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    • 6. 发明申请
    • Plasma Processing Apparatus And Plasma Processing Method
    • 等离子体处理装置和等离子体处理方法
    • US20090194506A1
    • 2009-08-06
    • US12420370
    • 2009-04-08
    • Hitoshi TamuraNaoki YasuiSeiichi Watanabe
    • Hitoshi TamuraNaoki YasuiSeiichi Watanabe
    • B44C1/22
    • H01L21/6833H01J37/32706
    • The invention provides a plasma processing apparatus and a plasma processing method capable of controlling the voltage of the processing substrate with high accuracy, thereby enabling a highly accurate plasma processing. According to the invention, a voltage of the processing substrate is measured using a processing substrate with a voltage probe prepared in advance, and based on a bias voltage supplied to an electrostatic chuck mechanism and a bias current flowing through the electrostatic chuck mechanism, a capacity component which is an impedance representing the electric property of the electrostatic chuck mechanism is computed numerically. Then, based on a predetermined expression, the voltage of the processing substrate is estimated using the bias voltage of the processing substrate to be measured, the bias current flowing through the electrostatic chuck mechanism and the capacity component which is the impedance acquired in advance.
    • 本发明提供一种能够高精度地控制处理基板的电压的等离子体处理装置和等离子体处理方法,能够进行高精度的等离子体处理。 根据本发明,使用具有预先制备的电压探针的处理基板来测量处理基板的电压,并且基于提供给静电卡盘机构的偏置电压和流过静电卡盘机构的偏置电流, 数字地计算作为表示静电卡盘机构的电特性的阻抗的分量。 然后,基于预定表达式,使用待测量的处理基板的偏置电压,流过静电卡盘机构的偏置电流和预先获取的阻抗的电容分量来估计处理基板的电压。
    • 7. 发明申请
    • Sheet post-processing apparatus
    • 片材后处理装置
    • US20080061501A1
    • 2008-03-13
    • US11826643
    • 2007-07-17
    • Hitoshi TamuraMasaaki UchiyamaTsuyoshi Shiokawa
    • Hitoshi TamuraMasaaki UchiyamaTsuyoshi Shiokawa
    • B65H37/00
    • B65H29/12B65H2511/514B65H2515/34B65H2701/1311B65H2801/27B65H2220/01B65H2220/02B65H2220/11
    • A sheet post-processing apparatus including: a sheet conveying section for conveying sheets to an intermediate stacker by a plurality of conveying rollers containing a conveying roller capable of changing the pressing force against an opposing roller; and a control section wherein, when the first sheet to be assigned to a succeeding bundle of sheets has passed through the conveying roller capable of changing the aforementioned pressing force, and has arrived upstream from the aforementioned intermediate stacker during post-processing a preceding bundle of sheets, the pressing force of the conveying roller capable of changing the aforementioned pressing force is made smaller than the value at the time of conveyance; and after a second sheet has passed through the conveying roller capable of changing the aforementioned pressing force, the pressure is changed to the value at the time of the conveyance.
    • 一种纸张后处理装置,包括:纸张输送部,用于通过多个输送辊将纸张输送到中间堆垛机,所述多个输送辊包含能够改变相对辊的按压力的输送辊; 以及控制部,其中,当分配给后一束纸片的第一纸张已经通过能够改变上述按压力的输送辊时,并且在后处理期间已经从上述中间堆垛机的上游到达前一束 使能够改变上述按压力的输送辊的按压力小于输送时的值; 并且在第二片材通过能够改变上述按压力的输送辊之后,将压力改变为输送时的值。