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    • 4. 发明授权
    • Wafer carrying fork
    • 晶圆携带叉
    • US06276731B1
    • 2001-08-21
    • US09462820
    • 2000-03-20
    • Kazunori Hino
    • Kazunori Hino
    • B65G4907
    • H01L21/68707Y10S414/141
    • A wafer carrying fork on which a wafer rests and carried and which comprises a wafer resting surface (2) provided on the top surface of a wafer carrying fork (1), and two steps (3, 4) provided on the outer sides of the wafer resting surface (2) in a stepwise manner and having a height to width ratio of 1:0.5 to 1:2. Accordingly, it is possible to have a wafer (6) surely rest on the wafer carrying fork (1), even when the wafer (6) gets out of position in a wafer cassette, to convey it without failing.
    • 一种晶片承载叉,其上放置有晶片并承载并包括设置在晶片承载叉(1)的顶表面上的晶片搁置表面(2)和设置在晶片承载叉的外侧上的两个台阶(3,4) 晶片搁置面(2),并具有1:0.5〜1:2的高宽比。 因此,即使当晶片(6)离开晶片盒中的位置时,也可以将晶片(6)确实地放置在晶片承载叉(1)上,以便不会发生故障。