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    • 3. 发明授权
    • Semiconductor device manufacturing method
    • 半导体器件制造方法
    • US08609443B2
    • 2013-12-17
    • US13666473
    • 2012-11-01
    • Kazuhiro ShimizuHajime AkiyamaNaoki Yasuda
    • Kazuhiro ShimizuHajime AkiyamaNaoki Yasuda
    • H01L21/66
    • H01L21/67271H01L21/67282H01L2924/0002H01L2924/00
    • A semiconductor device manufacturing apparatus is provided with a drawing pattern printing part having a print head which injects a conductive solvent, an insulative solvent and an interface treatment solution. The print head is formed in such a way that desired circuit drawing pattern can be printed on a wafer based on information on the drawing pattern from a wafer testing part, information on the wafer from a storage part and coordinate information from a chip coordinate recognition part. In a semiconductor device manufacturing method according to the present invention, a semiconductor device is manufactured by using the semiconductor device manufacturing apparatus in such a manner that desired circuits are formed through printing process. In the semiconductor device, pad electrodes and so on are formed in such a way that trimming process can be conducted by printing circuit drawing patterns.
    • 半导体器件制造装置具备:具有喷射导电性溶剂的印刷头,绝缘性溶剂和界面处理液的图形印刷部。 打印头形成为使得可以基于来自晶片测试部分的绘图图案的信息,从存储部分获得关于晶片的信息和来自芯片坐标识别部分的坐标信息,将期望的电路图形图案印刷在晶片上 。 在根据本发明的半导体器件制造方法中,通过使用半导体器件制造设备以通过印刷处理形成期望的电路的方式制造半导体器件。 在半导体器件中,焊盘电极等以能够通过打印电路图形进行修整处理的方式形成。
    • 4. 发明申请
    • SEMICONDUCTOR CLEANING DEVICE AND SEMICONDUCTOR CLEANING METHOD
    • 半导体清洁器件和半导体清洁方法
    • US20130152965A1
    • 2013-06-20
    • US13595299
    • 2012-08-27
    • Akira OKADATakaya NoguchiHajime Akiyama
    • Akira OKADATakaya NoguchiHajime Akiyama
    • B08B6/00
    • H01L21/02076B08B5/04B08B6/00H01L21/02041H01L21/02046H01L21/67H01L21/67028H01L21/673H01L21/67333
    • A semiconductor cleaning device includes an external electrode opposed to a side surface of the semiconductor device; a base configured to allow arrangement of the semiconductor device, and having an opening positioned between the side surface of the semiconductor device in the arranged state and the external electrode, and located below the side surface of the semiconductor device; a frame having an electrically insulating property, being in contact with the external electrode, arranged on the base and opposed to the side surface of the semiconductor device; and suction means connected to the opening in the base and being capable of taking in the foreign matter through the opening. Thereby, the semiconductor cleaning device and a semiconductor cleaning method that can remove the foreign matter adhered to the side surface of the semiconductor device and can prevent re-adhesion of the removed foreign matter can be obtained.
    • 半导体清洁装置包括与半导体器件的侧表面相对的外部电极; 基座,被配置为允许半导体器件的布置,并且具有位于布置状态的半导体器件的侧表面之间的开口和外部电极,并且位于半导体器件的侧表面之下; 具有与外部电极接触的具有电绝缘性能的框架,布置在基座上并与半导体器件的侧表面相对; 以及连接到基座中的开口并且能够通过开口吸收异物的抽吸装置。 由此,可以获得能够除去附着在半导体装置的侧面的异物并能够防止除去的异物的再附着的半导体清洗装置和半导体清洗方法。
    • 5. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08324657B2
    • 2012-12-04
    • US13160204
    • 2011-06-14
    • Kazuhiro ShimizuHajime AkiyamaNaoki Yasuda
    • Kazuhiro ShimizuHajime AkiyamaNaoki Yasuda
    • H01L29/74H01L31/111
    • H01L21/67271H01L21/67282H01L2924/0002H01L2924/00
    • A semiconductor device manufacturing apparatus is provided with a drawing pattern printing part having a print head which injects a conductive solvent, an insulative solvent and an interface treatment solution. The print head is formed in such a way that desired circuit drawing pattern can be printed on a wafer based on information on the drawing pattern from a wafer testing part, information on the wafer from a storage part and coordinate information from a chip coordinate recognition part. In a semiconductor device manufacturing method according to the present invention, a semiconductor device is manufactured by using the semiconductor device manufacturing apparatus in such a manner that desired circuits are formed through printing process. In the semiconductor device, pad electrodes and so on are formed in such a way that trimming process can be conducted by printing circuit drawing patterns.
    • 半导体器件制造装置具备:具有喷射导电性溶剂的印刷头,绝缘性溶剂和界面处理液的图形印刷部。 打印头形成为使得可以基于来自晶片测试部件的绘图图案的信息,从存储部分获得关于晶片的信息和来自芯片坐标识别部分的坐标信息,将期望的电路图形图案印刷在晶片上 。 在根据本发明的半导体器件制造方法中,通过使用半导体器件制造设备以通过印刷处理形成期望的电路的方式制造半导体器件。 在半导体器件中,焊盘电极等以能够通过打印电路图形进行修整处理的方式形成。
    • 7. 发明授权
    • Dielectric isolation type semiconductor device and manufacturing method therefor
    • 绝缘隔离型半导体器件及其制造方法
    • US07485943B2
    • 2009-02-03
    • US11408087
    • 2006-04-21
    • Hajime Akiyama
    • Hajime Akiyama
    • H01L29/00H01L27/01
    • H01L29/7824H01L24/05H01L29/0653H01L29/0886H01L29/405H01L29/407H01L29/78603H01L2224/04042H01L2224/05556H01L2224/48463H01L2924/12036H01L2924/13091H01L2924/14H01L2924/00
    • A dielectric isolation type semiconductor device includes a dielectric isolation type substrate in which a support substrate, an embedded dielectric layer, and a first conductive type semiconductor substrate of a low impurity concentration are laminated one over another. The semiconductor substrate includes a first semiconductor region of a first conductive type having a high impurity concentration, a second semiconductor region of a second conductive type having a high impurity concentration arranged so as to surround the first semiconductor region, a first main electrode joined to a surface of the first semiconductor region, and a second main electrode joined to a surface of the second semiconductor region. A first dielectric portion is arranged adjacent the embedded dielectric layer so as to surround a region of the support substrate superposed on the first semiconductor region in a direction of lamination thereof, and a wire connected with the first main electrode.
    • 绝缘隔离型半导体器件包括绝缘隔离型衬底,其中支撑衬底,嵌入电介质层和低杂质浓度的第一导电类型半导体衬底彼此层叠。 半导体衬底包括具有高杂质浓度的第一导电类型的第一半导体区域,具有以包围第一半导体区域排列的杂质浓度高的第二导电类型的第二半导体区域,与第一半导体区域 第一半导体区域的表面和与第二半导体区域的表面接合的第二主电极。 第一电介质部分布置成与嵌入的电介质层相邻,以便围绕叠置在第一半导体区域上的支撑衬底的层叠方向的区域和与第一主电极连接的电线。
    • 8. 发明申请
    • Semiconductor device manufacturing apparatus, semiconductor device manufacturing method and semiconductor device
    • 半导体装置制造装置,半导体装置的制造方法以及半导体装置
    • US20070072394A1
    • 2007-03-29
    • US11412990
    • 2006-04-28
    • Kazuhiro ShimizuHajime AkiyamaNaoki Yasuda
    • Kazuhiro ShimizuHajime AkiyamaNaoki Yasuda
    • H01L21/00
    • H01L21/67271H01L21/67282H01L2924/0002H01L2924/00
    • A semiconductor device manufacturing apparatus is provided with a drawing pattern printing part having a print head which injects a conductive solvent, an insulative solvent and an interface treatment solution. The print head is formed in such a way that desired circuit drawing pattern can be printed on a wafer based on information on the drawing pattern from a wafer testing part, information on the wafer from a storage part and coordinate information from a chip coordinate recognition part. In a semiconductor device manufacturing method according to the present invention, a semiconductor device is manufactured by using the semiconductor device manufacturing apparatus in such a manner that desired circuits are formed through printing process. In the semiconductor device, pad electrodes and so on are formed in such a way that trimming process can be conducted by printing circuit drawing patterns.
    • 半导体器件制造装置具备:具有喷射导电性溶剂的印刷头,绝缘性溶剂和界面处理液的图形印刷部。 打印头形成为使得可以基于来自晶片测试部件的绘图图案的信息,从存储部分获得关于晶片的信息和来自芯片坐标识别部分的坐标信息,将期望的电路图形图案印刷在晶片上 。 在根据本发明的半导体器件制造方法中,通过使用半导体器件制造设备以通过印刷处理形成期望的电路的方式制造半导体器件。 在半导体器件中,焊盘电极等以能够通过打印电路图形进行修整处理的方式形成。