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    • 1. 发明授权
    • Methods of forming a pattern for a semiconductor device
    • 形成半导体器件图案的方法
    • US07229925B2
    • 2007-06-12
    • US11021072
    • 2004-12-22
    • In Su Kim
    • In Su Kim
    • H01L21/3213
    • H01L21/32139H01L21/0273
    • Methods of forming a pattern for a semiconductor device are disclosed, wherein a critical dimension (CD) of a pattern can be accurately controlled and, thus, finer critical dimension can be realized. An illustrated example method comprises: forming an etching target layer on a semiconductor substrate; forming a photoresist pattern on the etching target layer; forming polymer spacers on side surfaces of the photoresist pattern to improve side-surface roughness of the photoresist pattern; and etching the etching target layer using the photoresist pattern and the polymer spacers as a mask to form a pattern.
    • 公开了形成用于半导体器件的图案的方法,其中可以精确地控制图案的临界尺寸(CD),从而可以实现更精细的临界尺寸。 所示的示例方法包括:在半导体衬底上形成蚀刻目标层; 在蚀刻目标层上形成光致抗蚀剂图案; 在光致抗蚀剂图案的侧表面上形成聚合物间隔物以改善光致抗蚀剂图案的侧表面粗糙度; 并使用光致抗蚀剂图案和聚合物间隔物作为掩模蚀刻蚀刻目标层以形成图案。
    • 3. 发明授权
    • Methods of manufacturing semiconductor devices
    • 制造半导体器件的方法
    • US06943092B2
    • 2005-09-13
    • US10729227
    • 2003-12-05
    • In-Su Kim
    • In-Su Kim
    • H01L21/762H01L21/76
    • H01L21/76224
    • Methods of manufacturing semiconductor devices are disclosed. In a disclosed example, a multi-layered insulating structure is deposited on a semiconductor substrate, an opening is formed in the multi-layered insulating structure above the semiconductor substrate, and a trench is formed in the semiconductor substrate under the opening. Then, a groove is formed on an edge position of an intermediate layer of the multi-layered insulating structure by wet-etching the intermediate layer of the multi-layered insulating layer transversely using a pull back process. Then, a liner oxide layer is deposited on the groove and the trench. An oxide layer then fills the trench and the groove without generating voids or divots in the oxide layer of the trench.
    • 公开了制造半导体器件的方法。 在公开的实例中,在半导体衬底上沉积多层绝缘结构,在半导体衬底上方的多层绝缘结构中形成开口,在开口下方的半导体衬底中形成沟槽。 然后,通过使用拉回工艺横向湿蚀刻多层绝缘层的中间层,在多层绝缘结构的中间层的边缘位置上形成凹槽。 然后,衬垫氧化物层沉积在沟槽和沟槽上。 然后,氧化物层填充沟槽和沟槽,而不会在沟槽的氧化物层中产生空隙或凹坑。
    • 7. 发明授权
    • Electronic parking brake apparatus
    • 电子驻车制动装置
    • US08210326B2
    • 2012-07-03
    • US12370333
    • 2009-02-12
    • In Su Kim
    • In Su Kim
    • F16D65/14
    • B60T13/746B60T11/046
    • An electronic parking brake apparatus may include a driving member coupled to and actuating a parking cable, a case in which the driving member is housed, a cable ferrule disposed outside the case and coupled to a portion of the parking cable therethrough, wherein the cable ferrule is biased toward the case by the parking cable when the driving member actuates the parking cable, and a sensing member interposed between the case and the cable ferrule and measuring tension of the parking cable.
    • 电子驻车制动装置可以包括联接到并且致动停车电缆的驱动构件,其中容纳驱动构件的壳体,设置在壳体外部并且耦合到通过其中的停车电缆的一部分的电缆套圈,其中电缆套圈 当驱动构件致动驻车电缆时,通过停车电缆向壳体偏置;以及感测构件,插入在壳体和电缆套圈之间并测量停车电缆的张力。
    • 9. 发明申请
    • DIGITAL PHOTOGRAPHING APPARATUS, METHOD OF CONTROLLING THE SAME, AND RECORDING MEDIUM HAVING RECORDED THEREON COMPUTER PROGRAM TO IMPLEMENT THE METHOD
    • 数字摄影装置,其控制方法以及具有记录的计算机程序的记录介质来实现该方法
    • US20100053321A1
    • 2010-03-04
    • US12424738
    • 2009-04-16
    • In-su KimHong-Seok ChoiSeok-ho Jeon
    • In-su KimHong-Seok ChoiSeok-ho Jeon
    • H04N7/18G06K9/46
    • H04N5/232H04N5/144H04N5/23229
    • A digital photographing apparatus is provided that is capable of effectively distinguishing a background region and a motion region. Also provided is a method of controlling the digital photographing apparatus, and a recording medium having recorded thereon a computer program to implement the method. The digital photographing apparatus includes an imaging device generating data from light incident thereto, a first difference image data obtaining unit obtaining first difference image data regarding a first difference image, which represents a difference between a reference image and a current frame image, a second difference image data obtaining unit obtaining second difference image data regarding a second difference image, which represents a difference between the current frame image and a previous frame image, and a motion region determining unit determining a motion region in the current frame image, by using the first difference image data and the second difference image data.
    • 提供了能够有效区分背景区域和运动区域的数字摄影装置。 还提供了一种控制数字摄影装置的方法,以及其上记录有用于实现该方法的计算机程序的记录介质。 数字摄影装置包括从入射到其上的光生成数据的成像装置,第一差分图像数据获取单元获取关于表示参考图像和当前帧图像之间的差的第一差分图像的第一差异图像数据,第二差异 图像数据获取单元获取关于表示当前帧图像和先前帧图像之间的差的第二差异图像的第二差分图像数据,以及通过使用第一图像数据获取单元确定当前帧图像中的运动区域的运动区域确定单元 差分图像数据和第二差分图像数据。