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    • 2. 发明申请
    • Chemical die singulation technique
    • 化学模切技术
    • US20060292827A1
    • 2006-12-28
    • US11159553
    • 2005-06-22
    • Brian CondieDavid DoughertyMahesh Shah
    • Brian CondieDavid DoughertyMahesh Shah
    • H01L21/00
    • H01L21/78
    • A method is provided for manufacturing a semiconductor device from a substrate (200) having an active surface (204) and a non-active surface (206). The method comprises depositing a backing material (104) onto the non-active surface of the substrate (206) in a pattern (500), the pattern (500) having at least a first die section (210), a second die section (212) adjacent the first die section (210), and a strip (216) connecting the first die section (210) and the second die section (212), removing material from portions of the non-active surface of the substrate (206) on which the backing material (104) is not deposited to thereby partially separate the substrate (200) into a first die (236) and a second die (238) connected to one another by the strip (254) of the deposited backing material, and breaking the strip connector (254) to separate the first die (236) from the second die (238).
    • 提供了一种从具有有源表面(204)和非有效表面(206)的衬底(200)制造半导体器件的方法。 该方法包括以图案(500)将背衬材料(104)沉积到基底(206)的非活性表面上,图案(500)具有至少第一模具部分(210),第二模具部分 212),以及连接第一模具部分(210)和第二模具部分(212)的条带(216),从衬底(206)的非活性表面的部分去除材料, 其上不沉积背衬材料(104),从而通过沉积的背衬材料的带(254)将衬底(200)部分地分离成第一模具(236)和第二模具(238),第二模具(238)彼此连接, 以及断开带状连接器(254)以将第一管芯(236)与第二管芯(238)分离。