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    • 5. 发明授权
    • Capacitive measurement method and system for nanoimprint process monitoring
    • 纳米压印过程监测的电容测量方法和系统
    • US07682552B2
    • 2010-03-23
    • US10851113
    • 2004-05-24
    • Chin-Chung NienTa-Chuan LiuHong Hocheng
    • Chin-Chung NienTa-Chuan LiuHong Hocheng
    • G01B11/00
    • G03F7/0002B81C1/0046B81C99/0065B81C2201/0153B82Y10/00B82Y40/00
    • The present invention relates to a capacitive measurement method and system for a nanoimprint process, which arranges a plurality of electrode plates on both the backside of the master mold and the surface of the supporting base carrying the wafer substrate to form a plurality of capacitive structures. By monitoring the capacitance variation signal caused by the continuous variations in the thickness and the material properties of the resist during the imprint process, the status of the resist can be monitored and recorded, which is used as the references for determining the timing to demold in the nanoimprint process and for maintaining the flatness of the resist. Accordingly, the nanoimprint process can be automated easier and the quality and the throughput of of the nanometer scaled imprint product can be improved.
    • 本发明涉及一种用于纳米压印工艺的电容测量方法和系统,其在主模的背面和承载晶片衬底的支撑基体的表面上布置多个电极板以形成多个电容结构。 通过监测由压印过程中厚度的连续变化和抗蚀剂的材料特性引起的电容变化信号,可以监测和记录抗蚀剂的状态,作为确定脱模时间的参考 纳米压印工艺和用于保持抗蚀剂的平整度。 因此,纳米压印工艺可以更容易自动化,并且能够提高纳米压印产品的质量和生产量。
    • 6. 发明授权
    • Imprint method for manufacturing micro capacitive ultrasonic transducer
    • 制造微电容式超声波换能器的压印方法
    • US07438823B2
    • 2008-10-21
    • US10732265
    • 2003-12-11
    • Chin-Chung NienHong Chen HoMing-Wei Chang
    • Chin-Chung NienHong Chen HoMing-Wei Chang
    • B44C1/22
    • B06B1/0292Y10T29/49005Y10T29/49007
    • The present invention relates to an imprint method for manufacturing micro capacitive ultrasonic transducer, which uses a mold with a particularly patterned surface to imprint into a flexible material thus forming the oscillation cavities of the ultrasonic transducer. Such imprint method not only realizes the volume manufacturing and reduces the cost, but also can precisely control the geometrical size of the oscillation cavities and thus shorten the distance between the upper and the lower electrodes to the micro/nano level, largely improving the sensitivity of the transducer. Moreover, the present invention further changes the procedure for manufacturing micro capacitive ultrasonic transducer of the prior art, which can both save the process steps and overcome the disadvantages in the prior art.
    • 本发明涉及一种用于制造微电容式超声波换能器的压印方法,其使用具有特别图案化表面的模具来压印柔性材料,从而形成超声换能器的振荡腔。 这种压印方法不仅实现了体积制造并降低了成本,而且还可以精确地控制振荡腔的几何尺寸,从而缩短上下电极与微/纳水平之间的距离,从而大大提高了 传感器。 此外,本发明进一步改变了现有技术的制造微电容式超声波换能器的方法,其既节省了工艺步骤,也克服了现有技术的缺点。