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    • 1. 发明申请
    • RADIATION DETECTION APPARATUS
    • 辐射检测装置
    • US20100163740A1
    • 2010-07-01
    • US12665485
    • 2007-08-10
    • Hideharu Matsuura
    • Hideharu Matsuura
    • G01T1/24
    • G01T1/241H01L31/022408H01L31/085
    • A semiconductor substrate is composed of a SiC crystal. A metal film having a desired area and serving as an incident surface onto which X-rays are made incident is formed on one surface of the semiconductor substrate. An electrode having the shape of a circle is formed at the central portion of the other surface of the semiconductor substrate. A ring-shaped electrode is formed in a portion near the circumference of the semiconductor substrate so as to surround the electrode. A predetermined direct voltage is applied to the metal film and the ring-shaped electrode. A voltage of a ground level is applied to the electrode. X-rays (γ-rays) that are made incident onto the metal film cause the generation of electron-hole pairs in the semiconductor substrate. The generated electrons are collected at the electrode and drawn as electric signals from an output terminal.
    • 半导体衬底由SiC晶体组成。 在半导体衬底的一个表面上形成具有所需区域并用作入射X射线的入射表面的金属膜。 在半导体衬底的另一个表面的中心部分处形成具有圆形形状的电极。 环形电极形成在半导体衬底的圆周附近,以包围电极。 对金属膜和环状电极施加预定的直流电压。 对电极施加地电位的电压。 入射到金属膜上的X射线(γ射线)导致在半导体衬底中产生电子 - 空穴对。 所产生的电子被收集在电极处并作为来自输出端子的电信号绘制。