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1. 发明授权

US08948220B2 Wavelength-stabilized microcrystal laser 有权
标题翻译：波长稳定的微晶激光器
公开(公告)号：US08948220B2
公开(公告)日：2015-02-03
申请号：US13718795
申请日：2012-12-18
申请人： Coherent GmbH
发明人： Stefan Spiekermann
IPC分类号： H01S3/113 , H01S3/10 , H01S3/06 , H01S3/139 , H01S3/02 , H01S3/04 , H01S3/042 , H01S3/105 , H01S3/16
CPC分类号： H01S3/0401 , H01S3/025 , H01S3/0405 , H01S3/042 , H01S3/0604 , H01S3/0612 , H01S3/0627 , H01S3/10 , H01S3/105 , H01S3/113 , H01S3/139 , H01S3/1611 , H01S3/1643
摘要： A microcrystal laser assembly including a gain-crystal includes a frame having a high thermal conductivity. The frame has a base with two spaced apart portions extending from the base. The gain-crystal has a resonator output minor on one surface thereof. The gain-crystal is supported on the spaced-apart portions of the frame in the space therebetween. Another resonator minor is supported in that space, spaced apart from the output mirror, on a pedestal attached to the base of the frame. The pedestal and the frame have different CTE. Varying the frame temperature varies the spacing between the resonator minors depending on the CTE difference between the pedestal and the frame.
摘要翻译：包括增益晶体的微晶激光器组件包括具有高导热性的框架。框架具有从基部延伸的两个间隔开的部分的基部。增益晶体在其一个表面上具有较小的谐振器输出。增益晶体被支撑在框架的间隔开的部分中。在连接到框架底座的基座上，另一个谐振器辅助部件被支撑在与输出反射镜间隔开的空间中。基座和框架具有不同的CTE。改变框架温度根据基座和框架之间的CTE差异来改变谐振器未成形器之间的间距。

2. 发明授权

US08937770B2 Excimer laser apparatus projecting a beam with a selectively variable short-axis beam profile 有权
标题翻译：准分子激光装置用选择性可变的短轴光束轮廓投影光束
公开(公告)号：US08937770B2
公开(公告)日：2015-01-20
申请号：US13557073
申请日：2012-07-24
申请人： Frank Simon , Paul Van Der Wilt , Ludwig Schwenger
发明人： Frank Simon , Paul Van Der Wilt , Ludwig Schwenger
IPC分类号： G02B27/10 , G02B13/08 , G02B27/09 , B23K26/00 , H01L21/02
CPC分类号： G02B27/09 , B23K26/0006 , B23K26/0608 , B23K26/0648 , B23K26/0652 , B23K26/0676 , B23K26/0732 , B23K26/354 , B23K2101/40 , B23K2103/56 , G02B27/095 , H01L21/02532 , H01L21/02686
摘要： Apparatus for homogenizing and projecting two laser-beams is arranged such that the projected homogenized beams are aligned parallel to each other in a first transverse axis and partially overlap in second transverse axis perpendicular to the first transverse axis. The projected homogenized laser-beams have different intensities in the second axis and the degree of partial overlap is selected such that the combined intensity of the laser beams in the second axis has a step profile.
摘要翻译：用于使两个激光束均匀化并投影的装置被布置成使得投射均匀化的光束在第一横向轴线上彼此平行地对准并且在垂直于第一横向轴线的第二横轴中部分重叠。投影均匀化的激光束在第二轴上具有不同的强度，并且选择部分重叠的程度，使得第二轴中的激光束的组合强度具有台阶轮廓。

3. 发明申请

US20120260847A1 AMORPHOUS SILICON CRYSTALLIZATION USING COMBINED BEAMS FROM MULTIPLE OSCILLATORS 审中-公开
标题翻译：使用多个振荡器组合的非晶硅结晶
公开(公告)号：US20120260847A1
公开(公告)日：2012-10-18
申请号：US13222956
申请日：2011-08-31
申请人： Paul Christiaan VAN DER WILT
发明人： Paul Christiaan VAN DER WILT
IPC分类号： C30B13/24
CPC分类号： H01L21/02532 , B23K26/0613 , B23K26/0622 , H01L21/02686 , H01L21/02691 , Y10T117/1088
摘要： In a silicon crystallization method, a pulse is delivered from each of two excimer lasers. The duration of one of the pulses is extended in a pulse-duration extender to a duration significantly longer than that of that of the other. The extended-duration and other pulses are delivered along a common path. The other pulse temporally overlaps the extended-duration pulse after delivery of the extended-duration pulse begins. The silicon is preheated by the extended-duration before being melted by the combined pulses during the temporal overlap period.
摘要翻译：在硅结晶方法中，从两个准分子激光器中的每一个发射脉冲。其中一个脉冲的持续时间在脉冲持续时间延长器中延伸至比另一脉冲持续时间显着更长的持续时间。延长时间和其他脉冲沿公共路径传送。在扩展持续时间脉冲的传送开始之后，另一脉冲与延长持续时间脉冲暂时重叠。在时间重叠期间，通过组合脉冲熔化硅之前预热硅延长的持续时间。

4. 发明授权

US07385210B2 Device for spectroscopy using charged analytes 有权
标题翻译：使用带电分析物的光谱仪器
公开(公告)号：US07385210B2
公开(公告)日：2008-06-10
申请号：US11471426
申请日：2006-06-20
申请人： Andreas Ulrich , Wolfgang Baether , Jochen Wieser
发明人： Andreas Ulrich , Wolfgang Baether , Jochen Wieser
IPC分类号： H01J49/00 , H01J49/08 , B01D59/44
CPC分类号： G01N27/622
摘要： A device for spectroscopy using charged analytes has an electron generator, which sends electrons through membrane into a charging chamber. The thermal strain of the membrane may be lowered significantly if a material is selected for the membrane which contains at least one component from the group of oxides, nitrides, and carbides with at least one of the elements B, Al, C, Si, and Ti or polysilicon.
摘要翻译：使用带电分析物的光谱仪器具有电子发生器，其通过膜将电子发送到充电室。如果为包含至少一种元素的氧化物，氮化物和碳化物的组分的膜选择材料，则膜的热应变可以显着降低，其中元素B，Al，C，Si和 Ti或多晶硅。

5. 发明申请

US20160276801A1 MOPA WITH EXTERNALLY TRIGGERED PASSIVELY Q-SWITCHED LASER 有权
标题翻译：具有外部触发的常开Q开关激光器的MOPA
公开(公告)号：US20160276801A1
公开(公告)日：2016-09-22
申请号：US13851275
申请日：2013-03-27
申请人： COHERENT GMBH
发明人： Stefan SPIEKERMANN
IPC分类号： H01S3/23 , H01S3/16 , H01S3/094 , H01S3/107 , H01S3/0941 , H01S3/11
CPC分类号： H01S3/2308 , H01S3/005 , H01S3/0078 , H01S3/094038 , H01S3/094076 , H01S3/09415 , H01S3/10046 , H01S3/10084 , H01S3/1022 , H01S3/107 , H01S3/11 , H01S3/113 , H01S3/1611 , H01S3/1673 , H01S2301/02
摘要： In a master oscillator plus power amplifier (MOPA) system, the oscillator is a passively Q-switched laser. The laser is triggered into passively Q-switched operation by operating an optical switch to resonantly couple back into the laser amplified stimulated emission generated by the amplifier.
摘要翻译：在主振荡器和功率放大器（MOPA）系统中，振荡器是被动Q开关激光器。通过操作光开关将激光器触发成被动Q开关操作，以共振地耦合到由放大器产生的激光放大的受激发射。

6. 发明申请

US20140241386A1 SHORT-PULSED COMPACT MOPA 有权
标题翻译：短脉冲MOPA
公开(公告)号：US20140241386A1
公开(公告)日：2014-08-28
申请号：US13778431
申请日：2013-02-27
申请人： COHERENT GMBH
发明人： Stefan SPIEKERMANN
IPC分类号： H01S3/10 , H01S3/16 , H01S3/11
CPC分类号： H01S3/06754 , H01S3/00 , H01S3/0057 , H01S3/0078 , H01S3/094053 , H01S3/10007 , H01S3/11 , H01S3/1112 , H01S3/113 , H01S3/1301 , H01S3/14 , H01S3/16 , H01S3/1611 , H01S3/1671 , H01S3/1673 , H01S3/1698 , H01S3/2308 , H01S2301/04
摘要： A master oscillator power amplifier (MOPA) system includes an oscillator having a neodymium-doped gadolinium vanadate gain-medium and delivering seed-pulses. A length of single mode fiber is used to broaden the spectrum of the seed pulse. An amplifier having a neodymium-doped yttrium vanadate gain-medium amplifies the spectrally broadened seed-pulses. The gain-spectrum of the amplifier partially overlaps the broadened pulse-spectrum, providing spectral selection of the seed-pulses in addition to amplification. This provides amplified output-pulses having a duration about one-third that of the corresponding seed-pulses.
摘要翻译：主振荡器功率放大器（MOPA）系统包括具有钕掺杂的钒酸钆增益介质并输送种子脉冲的振荡器。使用单模光纤的长度来扩大种子脉冲的光谱。具有钕掺杂钇钒酸盐增益介质的放大器放大光谱扩展的种子脉冲。放大器的增益谱与扩展的脉冲频谱部分重叠，除了放大之外，还提供种子脉冲的频谱选择。这提供了放大的输出脉冲，其持续时间约为相应种子脉冲的三分之一。

7. 发明授权

US08761213B2 Wavelength-stabilized frequency-converted optically pumped semiconductor laser 有权
标题翻译：波长稳定的变频光泵浦半导体激光器
公开(公告)号：US08761213B2
公开(公告)日：2014-06-24
申请号：US13632372
申请日：2012-10-01
申请人： Coherent GmbH
发明人： Wolf Seelert , Vasiliy Ostroumov
IPC分类号： H01S3/10 , H01S3/00 , H01S3/02 , H01S3/08 , H01S3/09 , H01S3/091 , H01S3/093 , H01S3/04 , H01S3/102
CPC分类号： H01S3/0014 , H01S3/00 , H01S3/0078 , H01S3/0092 , H01S3/025 , H01S3/04 , H01S3/08072 , H01S3/0815 , H01S3/09 , H01S3/091 , H01S3/093 , H01S3/1028 , H01S3/109 , H01S5/0092 , H01S5/02446 , H01S5/041 , H01S5/0687 , H01S5/141
摘要： A frequency-doubled OPS-laser having a desired output wavelength of 532 nm is tunable about that wavelength by a temperature tuned birefringent filter (BRF). The temperature of the BRF is varied while measuring transmission of a sample of the output through a Nd:YAG crystal having an absorption peak at a wavelength of about 532.4 nm. The peak is detected as a minimum of transmission and the temperature at which that minimum occurs is recorded. From wavelength-change-versus-temperature data for the BRF a temperature is calculated at which the output wavelength has the desired value and is maintained at that value to stabilize the output wavelength.
摘要翻译：具有532nm的期望输出波长的倍频OPS激光器可通过温度调节双折射滤光器（BRF）围绕该波长可调。 BRF的温度在测量通过具有约532.4nm的波长的吸收峰的Nd：YAG晶体的输出样品的透射的同时变化。峰值被检测为传输的最小值，记录发生最小值的温度。根据BRF的波长变化对温度数据，计算输出波长具有期望值并保持在该值以稳定输出波长的温度。

8. 发明申请

US20130034118A1 GAS PURIFIER FOR AN EXCIMER LASER 审中-公开
标题翻译：用于激光激光的气体净化器
公开(公告)号：US20130034118A1
公开(公告)日：2013-02-07
申请号：US13198484
申请日：2011-08-04
申请人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
发明人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/2253
摘要： An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration.
摘要翻译：准分子激光器包括含有包含卤素的激光气体混合物的激光器壳体。在激光器的操作期间，在激光 - 气体混合物中产生包括颗粒物质和金属卤化物蒸气的污染物。气体清洁装置从壳体中提取激光气体混合物，并将激光气体混合物通过电极组件。通过用重复的大功率短脉冲脉冲驱动电极组件，在电极组件中产生反复脉冲的气体放电。脉冲放电会导致金属卤化物蒸气的分解和颗粒物质的电极组件中的静电捕获以及金属卤化物的分解产物。

9. 发明授权

US08192790B2 Electrodes for generating a stable discharge in gas laser systems 有权
标题翻译：用于在气体激光系统中产生稳定放电的电极
公开(公告)号：US08192790B2
公开(公告)日：2012-06-05
申请号：US12792625
申请日：2010-06-02
申请人： Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
发明人： Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
IPC分类号： H01S3/097 , H01S3/03 , H01S3/00 , H01S3/083
CPC分类号： H01S3/225 , H01S3/0384 , H01S3/0388
摘要： Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.
摘要翻译：通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电，在气体激光器系统的放电室中使电弧最小化，肩部位于表面部分的任一侧并暴露于气体混合物，以及由电绝缘材料制成的涂层，其中涂层通过冷喷涂法附着到肩部。

10. 发明申请

US20120033689A1 HIGH-PRECISION SYNCHRONIZATION OF PULSED GAS-DISCHARGE LASERS 有权
标题翻译：脉冲排放激光器的高精度同步
公开(公告)号：US20120033689A1
公开(公告)日：2012-02-09
申请号：US12852864
申请日：2010-08-09
申请人： Andreas TARGSDORF , Rainer Desor
发明人： Andreas TARGSDORF , Rainer Desor
IPC分类号： H01S3/10
CPC分类号： H01S3/09702 , H01S3/225 , H01S3/2383
摘要： Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.
摘要翻译：两个准分子激光器具有单独的脉冲电路，每个脉冲电路包括存储电容器，其被充电然后通过脉冲变压器放电以产生电脉冲，其被传送到激光器以产生光脉冲。产生电脉冲和产生光脉冲之间的时间取决于电容器的充电电压。电容器在彼此断开时被充电。电容脉冲的产生通过在将电容器充电之后的短时间内将电容器连接在一起来同步，以均衡充电电压。电容器在放电之前彼此断开。

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