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    • 3. 发明授权
    • Method of making a thin film transistor
    • 制造薄膜晶体管的方法
    • US5130264A
    • 1992-07-14
    • US763485
    • 1991-09-23
    • John R. TroxellMarie I. Harrington
    • John R. TroxellMarie I. Harrington
    • H01L21/762H01L21/336H01L21/84H01L29/78H01L29/786
    • H01L29/66757H01L21/84H01L29/78636H01L29/78675Y10S148/053Y10S148/15
    • A thin film field effect transistor has an island of polysilicon on the surface of a substrate, preferably of an insulating material. A layer of silicon dioxide is on the surface of the substrate and surrounds the polysilicon island. The silicon dioxide layer is of substantially uniform thickness and contacts the edge of the polysilicon island. A gate insulator layer, preferably of silicon dioxide, of substantially uniform thickness is on the surface of the polysilicon island. A conductive gate, preferably of doped polysilicon, is on the gate insulator layer and extends across a portion of the polysilicon island. The portions of the polysilicon island at opposite sides of the gate are doped to form the source and drain of the transistor. The transistor is formed by applying a layer of polysilicon on the surface of a substrate and applying a mask over the portion of the polysilicon layer which is to form the island. The uncovered portion of the polysilicon layer is converted to silicon dioxide, such as by heating in an atmosphere containing oxygen. After removing the mask, the gate insulator layer is formed over the surface of the polysilicon island, and the gate is formed over the gate insulator.
    • 薄膜场效应晶体管在衬底的表面上具有优选为绝缘材料的多晶硅岛。 二氧化硅层位于衬底的表面上并且围绕多晶硅岛。 二氧化硅层具有基本均匀的厚度并且接触多晶硅岛的边缘。 在多晶硅岛的表面上具有基本均匀厚度的栅极绝缘体层,优选二氧化硅。 导电栅极,优选地是掺杂多晶硅,位于栅极绝缘体层上并延伸跨越多晶硅岛的一部分。 在栅极的相对侧的多晶硅岛的部分被掺杂以形成晶体管的源极和漏极。 通过在衬底的表面上施加多晶硅层并在将要形成岛的多晶硅层的部分上施加掩模来形成晶体管。 多晶硅层的未覆盖部分例如通过在含氧气氛中加热而转化为二氧化硅。 在去除掩模之后,在多晶硅岛的表面上形成栅极绝缘体层,并且栅极形成在栅极绝缘体上。
    • 7. 发明授权
    • Apparatus and method for providing thermal conductance in thermally responsive photonic imaging devices
    • 在热响应光子学成像装置中提供热传导的装置和方法
    • US07351973B2
    • 2008-04-01
    • US11353523
    • 2006-02-14
    • John R. Troxell
    • John R. Troxell
    • G01J5/00
    • G01J5/02G01J5/0245G01J5/34
    • Exemplary embodiments of the present invention are directed to a photonic sensor and method of operation, in one embodiment a photonic has: a sensing element; a dielectric layer; a first electrode disposed between the sensing element and the dielectric layer; a second electrode positioned in a facing spaced relationship with respect to the dielectric layer, the second electrode being disposed upon a substrate; and wherein an applied voltage between the first and second electrodes attracts the first electrode towards the second electrode resulting in a movement of the sensor and the first electrode and dielectric layer with respect to the second electrode, wherein a path of thermal conductance is provided between the substrate and the sensing element through the first electrode, the dielectric layer and the second electrode, and the dielectric layer and the first electrode return to the facing spaced relationship when the applied voltage is removed.
    • 本发明的示例性实施例涉及一种光子传感器和操作方法,在一个实施例中,光子具有:感测元件; 电介质层; 设置在感测元件和电介质层之间的第一电极; 第二电极,其相对于所述电介质层定位成相对间隔的关系,所述第二电极设置在基板上; 并且其中所述第一和第二电极之间施加的电压吸引所述第一电极朝向所述第二电极,导致所述传感器和所述第一电极和介电层相对于所述第二电极的移动,其中在所述第二电极之间提供导热路径 衬底和感测元件通过第一电极,电介质层和第二电极,并且当施加的电压被去除时,电介质层和第一电极返回到面对间隔的关系。
    • 8. 发明授权
    • Optical system for controlling light propagation along a light path
    • 用于控制沿光路的光传播的光学系统
    • US08164045B2
    • 2012-04-24
    • US12698385
    • 2010-02-02
    • John R. TroxellRonald M. Taylor
    • John R. TroxellRonald M. Taylor
    • H01L31/0232
    • H01L27/14625G02B3/12G02B13/005G02B13/0055G02B27/0018
    • An optical system and method for controlling light propagation along a light path. An optical element such as a lens is formed of a first light transmitting material and has a surface finish effective to scatter light impinging on the surface. Index matching material contacts to a portion of the surface so as to reduce or nullify the scattering effects of the surface finish within the portion. This allows the first optical element to have surfaces that have been generally prepared for scattering light and then later selectively negate the scattering effects of the surface finish by contacting portions of the surface with index matching material. As such, light in the optical element directed toward a surface or boundary within selected portion propagates into or out of the optical element. Light outside of the selected portion is scattered. Such an arrangement helps to reduce image degradation due to light outside of the light path being reflected about within the optical system.
    • 一种用于控制沿光路的光传播的光学系统和方法。 诸如透镜的光学元件由第一透光材料形成,并且具有有效地散射入射在表面上的光的表面光洁度。 索引匹配材料与表面的一部分接触,以便减少或消除该部分内的表面光洁度的散射效应。 这允许第一光学元件具有通常准备用于散射光的表面,然后通过接触表面的部分与折射率匹配材料来选择性地否定表面光洁度的散射效应。 因此,指向所选部分内的表面或边界的光学元件中的光传播到光学元件中或从光学元件外传播。 选定部分外的光分散。 这种布置有助于减少由于在光学系统内被反射的光线外部的光的图像劣化。
    • 9. 发明授权
    • Synchronous imaging using segmented illumination
    • 使用分段照明的同步成像
    • US07745771B2
    • 2010-06-29
    • US11732296
    • 2007-04-03
    • John R. TroxellRonald M. TaylorSiddharth S. Rege
    • John R. TroxellRonald M. TaylorSiddharth S. Rege
    • H01L27/00G06M7/00
    • G03B15/05G03B2215/0567G03B2215/0592H04N5/2256H04N5/2354H04N5/3532
    • In an actively illuminated imaging system, illumination of a segmented scene is synchronized with an image sensing period. A scene is segmented into a plurality of scene portions utilizing a segmented lens. In an aspect, a first scene portion is illuminated when an imager is actively collecting photogenerated charge from the first scene portion, and a second scene portion is illuminated when an imager is actively collecting photogenerated charge from the second scene portion. The sensitivity of an image sensor is maximized, while simultaneously minimizing the amount of light that must be supplied to illuminate a scene. An irradiance pattern is varied allowing a more uniform distribution of light. Bands of varying wavelength, polarization, and light intensity may be variously applied to illuminate individual scene segments, as needed to enhance an identification of an object in the scene. The present invention is particularly useful with high frame rate imaging systems.
    • 在主动照明的成像系统中,分割场景的照明与图像感测周期同步。 利用分段透镜将场景分割成多个场景部分。 一方面,当成像器主动地收集来自第一场景部分的光生电荷时,照亮第一场景部分,并且当成像器主动地从第二场景部分收集光生成电荷时,照亮第二场景部分。 图像传感器的灵敏度最大化,同时最小化必须提供以照亮场景的光量。 变化的辐照度模式是允许更均匀的光分布的。 根据需要可以不同地应用变化的波长,极化和光强度的带照射各个场景段,以增强对场景中物体的识别。 本发明对于高帧速率成像系统特别有用。
    • 10. 发明申请
    • Synchronous imaging using segmented illumination
    • 使用分段照明的同步成像
    • US20080245952A1
    • 2008-10-09
    • US11732296
    • 2007-04-03
    • John R. TroxellRonald M. TaylorSiddharth S. Rege
    • John R. TroxellRonald M. TaylorSiddharth S. Rege
    • H01L27/00
    • G03B15/05G03B2215/0567G03B2215/0592H04N5/2256H04N5/2354H04N5/3532
    • In an actively illuminated imaging system, illumination of a segmented scene is synchronized with an image sensing period. A scene is segmented into a plurality of scene portions utilizing a segmented lens. In an aspect, a first scene portion is illuminated when an imager is actively collecting photogenerated charge from the first scene portion, and a second scene portion is illuminated when an imager is actively collecting photogenerated charge from the second scene portion. The sensitivity of an image sensor is maximized, while simultaneously minimizing the amount of light that must be supplied to illuminate a scene. An irradiance pattern is varied allowing a more uniform distribution of light. Bands of varying wavelength, polarization, and light intensity may be variously applied to illuminate individual scene segments, as needed to enhance an identification of an object in the scene. The present invention is particularly useful with high frame rate imaging systems.
    • 在主动照明的成像系统中,分割场景的照明与图像感测周期同步。 利用分段透镜将场景分割成多个场景部分。 一方面,当成像器主动地收集来自第一场景部分的光生电荷时,照亮第一场景部分,并且当成像器主动地从第二场景部分收集光生成电荷时,照亮第二场景部分。 图像传感器的灵敏度最大化,同时最小化必须提供以照亮场景的光量。 变化的辐照度模式是允许更均匀的光分布的。 根据需要可以不同地应用变化的波长,极化和光强度的带照射各个场景段,以增强对场景中物体的识别。 本发明对于高帧速率成像系统特别有用。