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    • 6. 发明授权
    • Bar-type NO.sub.x gas sensor having WO.sub.3 sensing film
    • 具有WO3感测膜的棒式NOx气体传感器
    • US6113859A
    • 2000-09-05
    • US18802
    • 1998-02-04
    • Tae Song KimHyung Jin JungChong Hak Jung
    • Tae Song KimHyung Jin JungChong Hak Jung
    • G01N27/12G01N33/00
    • G01N27/12G01N33/0037
    • A plate-type NO.sub.x gas sensor having a WO.sub.3 sensing film which are capable of preventing temperature variation of a sensing thin film depending on gas flow to decrease heat loss thereof, whereby extending the life span of batteries of a portable gas sensor. The plate-type NO.sub.x gas sensor includes a Pt thin film electrode formed on a front surface of an alumina substrate, a tungsten oxide thin film for sensing NO.sub.x gas deposited on the front surface of the substrate on which the Pt thin film electrode is formed, a heater formed on a back surface of the alumina substrate for holding a portion of the tungsten oxide thin film for sensing NO.sub.x gas within a predetermined temperature range, a conducting wire for connecting between the Pt thin film electrode and the heater and a sheet made of at least one material selected from a group composed of Al.sub.2 O.sub.3, mullite, codierite, magnesia and zirconia, coated on the back surface of the substrate on which the heater is formed, for burying completely the heater from an exterior atmosphere to protect the heat dissipation. The NO.sub.x gas sensor may be fabricated as a bar type and also have a catalytic layer on the sensing layer to enhance the sensing characteristics of the sensor.
    • 一种具有WO3感测膜的板式NOx气体传感器,其能够防止根据气体流动的感测薄膜的温度变化,从而减少其热损失,从而延长便携式气体传感器的电池的寿命。 板状NOx气体传感器包括形成在氧化铝基板的前表面上的Pt薄膜电极,用于感测沉积在其上形成有Pt薄膜电极的基板的前表面上的NOx气体的氧化钨薄膜, 形成在所述氧化铝基板的背面上的加热器,用于将用于感测在预定温度范围内的NOx气体的所述氧化钨薄膜的一部分保持,用于连接所述Pt薄膜电极和所述加热器之间的导线以及由 选自由形成有加热器的基板的背面上涂覆的由Al 2 O 3,莫来石,堇青石,氧化镁和氧化锆组成的组中的至少一种材料,用于从外部气氛完全埋入加热器以保护散热。 NOx气体传感器可以制造为棒式,并且在感测层上还具有催化层以增强传感器的感测特性。
    • 8. 发明授权
    • Thin film deposition apparatus
    • 薄膜沉积装置
    • US5855683A
    • 1999-01-05
    • US797255
    • 1997-02-07
    • Seok Keun KohHong Kyu JangHyung Jin JungWon Kook Choi
    • Seok Keun KohHong Kyu JangHyung Jin JungWon Kook Choi
    • C23C16/54C23C14/32H01J37/32C23C16/00
    • H01J37/32422C23C14/32
    • An improved thin film deposition apparatus which is capable of easily increasing the temperature of a crucible using low electric power, for thus reducing the maintenance cost of the system, and fabricating a thin film having a constant characteristic by using a lower current density variation based on a distance, for thus increasing the reliability of a thin film device, whereby it is possible to fabricate a more compact product and to more easily maintain the system, which includes a heat shielding cylindrical chamber, a cylindrical chamber located within the heat shielding cylindrical chamber, a crucible section including a crucible and a heat filament arranged at an inner and lower portion of the cylindrical chamber, an ionization section having an anode and an ionization filament arranged in an upper portion inside the cylindrical chamber, and a magnet for enhancing an ionization efficiency, an upper and lower filament support for supporting the heater filament and the ionization filament, an upper and lower flange, to which the upper and lower filaments are fixed, arranged in the cylindrical chamber in order for the upper and lower filaments to be detachable, and a grounding plate extended from the heat shielding plate and the electromagnetic field blocking cylindrical chamber located at the upper direction of the crucible section and forming of an acceleration electrode system together with the upper flange.
    • 一种改进的薄膜沉积装置,其能够使用低功率容易地增加坩埚的温度,从而降低系统的维护成本,并且通过使用基于以下的电流密度变化来制造具有恒定特性的薄膜 距离,从而提高薄膜器件的可靠性,由此可以制造更紧凑的产品并且更容易地保持包括隔热圆柱形室的系统,位于隔热圆柱形室内的圆柱形室 包括坩埚和布置在圆筒形室的内部和下部的热丝的坩埚部分,具有设置在圆筒形室内部上部的阳极和电离丝的离子化部分和用于增强电离的磁体 效率,用于支撑加热丝和电离的上,下丝支撑 灯丝,上,下灯丝固定在其上的上下法兰,布置在圆筒形室中,以便上下灯丝可拆卸,并且从隔热板延伸的接地板和电磁场阻塞 圆柱形室位于坩埚部分的上方,并与上凸缘一起形成加速电极系统。