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    • 2. 发明授权
    • Inertia force sensor
    • 惯性力传感器
    • US06736008B2
    • 2004-05-18
    • US10300751
    • 2002-11-21
    • Munehito KumagaiYukihisa YoshidaKazuhiko Tsutsumi
    • Munehito KumagaiYukihisa YoshidaKazuhiko Tsutsumi
    • G01P344
    • G01P15/125G01P2015/0814
    • An inertia force sensor with a damper. The damper includes a cantilever for a movable part disposed in a movable electrode protruding therefrom, and a cantilever for a fixed part disposed in a support portion for the movable part or a support portion for the fixed part and protruding therefrom. The damper allows the cantilever for the movable part and the cantilever for the fixed part to contact each other before the movable electrode contacts the support portion for the movable part and the support portion for the fixed part. As a result, it is possible to prevent a stopper from being damaged and to improve the reliability of the sensor.
    • 具有阻尼器的惯性力传感器。 阻尼器包括用于可移动部件的悬臂,该活动部件设置在从其突出的可动电极中,以及用于固定部分的悬臂,其设置在用于可动部件的支撑部分或用于固定部件的支撑部分并从其突出。 阻尼器允许可动部件的悬臂和用于固定部件的悬臂彼此接触,然后可动电极接触用于可动部件的支撑部分和用于固定部件的支撑部分。 结果,可以防止止动件被损坏并提高传感器的可靠性。
    • 5. 发明授权
    • Heat-sensitive type flow rate detecting element and holder therefor
    • 热敏型流量检测元件及其支架
    • US06615655B1
    • 2003-09-09
    • US10031148
    • 2002-01-17
    • Yuichi SakaiAkira YamashitaMotohisa TaguchiTomoya YamakawaMasahiro KawaiKazuhiko Tsutsumi
    • Yuichi SakaiAkira YamashitaMotohisa TaguchiTomoya YamakawaMasahiro KawaiKazuhiko Tsutsumi
    • G01F168
    • G01F1/692G01F1/6845
    • A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer including a support film and a protective film on one surface of a flat substrate, a heating resistance section and a comparative resistance section thermosensitive resistor having patterns and located between the support film and the protective film. The flat substrate has a recess which penetrates the flat substrate in the thickness direction thereof and facing the heating resistance section and the comparative resistance section. A fluid flow passage communicates with the recess which faces the comparative resistance section for fluid flow into the recess. Flow rate or velocity of a fluid can be measured accurately using the heating resistance section according to the fluid temperature reported by the comparative resistance section.
    • 流量检测元件,其测量各种流体的流量,特别是内燃机的进气。 流量检测元件具有在平坦基板的一个表面上包括支撑膜和保护膜的薄膜层,具有图案并位于支撑膜和保护膜之间的加热电阻部分和比较电阻部分热敏电阻器。 平面基板具有在其平坦基板的厚度方向上贯通平板状基板的面向加热电阻部和比较电阻部的凹部。 流体流动通道与面向比较电阻部分的凹部连通,以使流体流入凹部。 可以使用根据比较电阻部报告的流体温度的加热电阻部分精确地测量流体的流速或速度。
    • 6. 发明授权
    • Pressure sensor with a thermal pressure detecting element
    • 具有热压检测元件的压力传感器
    • US06393919B1
    • 2002-05-28
    • US09644693
    • 2000-08-24
    • Hiroshi OhjiKazuhiko TsutsumiYuichi SakaiNaoki Yutani
    • Hiroshi OhjiKazuhiko TsutsumiYuichi SakaiNaoki Yutani
    • G01L1904
    • G01L11/002
    • A pressure sensor of the present invention comprises a diaphragm 6 having a first surface which receives pressure and a thermal detecting portion 3 with a heat sensitive portion disposed as to oppose the diaphragm through a spacer, wherein displacement values of the diaphragm owing to variations in pressure are detected at the thermal detecting portion as variation values of thermal equilibrium state. With this arrangement, a surface of the diaphragm which directly receives pressure from measuring fluid does not need to undergo film forming or photolithographic processes whereby main portions of thermal pressure detecting elements might be formed onto a silicon substrate by large quantities in a lump sum through simple manufacturing processes so that it is possible to improve accuracy and reliability of the thermal pressure detecting elements and to obtain a pressure sensor of low cost.
    • 本发明的压力传感器包括具有接收压力的第一表面的隔膜6和具有通过间隔件布置成与隔膜相对设置的热敏部分的热检测部分3,其中由于压力变化导致隔膜的位移值 在热检测部分被检测为热平衡状态的变化值。 通过这种布置,直接从测量流体接收压力的隔膜的表面不需要进行成膜或光刻工艺,其中热压检测元件的主要部分可以通过简单的一次性大量形成在硅基板上 制造工艺,从而可以提高热压检测元件的精度和可靠性,并获得低成本的压力传感器。