专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US11549895B2 System and method using x-rays for depth-resolving metrology and analysis 有权
公开(公告)号：US11549895B2
公开(公告)日：2023-01-10
申请号：US17476355
申请日：2021-09-15
申请人： Sigray, Inc.
发明人： Wenbing Yun , Benjamin Donald Stripe , Janos Kirz , Sylvia Jia Yun Lewis
IPC分类号： G01N23/20 , G01N23/223 , G01N23/2273 , G01N23/2206
摘要： A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.

2. 发明授权

US11056308B2 System and method for depth-selectable x-ray analysis 有权
公开(公告)号：US11056308B2
公开(公告)日：2021-07-06
申请号：US16560287
申请日：2019-09-04
申请人： Sigray, Inc.
发明人： Wenbing Yun , Janos Kirz
IPC分类号： H01J35/10 , H01J35/06 , H01J35/14 , G01N23/083 , H01J35/18 , G01N23/2273
摘要： A system for x-ray analysis includes at least one x-ray source configured to emit x-rays. The at least one x-ray source includes at least one silicon carbide sub-source on or embedded in at least one thermally conductive substrate and configured to generate the x-rays in response to electron bombardment of the at least one silicon carbide sub-source. At least some of the x-rays emitted from the at least one x-ray source includes Si x-ray emission line x-rays. The system further includes at least one x-ray optical train configured to receive the Si x-ray emission line x-rays and to irradiate a sample with at least some of the Si x-ray emission line x-rays.

3. 发明授权

US10653376B2 X-ray imaging system 有权
公开(公告)号：US10653376B2
公开(公告)日：2020-05-19
申请号：US16402887
申请日：2019-05-03
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
IPC分类号： A61B6/00 , A61B6/03 , H01J35/08 , H01J35/12 , G01N23/046 , G01N23/041 , A61B6/04
摘要： An x-ray imaging system includes an x-ray source, a beam-splitting grating having a plurality of structures arranged in a two-dimensional periodic array, a stage configured to hold an object to be imaged, and an x-ray detector having a two-dimensional array of x-ray detecting elements and positioned to detect x-rays diffracted by the beam-splitting grating and perturbed by the object to be imaged.

4. 发明授权

US10304580B2 Talbot X-ray microscope 有权
公开(公告)号：US10304580B2
公开(公告)日：2019-05-28
申请号：US15954380
申请日：2018-04-16
申请人： Sigray, Inc.
发明人： Wenbing Yun , David Vine , Sylvia Jia Yun Lewis , Janos Kirz , Srivatsan Seshadri
IPC分类号： G01N23/00 , G21K1/02 , G01N23/083 , G21K7/00
摘要： Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.

5. 发明申请

US20190088438A9 X-RAY ILLUMINATION SYSTEM WITH MULTIPLE TARGET MICROSTRUCTURES 审中-公开
公开(公告)号：US20190088438A9
公开(公告)日：2019-03-21
申请号：US15783855
申请日：2017-10-13
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , David Charles Reynolds , Alan Francis Lyon
IPC分类号： H01J35/10 , H01J35/14 , H01J35/26 , H01J35/30 , G21K1/06
摘要： An x-ray illumination beam system includes an electron emitter and a target having one or more target microstructures. The one or more microstructures may be the same or different material, and may be embedded or placed atop a substrate formed of a heat-conducting material. The x-ray source may emit x-rays towards an optic system, which can include one or more optics that are matched to one or more target microstructures. The matching can be achieved by selecting optics with the geometric shape, size, and surface coating that collects as many x-rays as possible from the source and at an angle that satisfies the critical reflection angle of the x-ray energies of interest from the target. The x-ray illumination beam system allows for an x-ray source that generates x-rays having different spectra and can be used in a variety of applications.

6. 发明申请

US20170336334A1 X-RAY TRANSMISSION SPECTROMETER SYSTEM 审中-公开
公开(公告)号：US20170336334A1
公开(公告)日：2017-11-23
申请号：US15663831
申请日：2017-07-31
申请人： Sigray, Inc.
发明人： Wenbing Yun , Srivatsan Seshadri , Janos Kirz , Sylvia Jia Yun Lewis
IPC分类号： G01N23/207 , G01N23/087
CPC分类号： G01N23/2076 , G01N23/087 , G01N23/223 , G01N2223/04 , G01N2223/045 , G01N2223/0568 , G21K1/06 , G21K1/067 , G21K2201/064 , H01J35/08 , H01J35/14 , H01J35/18 , H01J2235/081 , H01J2235/086
摘要： An x-ray transmission spectrometer system to be used with a compact x-ray source to measure x-ray absorption with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness x-ray source, an optical system with a low pass spectral filter property to focus the x-rays through an object to be examined, and a spectrometer comprising a crystal analyzer (and, in some embodiments, a mosaic crystal) to disperse the transmitted beam, and in some instances an array detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 15 degrees, and be coupled to an optical system that collects and focuses the high flux x-rays to micron-scale spots, leading to high flux density. The x-ray optical system may also act as a “low-pass” filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.

7. 发明授权

US09719947B2 X-ray interferometric imaging system 有权
公开(公告)号：US09719947B2
公开(公告)日：2017-08-01
申请号：US14700137
申请日：2015-04-29
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz
IPC分类号： G01N23/02 , A61B6/00 , G21K1/02 , G01N23/20 , H01J35/08
CPC分类号： G01N23/20075 , A61B6/4007 , A61B6/4291 , A61B6/484 , A61B6/508 , G21K1/02 , G21K2207/005 , H01J35/08 , H01J2235/086 , H01J2235/087
摘要： An x-ray interferometric imaging system in which the x-ray source comprises a target having a plurality of structured coherent sub-sources of x-rays embedded in a thermally conducting substrate. The system additionally comprises a beam-splitting grating G1 that establishes a Talbot interference pattern, which may be a π phase-shifting grating, and an x-ray detector to convert two-dimensional x-ray intensities into electronic signals. The system may also comprise a second analyzer grating G2 that may be placed in front of the detector to form additional interference fringes, a means to translate the second grating G2 relative to the detector. The system may additionally comprise an antiscattering grid to reduce signals from scattered x-rays. Various configurations of dark-field and bright-field detectors are also disclosed.

8. 发明申请

US20160064175A1 STRUCTURED TARGETS FOR X-RAY GENERATION 审中-公开
标题翻译：用于X射线发生的结构化目标
公开(公告)号：US20160064175A1
公开(公告)日：2016-03-03
申请号：US14784029
申请日：2014-08-29
申请人： SINGRAY, INC
发明人： Wenbing YUN , Janos KIRZ , Sylvia Jia Yun LEWIS
IPC分类号： H01J35/12 , G03F7/16 , G03F7/36 , H01J35/10
CPC分类号： H01J35/12 , G03F7/16 , G03F7/36 , H01J35/105 , H01J2235/081 , H01J2235/1204
摘要： Disclosed are targets for generating x-rays using electron beams and their method of fabrication. They comprise a number of microstructures fabricated from an x-ray target material arranged in close thermal contact with a substrate such that the heat is more efficiently drawn out of the x-ray target material. This allows irradiation of the x-ray generating substance with higher electron density or higher energy electrons, leading to greater x-ray brightness, without inducing damage or melting. The microstructures may comprise conventional x-ray target materials (such as tungsten) that are patterned at micron-scale dimensions on a thermally conducting substrate, such as diamond. The microstructures may have any number of geometric shapes to best generate x-rays of high brightness and efficiently disperse heat. In some embodiments, the target comprising microstructures may be incorporated into a rotating anode geometry, to enhance x-ray generation in such systems.
摘要翻译：公开了使用电子束产生X射线的目标及其制造方法。它们包括由x射线靶材料制成的多个微结构，该X射线靶材料与衬底紧密地热接触地布置，使得热量更有效地从x射线靶材料中拉出。这允许以更高的电子密度或更高能量的电子照射x射线产生物质，导致更大的x射线亮度，而不引起损伤或熔化。微结构可以包括在诸如金刚石的导热基底上以微米级尺寸图案化的常规x射线靶材料（例如钨）。微结构可以具有任何数量的几何形状，以最好地产生高亮度的x射线并有效地分散热量。在一些实施例中，包括微结构的靶可以并入到旋转阳极几何中，以增强这种系统中的x射线产生。

9. 发明申请

US20220178851A1 HIGH THROUGHPUT 3D X-RAY IMAGING SYSTEM USING A TRANSMISSION X-RAY SOURCE 有权
公开(公告)号：US20220178851A1
公开(公告)日：2022-06-09
申请号：US17540608
申请日：2021-12-02
申请人： Sigray, Inc.
发明人： Wenbing Yun , David Vine
IPC分类号： G01N23/046 , G01N23/083
摘要： A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

10. 发明授权

US11143605B2 System and method for computed laminography x-ray fluorescence imaging 有权
公开(公告)号：US11143605B2
公开(公告)日：2021-10-12
申请号：US17009500
申请日：2020-09-01
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Benjamin Donald Stripe
IPC分类号： G01N23/22 , G01N23/2204 , G01N23/2209 , G01N23/223 , G01N23/207 , G01N23/20016 , G01N23/20025 , G01N23/2055
摘要： A system and a method use x-ray fluorescence to analyze a specimen by illuminating a specimen with an incident x-ray beam having a near-grazing incident angle relative to a surface of the specimen and while the specimen has different rotational orientations relative to the incident x-ray beam. Fluorescence x-rays generated by the specimen in response to the incident x-ray beam are collected while the specimen has the different rotational orientations.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式