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    • 5. 发明授权
    • Magnetic memory device having a non-volatile magnetic section and manufacturing thereof
    • 具有非易失磁性部分的磁记录装置及其制造方法
    • US06992342B2
    • 2006-01-31
    • US10612842
    • 2003-07-02
    • Makoto MotoyoshiMinoru Ikarashi
    • Makoto MotoyoshiMinoru Ikarashi
    • H01L29/76
    • H01L27/228B82Y10/00H01L43/08
    • A magnetic memory device, in which a tunnel magneto resistance element that establishes a connection between a write word line (first interconnection) and a bit line (second interconnection) is provided within a region in which the write word line and the bit line cross in a grade-separated manner. The magnetic memory device comprises a through hole that is provided in such a manner that is insulated from the write word line and also extending through the write word line so as to establish a connection between the tunnel magneto resistance element and a second landing pad (interconnection layer) lower than the write word line, and a contact that is formed in the through hole through a side wall barrier film so as to establish a connection between the tunnel magneto resistance element and the second landing pad.
    • 一种磁存储器件,其中在写入字线和位线交叉的区域内提供在写入字线(第一互连)和位线(第二互连)之间建立连接的隧​​道磁阻元件 一个分级的方式。 磁存储器件包括通孔,该通孔以与写字线绝缘的方式设置,并且还延伸穿过写字线,以便建立隧道磁阻元件与第二着地焊盘之间的连接(互连 层),以及通过侧壁阻挡膜形成在通孔中的接触件,以便建立隧道磁阻元件和第二着陆焊盘之间的连接。