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    • 4. 发明授权
    • Preferential etching method of forming microstructure for an optical waveguide
    • 用于形成光波导的微结构的优选蚀刻方法
    • US07346250B1
    • 2008-03-18
    • US11731633
    • 2007-03-30
    • Leonard Charles Dabich, IIMichael Thomas GallagherDaniel Warren HawtofBrett Jason HooverKarl William Koch, III
    • Leonard Charles Dabich, IIMichael Thomas GallagherDaniel Warren HawtofBrett Jason HooverKarl William Koch, III
    • G02B6/04G02B6/02
    • G02B6/02357C03B37/01208C03B37/01228C03B2203/42
    • A method of fabricating a microstructure for an optical waveguide such as a photonic bandgap fiber is provided. The method includes the steps of assembling a stack of capillary tubes having substantially identical dimensions, fusing and redrawing the stack into a preform having a plurality of parallel holes of equal diameter, selecting a pattern of the holes for etching in order to increase their diameter, and plugging the unselected holes at one end of the preform against the flow of a pressurized etching fluid. Such plugging of the unselected holes is accomplished applying a layer of a gel-like sealant over the end of the preform, and then pushing the sealant into the holes to form sealant plugs in all of the holes. The sealant plugs are then removed from the selected holes by punching the sealant plugs out of the selected holes. The selected holes are then etched by conducting a pressurized flow of etching fluid to the end of the preform such that etching fluid flows only through the pattern of selected holes. The resulting preform is then fused and drawn into an optical waveguide, where the pattern of etched and unetched holes may form, for example, the microstructure for a photonic bandgap optical fiber.
    • 提供了一种制造诸如光子带隙光纤的光波导的微结构的方法。 该方法包括以下步骤:组装具有基本上相同尺寸的毛细管堆叠,将叠层熔化并重新拉伸成具有多个相同直径的平行孔的预制件,选择用于蚀刻的孔的图案以增加其直径, 并且在预成型件的一端处与未加压的蚀刻流体的流动堵塞未选择的孔。 实现未选择的孔的这种堵塞是在预成型件的端部上施加一层凝胶状密封剂,然后将密封剂推入孔中以在所有孔中形成密封塞。 然后通过从所选择的孔中冲出密封剂塞从所选择的孔中移除密封塞。 然后通过将加压的蚀刻流体流引导到预成型件的端部来蚀刻所选择的孔,使得蚀刻流体仅流过选定孔的图案。 然后将所得的预制件熔合并拉入光波导,其中蚀刻和未蚀刻孔的图案可以形成例如光子带隙光纤的微结构。