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1. 发明授权

US08247029B2 Method for forming micropattern 有权
标题翻译：微图案形成方法
公开(公告)号：US08247029B2
公开(公告)日：2012-08-21
申请号：US12140748
申请日：2008-06-17
申请人： Akifumi Kamijima , Hideyuki Yatsu , Hitoshi Hatate
发明人： Akifumi Kamijima , Hideyuki Yatsu , Hitoshi Hatate
IPC分类号： C23C16/00
CPC分类号： G03F7/40 , H01L21/0273
摘要： The micropattern formation of the invention comprises forming a resist pattern, and then forming a carbon-containing film on the surface of the resist pattern, followed by ashing of the carbon-containing film and a portion of the resist surface constituting the resist pattern. Thus, the discharge state of ashing just after the initiation of discharge is so stabilized that the ashing rate distribution can be improved, and sensitive pattern slimming can be implemented with ease and high precision.
摘要翻译：本发明的微图案形成包括形成抗蚀剂图案，然后在抗蚀剂图案的表面上形成含碳膜，然后灰化含碳膜和构成抗蚀剂图案的抗蚀剂表面的一部分。因此，放电开始之后的灰化的放电状态稳定，可以提高灰化率分布，并且可以容易且高精度地实现灵敏的图案减肥。

2. 发明授权

US08760805B2 Thin film magnetic head, thin film magnetic head device, and magnetic recording/reproducing apparatus 有权
标题翻译：薄膜磁头，薄膜磁头装置和磁记录/重放装置
公开(公告)号：US08760805B2
公开(公告)日：2014-06-24
申请号：US13176134
申请日：2011-07-05
申请人： Hisayoshi Watanabe , Hitoshi Hatate , Hideyuki Yatsu , Koichi Otani
发明人： Hisayoshi Watanabe , Hitoshi Hatate , Hideyuki Yatsu , Koichi Otani
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A thin-film magnetic head includes a slider substrate and a write element. The slider substrate has an air bearing surface at one side thereof. The write element has a recording magnetic pole film. The recording magnetic pole film is disposed on a plane crossing the air bearing surface over the slider substrate and has a large-width portion and a small-width portion continuously arranged in the named order toward the air bearing surface. The small-width portion has a smaller width than the large-width portion. Of the large-width portion and the small-width portion, at least the small-width portion has a first portion and a second portion. The second portion is continuous with an upper end of the first portion and has both side faces inclined in such a direction as to increase the width. An external angle of the first portion formed by a plane parallel to a bottom face and the side face is larger than an external angle of the second portion formed by a plane parallel to the bottom face and the side face.
摘要翻译：薄膜磁头包括滑块基板和写入元件。滑块基板在其一侧具有空气轴承表面。写元件具有记录磁极膜。记录磁极膜设置在与滑动基板上的空气轴承表面相交的平面上，并且具有朝向空气轴承表面依次连续排列的大宽度部分和小宽度部分。小宽度部分的宽度比宽度大的部分小。在大宽度部分和小宽度部分中，至少小宽度部分具有第一部分和第二部分。第二部分与第一部分的上端连续，并且具有在增加宽度的方向上倾斜的两个侧面。由平行于底面和侧面的平面形成的第一部分的外角比由平行于底面和侧面的平面形成的第二部分的外角大。

3. 发明申请

US20130062307A1 METHOD OF MAKING A MASK, METHOD OF PATTERNING BY USING THIS MASK AND METHOD OF MANUFACTURING A MICRO-DEVICE 有权
标题翻译：制造掩模的方法，使用该掩模的图案的方法和制造微型器件的方法
公开(公告)号：US20130062307A1
公开(公告)日：2013-03-14
申请号：US13230261
申请日：2011-09-12
申请人： Hisayoshi WATANABE , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
发明人： Hisayoshi WATANABE , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
IPC分类号： C23F1/04 , G11B5/31 , G03F7/20
CPC分类号： G11B5/3163
摘要： The present invention relates to a method of making a mask for patterning a thin film The method includes a step of forming an inorganic material, which is resolvable into alkali solution, on a substrate; a step of forming the inorganic material in a predetermined pattern; and a step of narrowing the inorganic material with the alkali solution to form the mask.
摘要翻译：本发明涉及一种制备用于图案化薄膜的掩模的方法。该方法包括在基板上形成可分解成碱溶液的无机材料的步骤; 以预定图案形成无机材料的步骤; 以及用碱溶液使无机材料变窄以形成掩模的步骤。

4. 发明授权

US08072706B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US08072706B2
公开(公告)日：2011-12-06
申请号：US12588440
申请日：2009-10-15
申请人： Kei Hirata , Hideyuki Ukita , Shin Narushima , Isamu Toba , Hiromichi Umehara , Hisayoshi Watanabe , Hideyuki Yatsu
发明人： Kei Hirata , Hideyuki Ukita , Shin Narushima , Isamu Toba , Hiromichi Umehara , Hisayoshi Watanabe , Hideyuki Yatsu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A main magnetic pole includes a first part extending from a medium facing surface to a point at a predetermined distance from the medium facing surface, and a second part other than the first part. An accommodation part for accommodating the main magnetic pole includes: a first layer having a groove; a second layer lying between the first layer and the main magnetic pole in the first layer's groove; and a third layer interposed in part between the second layer and the main magnetic pole in the first layer's groove. The second layer is formed of a metal material different from a material used to form the first layer. The third layer is formed of an inorganic insulating material. The second and third layers lie between the first layer and the first part. The second layer lies between the bottom of the first layer's groove and the second part, but the third layer does not. The distance between the bottom of the first layer's groove and the second part is smaller than that between the bottom and the first part.
摘要翻译：主磁极包括从面向介质的表面延伸到与介质相对表面预定距离的点的第一部分和除第一部分之外的第二部分。用于容纳主磁极的容纳部分包括：具有凹槽的第一层; 位于第一层槽中的第一层和主磁极之间的第二层; 以及在第一层槽中的部分地介于第二层和主磁极之间的第三层。第二层由与用于形成第一层的材料不同的金属材料形成。第三层由无机绝缘材料形成。第二层和第三层位于第一层和第一层之间。第二层位于第一层凹槽的底部和第二部分之间，但第三层不存在。第一层槽的底部和第二部分之间的距离小于底部和第一部分之间的距离。

5. 发明授权

US07682923B2 Method of forming metal trench pattern in thin-film device 失效
标题翻译：在薄膜器件中形成金属沟槽图案的方法
公开(公告)号：US07682923B2
公开(公告)日：2010-03-23
申请号：US11967905
申请日：2007-12-31
申请人： Akifumi Kamijima , Hideyuki Yatsu
发明人： Akifumi Kamijima , Hideyuki Yatsu
IPC分类号： H01L21/20
CPC分类号： H01L27/016 , H01L27/0207 , H01L28/91
摘要： A method of forming a metal trench pattern in a thin-film device includes a step of depositing an electrode film on a substrate or on a base layer, a step of forming a resist pattern layer having a trench forming portion used to make a trench pattern, on the deposited electrode film, a step of forming a metal layer for filling spaces in the trench forming portion and for covering the trench forming portion, by performing plating through the formed resist pattern layer using the deposited electrode film as an electrode, a step of planarizing at least a top surface of the formed metal layer until the trench forming portion of the resist pattern layer is at least exposed, and a step of removing the exposed trench forming portion of the resist pattern layer.
摘要翻译：在薄膜器件中形成金属沟槽图形的方法包括在基底或基底层上沉积电极膜的步骤，形成具有用于形成沟槽图案的沟槽形成部分的抗蚀剂图案层的步骤在沉积的电极膜上，通过使用沉积的电极膜作为电极进行通过形成的抗蚀剂图案层的电镀，形成用于填充沟槽形成部分中的空间并覆盖沟槽形成部分的金属层的步骤，步骤平坦化所形成的金属层的至少顶表面，直到抗蚀剂图案层的沟槽形成部分至少暴露为止;以及去除抗蚀剂图案层的暴露的沟槽形成部分的步骤。

6. 发明授权

US08529777B2 Method of making a mask, method of patterning by using this mask and method of manufacturing a micro-device 有权
标题翻译：制造掩模的方法，使用该掩模的图案化方法和制造微型器件的方法
公开(公告)号：US08529777B2
公开(公告)日：2013-09-10
申请号：US13230261
申请日：2011-09-12
申请人： Hisayoshi Watanabe , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
发明人： Hisayoshi Watanabe , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00
CPC分类号： G11B5/3163
摘要： The present invention relates to a method of making a mask for patterning a thin film. The method includes a step of forming an inorganic material, which is resolvable into alkali solution, on a substrate; a step of forming the inorganic material in a predetermined pattern; and a step of narrowing the inorganic material with the alkali solution to form the mask.
摘要翻译：本发明涉及一种制造用于图案化薄膜的掩模的方法。该方法包括在基板上形成可分解成碱溶液的无机材料的步骤; 以预定图案形成无机材料的步骤; 以及用碱溶液使无机材料变窄以形成掩模的步骤。

7. 发明授权

US08323517B2 Method of forming magnetic pole section of perpendicular magnetic recording type thin-film magnetic head and manufacturing method of perpendicular magnetic recording type thin-film magnetic head 有权
标题翻译：形成垂直磁记录型薄膜磁头的磁极部分的方法和垂直磁记录型薄膜磁头的制造方法
公开(公告)号：US08323517B2
公开(公告)日：2012-12-04
申请号：US12753557
申请日：2010-04-02
申请人： Hisayoshi Watanabe , Hideyuki Yatsu , Masachika Hashino , Koichi Otani
发明人： Hisayoshi Watanabe , Hideyuki Yatsu , Masachika Hashino , Koichi Otani
IPC分类号： B29D11/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.
摘要翻译：形成垂直磁记录型薄膜磁头的磁极部分的方法和制造垂直磁记录型薄膜磁头的方法，该方法包括在下层上形成具有开口的抗蚀剂图案，形成第一非磁性层，形成形成磁性层图案的第一磁性层，去除抗蚀剂图案，然后在第一非磁性层和磁性层图案上施加抗蚀剂层，在所施加的抗蚀剂层的中途显影或灰化，并烘烤剩余的抗蚀剂层通过对所述烘烤抗蚀剂层进行蚀刻从所述磁性层图案的至少一个侧表面去除所述第一非磁性层，除去所有所述抗蚀剂层，然后在至少所述磁性层图案上形成第二非磁性层，以及形成在形成的第二非磁性层上的第二磁性层。

8. 发明申请

US20110240593A1 METHOD OF FORMING MAGNETIC POLE SECTION OF PERPENDICULAR MAGNETIC RECORDING TYPE THIN-FILM MAGNETIC HEAD AND MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING TYPE THIN-FILM MAGNETIC HEAD 有权
标题翻译：形成磁性记录型薄膜磁头的磁性部分的方法和全磁记录型薄膜磁头的制造方法
公开(公告)号：US20110240593A1
公开(公告)日：2011-10-06
申请号：US12753557
申请日：2010-04-02
申请人： Hisayoshi WATANABE , Hideyuki YATSU , Masachika HASHINO , Koichi OTANI
发明人： Hisayoshi WATANABE , Hideyuki YATSU , Masachika HASHINO , Koichi OTANI
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer, forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.
摘要翻译：形成垂直磁记录型薄膜磁头的磁极部分的方法和制造垂直磁记录型薄膜磁头的方法，该方法包括在下层上形成具有开口的抗蚀剂图案，形成第一非磁性层，形成第一磁性层，形成磁性层图案，去除抗蚀剂图案，然后在第一非磁性层和磁性层图案上施加抗蚀剂层，在所施加的抗蚀剂层的中途显影或灰化，并烘烤剩余的抗蚀剂层，通过对所述烘烤抗蚀剂层进行蚀刻而从所述磁性层图案的至少一个侧表面去除所述第一非磁性层，除去所有所述抗蚀剂层，然后在至少所述磁性层图案上形成第二非磁性层，以及在形成的第二非磁性层上形成第二磁性层。

9. 发明授权

US07947434B2 Process for forming a plated film, and process for fabricating a magnetic device and perpendicular magnetic recording head 有权
标题翻译：用于形成镀膜的方法，以及用于制造磁性装置和垂直磁记录头的方法
公开(公告)号：US07947434B2
公开(公告)日：2011-05-24
申请号：US11671758
申请日：2007-02-06
申请人： Akifumi Kamijima , Hitoshi Hatate , Hideyuki Yatsu
发明人： Akifumi Kamijima , Hitoshi Hatate , Hideyuki Yatsu
IPC分类号： G03F1/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： The process of forming a plated film according to the invention is designed such that the surface asperities of the inorganic film formed by the tracing of a standing wave occurring at the inner wall surface of the first opening in the resist at the resist pattern-formation step are reduced or eliminated. It is thus possible to form, efficiently yet in a short period of time, a high aspect-ratio plated film portion having an aspect ratio of greater than 1. In addition, the formed plated film quality is extremely improved for the absence of pores (cavities).
摘要翻译：根据本发明的形成镀膜的方法被设计成使得通过在抗蚀剂图案形成步骤中在抗蚀剂中的第一开口的内壁表面处产生的驻波的描绘形成的无机膜的表面粗糙度被减少或消除。因此，可以在短时间内有效地形成纵横比大于1的高纵横比电镀膜部分。此外，形成的镀膜质量在没有孔的情况下极大地改善（空腔）。

10. 发明授权

US07808742B2 Thin-film magnetic head comprising shield/magnetic-pole layer having surface without right nor sharp angle 有权
标题翻译：薄膜磁头包括屏蔽/磁极层，其表面没有正确或锐利的角度
公开(公告)号：US07808742B2
公开(公告)日：2010-10-05
申请号：US11781606
申请日：2007-07-23
申请人： Akifumi Kamijima , Hideyuki Yatsu , Hitoshi Hatate , Hisayoshi Watanabe , Atsushi Yamaguchi , Shingo Miyata , Masahiro Saito
发明人： Akifumi Kamijima , Hideyuki Yatsu , Hitoshi Hatate , Hisayoshi Watanabe , Atsushi Yamaguchi , Shingo Miyata , Masahiro Saito
IPC分类号： G11B5/31
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , G11B5/3116 , G11B5/3912 , G11B5/3967 , G11B2005/3996
摘要： Provided is a thin-film magnetic head in which the concentration of magnetic flux in the shield layer and the magnetic pole layer is suppressed. The thin-film magnetic head comprises a plurality of magnetic layers that have front surfaces reaching a head end surface on the ABS side. Further in this head, at least one of the plurality of magnetic layers has a shape in which: each of edges corresponding to both side surfaces extends so as to spread obliquely rearward with each other from an end of a straight edge in a track width direction corresponding to the front surface; and the front surface reaching the head end surface has a shape in which upper and lower corner portions in each of both end portions in the track width direction form obtuse angles or rounded shapes.
摘要翻译：提供了一种薄膜磁头，其中屏蔽层和磁极层中的磁通量的浓度被抑制。薄膜磁头包括多个磁性层，其前表面到达ABS侧的头端面。此外，在该头部中，多个磁性层中的至少一个具有以下形状：对应于两个侧表面的每个边缘沿着轨道宽度方向从直边缘的端部彼此倾斜地向后延伸对应于前表面; 并且到达头端面的前表面具有这样的形状，其中在轨道宽度方向上的两个端部中的每一个中的上角部和下角部形成钝角或圆形。

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