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    • 2. 发明授权
    • Three-dimensional micro-electro-mechanical-system sensor
    • 三维微机电系统传感器
    • US09010185B2
    • 2015-04-21
    • US13482989
    • 2012-05-29
    • Ming-Han TsaiChih-Ming Sun
    • Ming-Han TsaiChih-Ming Sun
    • G01P15/125G01P15/18G01P15/08
    • G01P15/125G01P15/18G01P2015/082G01P2015/084G01P2015/0845
    • The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.
    • 本发明公开了一种三维微机电系统传感器。 传感器包括可移动的第一电极,多个可移动的第二电极,多个固定的第三电极和多个固定的第四电极。 第一电极及其相邻的第三电极形成至少一个第一电容器和至少一个第二电容器,并且第二电极及其相邻的第四电极形成至少一个第三电容器。 第一电容器的电容变化反映了沿着第一轴的检测质量块的位移,第二电容器的电容变化反映了沿第二轴的检验质量块的位移,并且第三电容器的电容变化反映了第三电容器的位移 沿着第三轴的检验质量。 第一,第二和第三轴定义三维坐标系。
    • 6. 发明申请
    • MEMS acoustic pressure sensor device and method for making same
    • MEMS声压传感器装置及其制造方法
    • US20120235255A1
    • 2012-09-20
    • US13068554
    • 2011-05-14
    • Chuan-Wei Wang
    • Chuan-Wei Wang
    • H01L29/84H01L21/02
    • G01L9/0073
    • The present invention discloses a Micro-Electro-Mechanical System (MEMS) acoustic pressure sensor device and a method for making same. The MEMS device includes: a substrate; a fixed electrode provided on the substrate; and a multilayer structure, which includes multiple metal layers and multiple metal plugs, wherein the multiple metal layers are connected by the multiple metal plugs. A cavity is formed between the multilayer structure and the fixed electrode. Each metal layer in the multilayer structure includes multiple metal sections. The multiple metal sections of one metal layer and those of at least another metal layer are staggered to form a substantially blanket surface as viewed from a moving direction of an acoustic wave.
    • 本发明公开了一种微机电系统(MEMS)声压传感器装置及其制造方法。 MEMS器件包括:衬底; 设置在基板上的固定电极; 以及包括多个金属层和多个金属插塞的多层结构,其中多个金属层通过多个金属插塞连接。 在多层结构和固定电极之间形成空腔。 多层结构中的每个金属层包括多个金属部分。 从声波的移动方向观察,一个金属层的多个金属部分和至少另一个金属层的多个金属部分交错以形成基本上覆盖的表面。