会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • System for abating the simultaneous flow of silane and arsine
    • 减轻硅烷和胂同时流动的系统
    • US08808453B2
    • 2014-08-19
    • US11737447
    • 2007-04-19
    • Kurt A. Carlsen
    • Kurt A. Carlsen
    • C23C16/50C23C16/00C23F1/00H01L21/306
    • B01D53/46C23C16/4412
    • A system for abating a simultaneous flow of silane and arsine contained in an exhaust gas of DRAM processing chamber. The system includes a CVD abatement apparatus and a resin-type adsorber. The CVD abatement apparatus comprises an enclosure that defines a chamber for receiving the exhaust gas. The enclosure contains a plurality of removable substrates arranged as a series of baffles inside the enclosure. As the exhaust gas flows through the CVD abatement apparatus, the silicon within the silane is deposited as a film upon the substrates by chemical vapor deposition. The arsine continues to flow through the CVD apparatus to the adsorber where it is adsorbed by the resin contained therein. After the film has reached a particular thickness, the substrates can be removed from the enclosure, cleaned of the film and returned to the enclosure for further use.
    • 一种用于减轻DRAM处理室的废气中所含的硅烷和胂同时流动的系统。 该系统包括CVD消除装置和树脂型吸附器。 CVD消除装置包括限定用于接收废气的室的外壳。 外壳包含多个可拆卸的基板,其被布置成在外壳内部的一系列挡板。 当废气流过CVD消除装置时,通过化学气相沉积将硅烷内的硅作为膜沉积在基板上。 胂继续通过CVD装置流到吸附器,吸附器被其中包含的树脂所吸附。 在膜已经达到特定厚度之后,可以将基板从外壳中取出,清除胶片并返回外壳进一步使用。
    • 10. 发明授权
    • Method oil shale pollutant sorption/NOx reburning multi-pollutant control
    • 油页岩污染物吸附/ NOx再燃多污染物控制方法
    • US07384615B2
    • 2008-06-10
    • US11004698
    • 2004-12-02
    • Richard D. BoardmanRobert A. Carrington
    • Richard D. BoardmanRobert A. Carrington
    • B01D53/34B01D53/46F23J7/00F23J15/00
    • B01D53/46B01D53/60B01D2251/20B01D2253/20B01D2257/204B01D2257/302B01D2257/308B01D2257/404B01D2257/602F23G2900/7013F23J7/00F23J15/003Y02A50/2344
    • A method of decreasing pollutants produced in a combustion process. The method comprises combusting coal in a combustion chamber to produce at least one pollutant selected from the group consisting of a nitrogen-containing pollutant, sulfuric acid, sulfur trioxide, carbonyl sulfide, carbon disulfide, chlorine, hydroiodic acid, iodine, hydrofluoric acid, fluorine, hydrobromic acid, bromine, phosphoric acid, phosphorous pentaoxide, elemental mercury, and mercuric chloride. Oil shale particles are introduced into the combustion chamber and are combusted to produce sorbent particulates and a reductant. The at least one pollutant is contacted with at least one of the sorbent particulates and the reductant to decrease an amount of the at least one pollutant in the combustion chamber. The reductant may chemically reduce the at least one pollutant to a benign species. The sorbent particulates may adsorb or absorb the at least one pollutant. A combustion chamber that produces decreased pollutants in a combustion process is also disclosed.
    • 一种降低燃烧过程中产生的污染物的方法。 该方法包括在燃烧室中燃烧煤以产生选自含氮污染物,硫酸,三氧化硫,硫化氢,二硫化碳,氯,氢碘酸,碘,​​氢氟酸,氟的至少一种污染物 ,氢溴酸,溴,磷酸,五氧化磷,元素汞和氯化汞。 将油页岩颗粒引入燃烧室并燃烧以产生吸附剂颗粒和还原剂。 至少一种污染物与吸附剂微粒和还原剂中的至少一种接触以减少燃烧室中至少一种污染物的量。 还原剂可以将至少一种污染物化学还原成良性物质。 吸附剂颗粒可以吸附或吸收至少一种污染物。 还公开了在燃烧过程中产生降低的污染物的燃烧室。