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    • 2. 发明申请
    • Semiconductor device with multiple semiconductor layers
    • 具有多个半导体层的半导体器件
    • US20050275018A1
    • 2005-12-15
    • US10865351
    • 2004-06-10
    • Suresh VenkatesanMark FoisyMichael MendicinoMarius Orlowski
    • Suresh VenkatesanMark FoisyMichael MendicinoMarius Orlowski
    • H01L21/8234H01L21/8238H01L21/84H01L27/12
    • H01L21/84H01L21/823807H01L27/1203
    • A semiconductor device structure uses two semiconductor layers to separately optimize N and P channel transistor carrier mobility. The conduction characteristic for determining this is a combination of material type of the semiconductor, crystal plane, orientation, and strain. Hole mobility is improved in P channel transistors when the conduction characteristic is characterized by the semiconductor material being silicon germanium, the strain being compressive, the crystal plane being (100), and the orientation being . In the alternative, the crystal plane can be (111) and the orientation in such case is unimportant. The preferred substrate for N-type conduction is different from the preferred (or optimum) substrate for P-type conduction. The N channel transistors preferably have tensile strain, silicon semiconductor material, and a (100) plane. With the separate semiconductor layers, both the N and P channel transistors can be optimized for carrier mobility.
    • 半导体器件结构使用两个半导体层来分别优化N沟道晶体管和P沟道晶体管的载流子迁移率。 用于确定的导电特性是半导体的材料类型,晶面,取向和应变的组合。 当导电特性的特征在于半导体材料为硅锗时,p型沟道晶体管的空穴迁移率得到改善,应变为压缩,晶面为(100),取向为100。 或者,晶面可以是(111),在这种情况下的取向是不重要的。 用于N型导电的优选衬底不同于用于P型导电的优选(或最佳)衬底。 N沟道晶体管优选具有拉伸应变,硅半导体材料和(100)平面。 通过分开的半导体层,N沟道晶体管和P沟道晶体管都可以优化载流子迁移率。
    • 5. 发明申请
    • Stressed-channel CMOS transistors
    • 高通道CMOS晶体管
    • US20070184600A1
    • 2007-08-09
    • US11348034
    • 2006-02-06
    • Da ZhangMichael MendicinoBich-Yen Nguyen
    • Da ZhangMichael MendicinoBich-Yen Nguyen
    • H01L21/8238
    • H01L21/823807H01L21/823814H01L29/165H01L29/665H01L29/66628H01L29/66636H01L29/7848
    • Methods for forming portions of source and drain (S/D) regions of a first ensuing transistor (40) to include a semiconductor material (47) having a different composition of non-dopant elements than portions of S/D regions (35) of a second ensuing transistor (30) of opposite conductivity type are provided. The methods additionally include forming another semiconductor material (48) upon at least one set of the S/D regions of the ensuing transistors such that S/D surface layers of the ensuing transistors include substantially the same composition of non-dopant elements. A resulting semiconductor topography includes a pair of CMOS transistors (30, 40) collectively having S/D region surfaces with substantially the same composition of non-dopant elements. The S/D regions of one transistor (40) of the pair of CMOS transistors includes an underlying layer (47) having a different composition of non-dopant elements than underlying layers of the S/D regions (35) of the other transistor (30).
    • 用于形成第一随后晶体管(40)的源极和漏极(S / D)区域的部分的方法,以包括具有与S / D区域(35)的部分不同的非掺杂元素的不同组成的半导体材料(47) 提供了具有相反导电类型的第二随后的晶体管(30)。 所述方法还包括在随后的晶体管的至少一组S / D区上形成另一半导体材料(48),使得随后的晶体管的S / D表面层包括基本上相同的非掺杂元素组成。 所得到的半导体形貌包括一对共同具有基本上相同组成的非掺杂元素的S / D区域表面的CMOS晶体管(30,40)。 该对CMOS晶体管的一个晶体管(40)的S / D区域包括与另一个晶体管的S / D区域(35)的下层不同的非掺杂元素组成的下层(47) 30)。
    • 6. 发明申请
    • SEMICONDUCTOR DEVICE WITH MULTIPLE SEMICONDUCTOR LAYERS
    • 具有多个半导体层的半导体器件
    • US20060194384A1
    • 2006-08-31
    • US11382432
    • 2006-05-09
    • Suresh VenkatesanMark FoisyMichael MendicinoMarius Orlowski
    • Suresh VenkatesanMark FoisyMichael MendicinoMarius Orlowski
    • H01L21/8238
    • H01L21/84H01L21/823807H01L27/1203
    • A semiconductor device structure uses two semiconductor layers to separately optimize N and P channel transistor carrier mobility. The conduction characteristic for determining this is a combination of material type of the semiconductor, crystal plane, orientation, and strain. Hole mobility is improved in P channel transistors when the conduction characteristic is characterized by the semiconductor material being silicon germanium, the strain being compressive, the crystal plane being (100), and the orientation being . In the alternative, the crystal plane can be (111) and the orientation in such case is unimportant. The preferred substrate for N-type conduction is different from the preferred (or optimum) substrate for P-type conduction. The N channel transistors preferably have tensile strain, silicon semiconductor material, and a (100) plane. With the separate semiconductor layers, both the N and P channel transistors can be optimized for carrier mobility.
    • 半导体器件结构使用两个半导体层来分别优化N沟道晶体管和P沟道晶体管的迁移率。 用于确定的导电特性是半导体的材料类型,晶面,取向和应变的组合。 当导电特性的特征在于半导体材料为硅锗时,p型沟道晶体管的空穴迁移率得到改善,应变为压缩,晶面为(100),取向为100。 或者,晶面可以是(111),在这种情况下的取向是不重要的。 用于N型导电的优选衬底不同于用于P型导电的优选(或最佳)衬底。 N沟道晶体管优选具有拉伸应变,硅半导体材料和(100)平面。 通过分开的半导体层,N沟道晶体管和P沟道晶体管都可以优化载流子迁移率。
    • 9. 发明申请
    • Embedded substrate interconnect for underside contact to source and drain regions
    • 用于下侧接触源极和漏极区域的嵌入式衬底互连
    • US20070200173A1
    • 2007-08-30
    • US11356229
    • 2006-02-16
    • Perry PelleyTroy CooperMichael Mendicino
    • Perry PelleyTroy CooperMichael Mendicino
    • H01L27/12
    • H01L29/41733H01L21/84H01L27/12
    • A semiconductor topography (10) is provided which includes a semiconductor-on-insulator (SOI) substrate having a conductive line (16) arranged within an insulating layer (22) of the SOI substrate. A method for forming an SOI substrate with such a configuration includes forming a first conductive line (16) within an insulating layer (22) arranged above a wafer substrate (12) and forming a silicon layer (24) upon surfaces of the first conductive line and the insulating layer. A further method is provided which includes the formation of a transistor gate (28) upon an SOI substrate having a conductive line (16) embedded therein and implanting dopants within the semiconductor topography to form source and drain regions (30) within an upper semiconductor layer (24) of the SOI substrate such that an underside of one of the source and drain regions is in contact with the conductive line.
    • 提供一种半导体图形(10),其包括绝缘体上半导体(SOI)基板,其具有布置在SOI衬底的绝缘层(22)内的导线(16)。 一种用于形成具有这种结构的SOI衬底的方法包括在布置在晶片衬底(12)上方的绝缘层(22)内形成第一导电线(16),并在第一导线的表面上形成硅层(24) 和绝缘层。 提供了一种另外的方法,其包括在SOI衬底上形成晶体管栅极(28),该SOI衬底具有嵌入其中的导电线(16),并且在半导体拓扑图内注入掺杂剂以在上半导体层内形成源区和漏区(30) (24),使得源极和漏极区域之一的下侧与导电线接触。