面4.A Si第二基板6层叠在电介质膜5上。

83. 发明授权

US5969462A Extensional mode piezoelectric crystal resonator with split electrodes and transformer driving circuit 失效
标题翻译：具有分离电极和变压器驱动电路的扩展模式压电晶体谐振器
公开(公告)号：US5969462A
公开(公告)日：1999-10-19
申请号：US99156
申请日：1998-06-18
申请人： Jin Huang , Charles L. Zimnicki , John E. Mattson
发明人： Jin Huang , Charles L. Zimnicki , John E. Mattson
IPC分类号： H01L41/107 , H03H9/17 , H03H9/54 , H03H9/56 , H03H9/15
CPC分类号： H03H9/562 , H01L41/107 , H03H9/542
摘要： A piezoelectric resonator (10) includes a single crystal elongated plate (12) having a transverse extensional mode of oscillation. Two sets of split electrodes (20,22,30,32) are provided on the surfaces (14,16) of the plate (12) to define two acoustically coupled oscillating regions (24,26) therebetween. The oscillating regions (24,26) present a similar inductance and have similar performance to allow the use of the resonator (10) in a double-ended electrical transformer circuit (100). An AC source (112) drives non-opposing top and bottom electrodes of the resonator (110). The remaining electrodes are coupled with shunt capacitors to provide two resonant LC circuits with the resonator (110) so as to provide a voltage gain for driving a load.
摘要翻译：压电谐振器（10）包括具有横向延伸振荡模式的单晶细长板（12）。在板（12）的表面（14,16）上设置两组分裂电极（20,22,30,32），以在它们之间限定两个声耦合振荡区域（24,26）。振荡区域（24,26）具有类似的电感并且具有类似的性能，以允许在双端电力变压器电路（100）中使用谐振器（10）。 AC源（112）驱动谐振器（110）的不相对的顶部和底部电极。剩余电极与分流电容器耦合，以提供与谐振器（110）的两个谐振LC电路，以便提供用于驱动负载的电压增益。

84. 发明授权

US5446335A Piezoresonator with a built-in capacitor and a manufacturing method thereof 失效
标题翻译：具有内置电容器的压电振荡器及其制造方法
公开(公告)号：US5446335A
公开(公告)日：1995-08-29
申请号：US197730
申请日：1994-02-17
申请人： Taketoshi Hino
发明人： Taketoshi Hino
IPC分类号： H03H3/02 , H03H9/05 , H03H9/10 , H03H9/56 , H03H9/60 , H03H9/15
CPC分类号： H03H9/562 , H03H9/0542
摘要： A piezoresonator which has, on a piezoelectric substrate, a plurality of oscillation sections and a coupling capacitor section for electrically connecting the oscillation sections with each other. The piezoelectric substrate is polarized, while the portion holding the coupling capacitor section is partly left unpolarized. Alternatively, the piezoelectric substrate is entirely polarized such that the portion holding the coupling capacitor section has a lower intensity of polarization than the rest of the substrate. The polarization is carried out, for example, in the following process: first, a direct voltage is applied to the entire piezoelectric substrate so as to polarize the substrate entirely with a high intensity; and then, a direct voltage with the inverse polarity of the former direct current is applied only to the portion holding the coupling capacitor section so as to lower the intensity of polarization of the portion.
摘要翻译：一种在压电基板上具有多个振荡部分和用于将振荡部分彼此电连接的耦合电容器部分的压电振荡器。压电基板是极化的，而保持耦合电容器部分的部分部分地是非偏振的。或者，压电基板完全极化，使得保持耦合电容器部分的部分具有比基板的其余部分更低的偏振强度。例如，在以下的工序中进行极化化：首先，对整个压电基板施加直流电压，使基板全部以高强度极化; 然后，将具有与前一直流电流的反极性的直流电压仅施加到保持耦合电容器部分的部分，以降低该部分的极化强度。

85. 发明授权

US4760358A Piezoelectric element 失效
标题翻译：压电元件
公开(公告)号：US4760358A
公开(公告)日：1988-07-26
申请号：US893937
申请日：1986-08-06
申请人： Jiro Inoue
发明人： Jiro Inoue
IPC分类号： H03H9/13 , H03H9/54 , H03H9/56 , H03H9/15 , H03H9/205
CPC分类号： H03H9/132 , H03H9/542 , H03H9/56
摘要： A three-terminal piezoelectric filter element includes a quadrilateral piezoelectric plate having first and second surfaces, a ring electrode deposited on said first surface at the periphery of said piezoelectric plate, a center electrode deposited on said first surface at an area within said ring electrode, and a ground electrode deposited on said second surface of said piezoelectric plate. The center electrode has four arms extending from the center of piezoelectric plate in a shape of the X along the diagonals of said piezoelectric plate. The ring electrode and the center electrode may be connected to define a two-terminal piezoelectric resonator element.
摘要翻译：三端压电滤波器元件包括具有第一和第二表面的四边形压电板，沉积在所述压电板周边的所述第一表面上的环形电极，在所述环形电极内的区域上沉积在所述第一表面上的中心电极，以及沉积在所述压电板的所述第二表面上的接地电极。中心电极具有从压电板的中心沿着所述压电板的对角线延伸的X形状的四个臂。环形电极和中心电极可以被连接以限定两端压电谐振元件。

86. 发明授权

US4706048A Wide-band matching network for piezoelectric transducer 失效
标题翻译：用于压电传感器的宽带匹配网络
公开(公告)号：US4706048A
公开(公告)日：1987-11-10
申请号：US712108
申请日：1985-03-15
申请人： Abdullah Atalar
发明人： Abdullah Atalar
IPC分类号： H03H9/54 , H03H7/38 , H03H9/13 , H03H9/15
CPC分类号： H03H7/38
摘要： Wide-band network for matching a signal-conducting line having a characteristic impedance of 50 ohms to a piezoelectric transmitter having a capacitance C.sub.o and a reactance X.sub.o for a center frequency f.sub.o of the frequency band to be transmitted. Various circuit arrangements and dimensioning rules for the circuit elements are specified as a function of the reactance X.sub.o. The transmitter is a part of an acoustic lens arrangement.
摘要翻译：宽带网络，用于将具有50欧姆特性阻抗的信号导线与具有要传输的频带的中心频率fo的电容Co和电抗Xo匹配的压电发射机匹配。电路元件的各种电路布置和尺寸规则被规定为电抗Xo的函数。发射机是声透镜装置的一部分。

87. 发明授权

US4360792A Separable multi-unit crystal network device 失效
标题翻译：可分离多单元晶体网络设备
公开(公告)号：US4360792A
公开(公告)日：1982-11-23
申请号：US183130
申请日：1980-09-02
申请人： John D. Jennings , Walter E. Killerby , Robert L. Reynolds
发明人： John D. Jennings , Walter E. Killerby , Robert L. Reynolds
IPC分类号： H03H9/05 , H03H9/10 , H03H9/58 , H03H9/15
CPC分类号： H03H9/0533
摘要： A crystal network device (10 or 200) includes a plurality of separable interconnected crystal resonator devices (12, 14, 16 and 18 or 202, 204 and 206) having different resonant frequencies. Each of the crystal resonator devices comprises a molded plastic support member (22, 68, 90, 142 or 208, 264, 283) having a plurality of unitary terminals (32, 120 or 222, 264, 292), which may be of J-shaped construction, mounted thereon. Each crystal resonator device (12, 14, 16, 18 or 202, 204, 206) also includes a crystal resonator plate (30, 84, 102, 150 or 224, 268, 298) mounted on a respective one of the support members (22, 68, 90, 142 or 208, 264, 283) by lead wires (54, 138 or 226, 270, 300) extending from the plate and bonded to enlarged wire terminating sections (48, 126 or 230, 274, 304) of the terminals (32, 120 or 122, 264, 292) so as to produce a free wire length of the lead wires on the order of an odd multiple of one-quarter wave length of the respective lead wires, when the lead wires are resonant at the resonant frequency of their respective crystal resonator plates. Legs (36, 122 or 218, 260, 290) of the terminals (32, 120 or 122, 264, 292) project from the crystal network device (10 or 200) for mounting and interconnecting the device on a printed circuit board (20 or 310).
摘要翻译：晶体网络装置（10或200）包括具有不同谐振频率的多个可分离的互连晶体谐振器装置（12,14,16和18或202,204和206）。每个晶体谐振器装置包括具有多个单位端子（32,120或222,264,292）的模制塑料支撑构件（22,68,90,142或208,264,283），其可以是J 形结构。每个晶体谐振器装置（12,14,16,18或202,204,206）还包括安装在相应的一个支撑构件上的晶体谐振器板（30,84,102,150或224,268,298） 22，68，90，142或208,264,283）通过从该板延伸并结合到扩大的电线端接部分（48,126或230,274,304）上的引线（54,138或226,270,300）的端子（32,120或122,264,292），以便当引线是导线时，产生导线的四分之一波长的奇数倍的数量级的引线的自由导线长度在其各自的晶体谐振器板的谐振频率处共振。端子（32,120或122,264,292）的腿部（36,122或218,260,290）从晶体网络装置（10或200）突出，用于将装置安装和互连在印刷电路板（20 或310）。

88. 发明授权

US4349794A Shallow bulk acoustic wave devices 失效
标题翻译：浅体积声波装置
公开(公告)号：US4349794A
公开(公告)日：1982-09-14
申请号：US954149
申请日：1978-10-24
申请人： Reynold S. Kagiwada , Kuo-Hsiung Yen , Ke-Li Wang , Kei F. Lau , Donald L. Lochhead , James A. Leaverton
发明人： Reynold S. Kagiwada , Kuo-Hsiung Yen , Ke-Li Wang , Kei F. Lau , Donald L. Lochhead , James A. Leaverton
IPC分类号： H03H9/02 , H03H9/15 , H03B5/32 , H03H9/36
CPC分类号： H03H9/02795 , H03H9/02236 , H03H9/02653 , H03H9/027 , H03H9/02716
摘要： Acoustic wave devices employing shallow bulk acoustic waves rather than surface acoustic waves, to provide higher frequencies of operation and other significant advantages, such as less susceptibility to aging and less sensitivity to surface contamination. In each embodiment of the invention, a transmitting transducer and a receiving transducer are oriented on the surface of an anisotropic piezoelectric crystal to achieve substantial coupling of shallow bulk acoustic waves and essentially zero coupling of surface acoustic waves. In one embodiment of the invention, various types of grating filters utilize shallow bulk acoustic waves, and a set of parallel mechanical or electrical discontinuities at or near the surface of the crystal provide reflection of acoustic energy at a frequency determined by the spacing of the discontinuities. Uniformly spaced gratings provide bandpass filter operation, and gratings with graduated spacings provide for frequency compression or expansion. In another embodiment of the invention, variations in device characteristics due to temperature changes are compensated for by directing the shallow bulk waves through materials having favorable or opposite temperature characteristics compared with those of the material into which the waves are originally launched. In other embodiments of the invention, a shallow bulk acoustic wave includes a multistrip coupler, for transferring electroacoustic energy from one propagation path to another, for use in bandpass filters, delay lines or unidirectional transducers.
摘要翻译：使用浅体积声波而不是表面声波的声波装置，以提供更高的操作频率和其他显着的优点，例如对老化的敏感性较低和对表面污染的敏感性较小。在本发明的每个实施例中，发射换能器和接收换能器定向在各向异性压电晶体的表面上，以实现浅体积声波和表面声波的基本零耦合的实质耦合。在本发明的一个实施例中，各种类型的光栅滤波器利用浅体积声波，并且在晶体表面处或附近的一组平行的机械或电气不连续性以由不连续部分的间隔确定的频率提供声能的反射。均匀间隔的光栅提供带通滤波器操作，具有刻度间距的光栅可用于频率压缩或扩展。在本发明的另一个实施例中，由于温度变化引起的器件特性的变化是通过将浅体积波导入具有有利或相反温度特性的材料来补偿的，与材料相比，波浪最初被发射的材料。在本发明的其他实施例中，浅体积声波包括用于将电声能从一个传播路径转移到另一传播路径的多带耦合器，用于带通滤波器，延迟线或单向换能器。

89. 发明授权

US4342014A Multi-resonator crystal filter having a reduced number of pins and method of fabrication thereof 失效
标题翻译：具有减少引脚数量的多谐振器晶体滤波器及其制造方法
公开(公告)号：US4342014A
公开(公告)日：1982-07-27
申请号：US222430
申请日：1981-01-05
申请人： Aristotelis Arvanitis
发明人： Aristotelis Arvanitis
IPC分类号： H03H9/05 , H03H9/54 , H03H9/56 , H03H3/04 , H03H9/15
CPC分类号： H03H9/56 , H03H9/545 , Y10T29/42
摘要： A multi-resonator crystal filter is provided having a reduced number of electrical connecting pins. The monolithic crystal filter includes at least four resonators, namely, an input resonator, an output resonator and electrically coupled center resonators. A single electrical pin connection is made to the electrically coupled together center resonators thus avoiding the need for an individual connecting pin for each resonator.
摘要翻译：提供了具有减少数量的电连接销的多谐振器晶体滤波器。单片晶体滤波器包括至少四个谐振器，即输入谐振器，输出谐振器和电耦合中心谐振器。对电耦合在一起的中心谐振器进行单个电引脚连接，从而避免了每个谐振器需要单独的连接引脚。

90. 发明授权

US11601111B2 Piezoelectric MEMS resonators based on porous silicon technologies 有权
公开(公告)号：US11601111B2
公开(公告)日：2023-03-07
申请号：US16914079
申请日：2020-06-26
申请人： Xiang Zheng Tu
发明人： Xiang Zheng Tu
IPC分类号： H03H9/17 , H03H3/02 , H03H9/02 , H03H9/13 , H03H3/007 , H03H9/24 , H03H9/15
摘要： A piezoelectric MEMS resonator is provided. The resonator comprises a single crystal silicon microstructure suspended over a buried cavity created in a silicon substrate and a piezoelectric resonance structure located on the microstructure. The resonator is designed and fabricated based on porous silicon related technologies including selective formation and etching of porous silicon in silicon substrate, porous silicon as scarified material for surface micromachining and porous silicon as substrate for single crystal silicon epitaxial growth. All these porous silicon related technologies are compatible with CMOS technologies and can be conducted in a standard CMOS technologies platform.

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