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1. 发明授权

US08834824B2 Method of treating a gas stream 有权
标题翻译：处理气流的方法
公开(公告)号：US08834824B2
公开(公告)日：2014-09-16
申请号：US11992906
申请日：2006-09-21
申请人： James Robert Smith , Andrew David Wright
发明人： James Robert Smith , Peter Leslie Timms
IPC分类号： B01D53/68
CPC分类号： B01D53/685 , Y02C20/30
摘要： A method is described for treating a gas stream comprising fluorine (F2) gas. In a preferred embodiment, the method comprises adding water vapor to a gas stream and conveying the gas stream and water vapor to a reaction chamber containing a heated bed of material to react with F2 to form an inorganic fluoride while inhibiting formation of CF4 within the reaction chamber, and at least partially evacuating the reaction chamber so that the gas stream is conveyed to and from the reaction chamber at sub-atmospheric pressure.
摘要翻译：描述了一种处理包含氟（F2）气体的气流的方法。在优选的实施方案中，该方法包括向气流中加入水蒸气并将气流和水蒸气输送到含有加热床物质的反应室，以与F2反应以形成无机氟化物，同时抑制反应中CF 4的形成并且至少部分地抽空反应室，使得气流在低于大气压下被输送到反应室。

2. 发明授权

US08647580B2 Gas abatement 有权
标题翻译：气体减排
公开(公告)号：US08647580B2
公开(公告)日：2014-02-11
申请号：US11658240
申请日：2005-07-19
申请人： James Robert Smith , Andrew James Seeley
发明人： James Robert Smith , Andrew James Seeley
IPC分类号： B01D53/70
CPC分类号： F04C19/00 , C23C16/4412 , F04F5/54 , Y02C20/30
摘要： System for treating an effluent fluid stream from a process tool including a vacuum pump (16) for drawing an effluent stream from the process tool chamber, an abatement device (12) for treating the effluent stream and a liquid ring pump (14) for at least partially evacuating the abatement device (12). During use, the abatement device (12) converts one or more components of the effluent stream, for example F2 or a PFC, into one or more liquid-soluble a compounds, for example HF, that are less harmful to the environment. The liquid ring pump (14) receives the effluent stream and a liquid, and exhausts a solution of the liquid and the liquid-soluble component of the effluent stream. The liquid ring pump (14) thus operates as both a wet scrubber and an atmospheric vacuum pumping stage.
摘要翻译：用于处理来自处理工具的流出物流的系统，包括用于从处理工具室抽出流出物流的真空泵（16），用于处理流出物流的减排装置（12）和用于处理流出物流的液环泵至少部分地排除减排装置（12）。在使用期间，减排装置（12）将流出物流（例如F2或PFC）的一种或多种组分转化成对环境有害的较少的一种或多种液体可溶的化合物，例如HF。液体环泵（14）接收流出物流和液体，排出液体和流出物流的液体可溶性成分的溶液。液环泵（14）因此作为湿式洗涤器和大气真空泵送阶段工作。

3. 发明授权

US08480861B2 Method of treating gas 失效
标题翻译：处理气体的方法
公开(公告)号：US08480861B2
公开(公告)日：2013-07-09
申请号：US12084361
申请日：2006-09-28
申请人： James Robert Smith , Marilena Radoiu , Stephen John Coles
发明人： James Robert Smith , Marilena Radoiu , Stephen John Coles
IPC分类号： B01D53/00 , B01J19/08
CPC分类号： B01D53/32 , B01D2257/204 , B01D2257/206 , B01D2258/0216 , B01D2259/818 , C23C16/4408 , C23C16/4412 , Y02C20/30
摘要： In a method of treating a gas exhausted from a process chamber, the exhaust gas is conveyed to a vacuum pump (20) and a nitrogen purge gas is added to the exhaust gas for pumping with the exhaust gas. Gas exhaust from the pump is conveyed to an abatement device (28) for abating the exhaust gas. The amount of purge gas added to the exhaust gas is adjusted in response to a variation of the composition of the exhaust gas, or the composition of the gas supplied to the process chamber, to optimise the abatement of the exhaust gas.
摘要翻译：在处理从处理室排出的气体的方法中，排气被输送到真空泵（20），氮气净化气体被添加到排气中以与废气一起泵送。来自泵的排气被输送到减排装置（28）以减轻废气。响应于废气的组成的变化或供给到处理室的气体的组成而调整排出气体中的净化气体的量，以优化废气的减少。

4. 发明申请

US20120253500A1 METHOD OF CONTROLLING OPERATION OF A PROCESSING SYSTEM 有权
标题翻译：控制加工系统运行的方法
公开(公告)号：US20120253500A1
公开(公告)日：2012-10-04
申请号：US13495350
申请日：2012-06-13
申请人： James Robert Smith , Michael Roger Czerniak , Nigel James Gibbins
发明人： James Robert Smith , Michael Roger Czerniak , Nigel James Gibbins
IPC分类号： G05B19/18
CPC分类号： G05B19/4185 , Y02P80/114 , Y02P90/12 , Y02P90/18 , Y02P90/86
摘要： In a method of controlling operation of a processing system, a host computer, a process tool and a component of an evacuation system, for example an abatement tool, are connected to a system bus. The abatement tool monitors signals transmitted on the system bus between the host computer and the process tool, and signals received directly from the process tool. The abatement tool uses information contained within the monitored signals to generate a signal for the process tool regarding an operating characteristic of the abatement tool. This signal is transmitted either directly or over the system bus to the process tool, which uses the generated signal to control an operating state of the process tool.
摘要翻译：在控制处理系统的操作的方法中，主计算机，处理工具和撤离系统的组件（例如减排工具）连接到系统总线。减排工具监视主计算机和处理工具之间在系统总线上传输的信号，以及直接从处理工具接收到的信号。减排工具使用监控信号中包含的信息，以产生关于减排工具的操作特性的处理工具的信号。该信号直接或通过系统总线传输到过程工具，该工具使用生成的信号来控制过程工具的操作状态。

5. 发明申请

US20100303696A1 METHOD OF TREATING A GAS STREAM 审中-公开
标题翻译：处理气流的方法
公开(公告)号：US20100303696A1
公开(公告)日：2010-12-02
申请号：US12808466
申请日：2008-12-02
申请人： James Robert Smith , Gareth David Stanton
发明人： James Robert Smith , Gareth David Stanton
IPC分类号： B01D53/86 , B01D53/46 , B01D53/72 , B01D53/62 , B01D53/58
CPC分类号： B01D53/44 , B01D2251/102 , B01D2251/11 , B01D2257/108 , B01D2257/406 , B01D2257/502 , B01D2257/7022 , B01D2257/706 , B01D2258/0216
摘要： A method is described for treating a gas stream containing either fuel only or both fuel and oxidant gases, such as hydrogen, nitrous oxide or a hydrocarbon gas. The gas stream is conveyed through a vacuum pumping arrangement comprising a plurality of pumping stages. Either immediately before or immediately after the final pumping stage, the steps of adding a gaseous oxidant to the gas stream and oxidising the fuel gas are performed. By treating the gas stream in this manner, the risk of uncontrolled combustion of the fuel gas can be minimised.
摘要翻译：描述了一种用于处理仅包含燃料或燃料和氧化剂气体（例如氢气，一氧化二氮或烃气体）的气流的方法。气流通过包括多个泵送级的真空泵送装置输送。在最终泵送阶段之前或之后，执行向气流中加入气态氧化剂并氧化燃料气体的步骤。通过以这种方式处理气流，可以使燃料气体的不受控燃烧的风险最小化。

6. 发明申请

US20090297420A1 Method of Treating a Gas Stream 有权
标题翻译：处理气流的方法
公开(公告)号：US20090297420A1
公开(公告)日：2009-12-03
申请号：US11992906
申请日：2006-09-21
申请人： Peter Leslie Timms , Elizabeth Timms , James Robert Smith , Andrew David Wright
发明人： Peter Leslie Timms , Elizabeth Timms , James Robert Smith , Andrew David Wright
IPC分类号： B01D53/68 , B01J19/00
CPC分类号： B01D53/685 , Y02C20/30
摘要： A method is described for treating a gas stream comprising fluorine (F2) gas. In a preferred embodiment, the method comprises the steps of conveying the gas stream to a reaction chamber containing a heated bed of material to react with F2 to form an inorganic fluoride, and at least partially evacuating the reaction chamber so that the gas stream is conveyed to and from the reaction chamber at a sub-atmospheric pressure.
摘要翻译：描述了一种处理包含氟（F2）气体的气流的方法。在一个优选的实施方案中，该方法包括以下步骤：将气流输送到含有加热床材料的反应室，以与F2反应形成无机氟化物，并至少部分抽空反应室，使得气流被输送在低于大气压的压力下进入和离开反应室。

7. 发明授权

US06530977B2 Abatement of semiconductor processing gases 有权
标题翻译：减少半导体加工气体
公开(公告)号：US06530977B2
公开(公告)日：2003-03-11
申请号：US09796846
申请日：2001-03-01
申请人： Andrew James Seeley , James Robert Smith
发明人： Andrew James Seeley , James Robert Smith
IPC分类号： B01D4700
CPC分类号： B01D53/68 , B01D53/70 , B01D2258/0216
摘要： A method for the abatement of one or more pyrophoric gases in a gas stream, which includes introducing water in to the gas stream and/or mixing the gas stream with preheated air and introducing the gas stream in to a container in which the pyrophoric gases are abated.
摘要翻译：一种用于减轻气流中的一种或多种自燃气体的方法，其包括将水引入气流中和/或将气流与预热的空气混合并将气流引入到其中自燃气体的容器中减轻

8. 发明申请

US20110197759A1 METHOD OF TREATING A GAS STREAM 有权
标题翻译：处理气流的方法
公开(公告)号：US20110197759A1
公开(公告)日：2011-08-18
申请号：US11990255
申请日：2006-07-27
申请人： James Robert Smith , Andrew James Seeley , Derek Martin Baker , Marilena Radoiu
发明人： James Robert Smith , Andrew James Seeley , Derek Martin Baker , Marilena Radoiu
IPC分类号： B03C3/34
CPC分类号： H01J37/32844 , H01J37/32192 , H01J37/32229 , Y02C20/30
摘要： A method is described for treating gas exhaust from a polysilicon etch process, which uses a plasma abatement device to treat the gas. The device comprises a stainless steel gas chamber having a gas inlet for receiving the gas and a gas outlet. As the gas may contain a halocompound and water vapour, the chamber is heated to a temperature that inhibits adsorption of water on the surface within the chamber, thereby inhibiting corrosion of the gas chamber. The gas is then conveyed to the gas chamber for treatment, and the temperature of the chamber is maintained above said temperature during treatment of the gas.
摘要翻译：描述了一种用于处理来自多晶硅蚀刻工艺的排气的方法，其使用等离子体消除装置来处理气体。该装置包括具有用于接收气体的气体入口和气体出口的不锈钢气室。由于气体可能含有卤化合物和水蒸气，所以将该室加热到抑制室内表面上的水吸附的温度，从而抑制气室的腐蚀。然后将气体输送到气室进行处理，并且在处理气体期间将室的温度保持在所述温度以上。

9. 发明授权

US07819635B2 Vacuum pump with a continuous ignition source 有权
标题翻译：具有连续点火源的真空泵
公开(公告)号：US07819635B2
公开(公告)日：2010-10-26
申请号：US10594402
申请日：2005-03-08
申请人： Graeme Huntley , Andrew James Seeley , James Robert Smith
发明人： Graeme Huntley , Andrew James Seeley , James Robert Smith
IPC分类号： F04B3/00
CPC分类号： F04D19/04
摘要： A multi-stage vacuum pump comprises, between adjacent stages of the pump, a continuous ignition source for igniting a fuel within a pumped fluid. This can ensure that the concentration of the fuel in fluid exhaust from the pump is below its lower explosive limit.
摘要翻译：多级真空泵在泵的相邻级之间包括用于点燃泵送流体内的燃料的连续点火源。这可以确保来自泵的流体排出物中的燃料浓度低于其较低的爆炸极限。

10. 发明授权

US07740815B2 Method of treating a gas stream 有权
标题翻译：处理气流的方法
公开(公告)号：US07740815B2
公开(公告)日：2010-06-22
申请号：US11887044
申请日：2006-03-13
申请人： James Robert Smith , Gary Peter Knight
发明人： James Robert Smith , Gary Peter Knight
IPC分类号： B01D53/46 , B01D53/68 , B01D53/74
CPC分类号： B01J19/002 , B01D53/46 , B01D53/72 , B01D2251/10 , B01D2258/0216 , B01J19/20 , B01J2219/00263 , B01J2219/00265 , C23C16/4412
摘要： A method of treating a gas stream containing silane or other silicon-containing gas is described, in which the gas stream is conveyed to a liquid ring pump or screw-mechanism pump, to which are also supplied an oxidant for oxidising the silicon-containing gas within the pump, and a liquid for forming a liquid ring or intermittent flushing within the pump. A liquid stream containing said liquid and a by-product of the oxidation of the silicon-containing gas is exhaust from the pump.
摘要翻译：描述了一种处理含有硅烷或其它含硅气体的气流的方法，其中将气流输送到液环泵或螺杆机构泵，向其中还提供用于氧化含硅气体的氧化剂在泵内，以及用于在泵内形成液环或间歇冲洗的液体。含有所述液体的液体物流和含硅气体的氧化副产物从泵排出。

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