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    • 5. 发明授权
    • Inspection method and its apparatus for thermal assist type magnetic head element
    • 检测方法及其热辅助型磁头元件装置
    • US09304145B2
    • 2016-04-05
    • US14813306
    • 2015-07-30
    • HITACHI HIGH-TECH FINE SYSTEMS CORPORATION
    • Kaifeng ZhangTakenori HiroseMasahiro WatanabeToshinori SugiyamaAkira Tobita
    • G01Q20/02
    • G01Q20/02G01Q60/06G01Q60/08
    • To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured.
    • 为了检测由热辅助型磁头元件产生的近场光和具有高灵敏度的泄漏光并且更精确地获得近场光产生区域的空间强度分布,用于热辅助的检查装置 适于使悬臂与样品表面之间的距离和悬臂的激发振幅设定得较小,以便通过抑制其它光成分的影响来检测具有高灵敏度的近场光 将悬臂与试样的表面之间的距离和悬臂的激发振幅设定得较大,以通过抑制量的影响来高灵敏度地检测存在于近场光附近的其他光分量 当测量其他光分量时,检测到的近场光。
    • 6. 发明申请
    • INSPECTION METHOD AND ITS APPARATUS FOR THERMAL ASSIST TYPE MAGNETIC HEAD ELEMENT
    • 检验方法及其辅助类型磁头元件的设备
    • US20160033548A1
    • 2016-02-04
    • US14813306
    • 2015-07-30
    • HITACHI HIGH-TECH FINE SYSTEMS CORPORATION
    • Kaifeng ZHANGTakenori HIROSEMasahiro WATANABEToshinori SUGIYAMAAkira TOBITA
    • G01Q20/02
    • G01Q20/02G01Q60/06G01Q60/08
    • To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured.
    • 为了检测由热辅助型磁头元件产生的近场光和具有高灵敏度的泄漏光并且更精确地获得近场光产生区域的空间强度分布,用于热辅助的检查装置 适于使悬臂与样品表面之间的距离和悬臂的激发振幅设定得较小,以便通过抑制其它光成分的影响来检测具有高灵敏度的近场光 将悬臂与试样的表面之间的距离和悬臂的激发振幅设定得较大,以通过抑制量的影响来高灵敏度地检测存在于近场光附近的其他光分量 当测量其他光分量时,检测到的近场光。
    • 10. 发明申请
    • MAGNETIC DISK INSPECTION DEVICE AND MAGNETIC DISK INSPECTION METHOD
    • 磁盘检查装置和磁盘检查方法
    • US20160216216A1
    • 2016-07-28
    • US14917701
    • 2014-09-11
    • HITACHI HIGH-TECH FINE SYSTEMS CORPORATION
    • Shigeru SERIKAWATakayuki ISHIGURO
    • G01N21/95G01N21/88
    • G01N21/95G01N21/8806G01N21/8851G01N2201/06113G01N2201/103G11B5/84
    • To increase horizontal resolution while preventing the depth of focus, a magnetic disk inspection device is configured: a table part which has a spindle shaft and a stage; a lighting system which irradiates a magnetic disk; a specularly reflected light detection optical system; a scattered light detection optical system; and a signal processing unit which processes outputs from the specularly reflected light detection optical system and the scattered light detection optical system and detects a defect, in which the scattered light detection optical system is provided with a lens system and a photoelectric converter having a plurality of photoelectric conversion elements arranged in an array, and using the lens system, forms an image of the scattered light on the photoelectric converter, which is long in one direction and thinner than the width of the photoelectric conversion element in a direction perpendicular to the direction of the arrangement in an array.
    • 为了在防止焦深的同时提高水平分辨率,磁盘检查装置被构造成:具有主轴和台的台部; 照射系统,照射磁盘; 镜面反射光检测光学系统; 散射光检测光学系统; 以及信号处理单元,其处理来自镜面反射光检测光学系统和散射光检测光学系统的输出,并且检测散射光检测光学系统设置有透镜系统的缺陷和具有多个 以阵列布置的光电转换元件,并且使用透镜系统,在与光电转换元件的方向垂直的方向上在一个方向上长并且比光电转换元件的宽度更薄的光电转换器上形成散射光的图像 阵列中的排列。