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    • 2. 发明申请
    • METHOD FOR COMPUTING THE SENSITIVITY OF A VLSI DESIGN TO BOTH RANDOM AND SYSTEMATIC DEFECTS USING A CRITICAL AREA ANALYSIS TOOL
    • 使用关键区域分析工具计算VLSI设计对两个随机和系统缺陷的灵敏度的方法
    • US20120137262A1
    • 2012-05-31
    • US13368413
    • 2012-02-08
    • Jeanne P. BickfordJason D. HibbelerJuergen Koehl
    • Jeanne P. BickfordJason D. HibbelerJuergen Koehl
    • G06F17/50
    • G06F17/5081
    • A method of estimating integrated circuit yield comprises providing an integrated circuit layout and a set of systematic defects based on a manufacturing process. Next, the method represents a systematic defect by modifying structures in the integrated circuit layout to create modified structures. More specifically, for short-circuit-causing defects, the method pre-expands the structures when the structures comprise a higher systematic defect sensitivity level, and pre-shrinks the structures when the structures comprise a lower systematic defect sensitivity level. Following this, a critical area analysis is performed on the integrated circuit layout using the modified structures, wherein dot-throwing, geometric expansion, or Voronoi diagrams are used. The method then computes a fault density value, random defects and systematic defects are computed. The fault density value is subsequently compared to a predetermined value, wherein the predetermined value is determined using test structures and/or yield data from a target manufacturing process.
    • 估计集成电路产量的方法包括基于制造过程提供集成电路布局和一组系统缺陷。 接下来,该方法通过修改集成电路布局中的结构以产生修改的结构来表示系统缺陷。 更具体地,对于短路导致的缺陷,当结构包括较高的系统缺陷灵敏度水平时,该方法预扩展结构,并且当结构包括较低的系统缺陷灵敏度水平时,预结构。 接下来,使用改进的结构对集成电路布局进行关键区域分析,其中使用点投掷,几何展开或Voronoi图。 然后,该方法计算故障密度值,计算随机缺陷和系统缺陷。 随后将故障密度值与预定值进行比较,其中使用来自目标制造过程的测试结构和/或屈服数据确定预定值。
    • 3. 发明申请
    • AUTOMATED SENSITIVITY DEFINITION AND CALIBRATION FOR DESIGN FOR MANUFACTURING TOOLS
    • 用于制造工具的自动灵敏度定义和校准
    • US20110166686A1
    • 2011-07-07
    • US12652409
    • 2010-01-05
    • James A. CulpJason D. HibbelerLars W. LiebmannTina Wagner
    • James A. CulpJason D. HibbelerLars W. LiebmannTina Wagner
    • G06F17/50G06G7/66G06N5/02
    • G06F17/5081G06F2217/12Y02P90/265
    • A method of automatic calibration of a design for manufacturing (DfM) simulation tool includes providing, as a first input, one or more defined rules for each of one or more semiconductor device levels to be simulated by the tool, and providing, as a second input, a plurality of defined feature size threshold ranges and increments for use in histogram generation of a number of failures with respect to a reference circuit; providing, as a third input, the reference circuit; executing the defined rules for the semiconductor device levels to be simulated, and outputting a fail count for the reference circuit at each defined threshold value, thereby generating histogram data of fail count versus threshold for the reference circuit; and providing, as a fourth input, a defined fail count metric, thereby calibrating the DfM tool for use with respect to a target circuit.
    • 一种用于制造设计(DfM)模拟工具的自动校准的方法包括为由工具模拟的一个或多个半导体器件级别中的每一个提供一个或多个限定规则作为第一输入,并且作为第二输入提供第二 输入,多个定义的特征尺寸阈值范围和增量,用于相对于参考电路的多个故障的直方图生成; 提供参考电路作为第三输入; 执行要被模拟的半导体器件电平的限定规则,并在每个定义的阈值处输出参考电路的故障计数,由此产生参考电路的故障计数与阈值的直方图数据; 并且作为第四输入提供定义的故障计数度量,从而校准用于目标电路的DfM工具。